Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines

Journal of Microelectromechanical Systems

Volumn 7, Issue 2, 1998, Pages 252-259

  Srinivasan, Uthara ^b,d,e   Houston, Michael R ^b,e,f,g   Howe, Roger T ^a,c   Maboudian, Roya ^b  

^a IEEE

^b University of California   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d PRINCETON UNIVERSITY   (United States)

^e UNIVERSITY OF CALIFORNIA   (United States)

^f GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^g Fleximer   (United States)

Author keywords

Adhesion; MEMS; SAM; Stiction

Indexed keywords

ADHESION; HEAT TREATMENT; MONOLAYERS; POLYCRYSTALLINE MATERIALS; POLYSILANES; PROTECTIVE COATINGS; SEMICONDUCTING SILICON; STICTION; THERMODYNAMIC STABILITY;

ALKYLTRICHLOROSILANES; SELF ASSEMBLED MONOLAYER (SAM) COATINGS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032098211     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.679393     Document Type: Article

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