Effect of humidity on the reliability of a surface micromachined microengine

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 1999, Pages 189-197

  Tanner, Danelle M ^a   Walraven, Jeremy A ^a   Irwin, Lloyd W ^a   Dugger, Michael T ^a   Smith, Norman F ^a   Eaton, William P ^a   Miller, William M ^a   Miller, Samuel L ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ATMOSPHERIC HUMIDITY; CARBON DIOXIDE; LUBRICANTS; MICROMACHINING; RELIABILITY; TRANSMISSION ELECTRON MICROSCOPY; WEAR OF MATERIALS;

FLUORINATED SILANE CHAIN; MICROENGINES; POLYSILICON MICROMACHINES; SURFACE HYDROXIDES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032670035     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (25)