Comparative evaluation of drying techniques for surface micromachining

Sensors and Actuators, A: Physical

Volumn 64, Issue 1, 1998, Pages 17-26

  Kim, Chang Jin ^a   Kim, John Y ^a,b   Sridharan, Balaji ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b HONEYWELL   (United States)

Author keywords

Release methods; Stiction; Surface micromachining

Indexed keywords

DRYING; MICROELECTROMECHANICAL DEVICES; STICTION; SURFACES;

RELEASE METHODS; SURFACE MICROMACHINING;

MICROMACHINING;

EID: 0031648044     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)80053-8     Document Type: Article

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