A fractal analysis of stiction in microelectromechanical systems

Journal of Tribology

Volumn 119, Issue 3, 1997, Pages 391-400

  Komvopoulos, K ^a   Yan, W ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC HUMIDITY; DEFORMATION; ELECTROSTATICS; FRACTALS; INTERFACES (MATERIALS); MATHEMATICAL MODELS; STICTION; STIFFNESS; SURFACE ROUGHNESS; VAN DER WAALS FORCES;

FRACTAL CONTACT MODEL;

MICROELECTROMECHANICAL DEVICES;

EID: 0031190083     PISSN: 07424787     EISSN: 15288897     Source Type: Journal    
DOI: 10.1115/1.2833500     Document Type: Editorial

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