The influence of coating structure on micromachine stiction

Tribology Letters

Volumn 10, Issue 1-2, 2001, Pages 103-108

  Kushmerick, J G ^a   Hankins, M G ^a   De Boer, M P ^a   Clews, P J ^a   Carpick, R W ^a,b   Bunker, B C ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b University of Wisconsin Madison   (United States)

Author keywords

Adhesion; FDTS; MEMS; Self assembled monolayers; Thin films

Indexed keywords

EID: 0038403050     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1009082530479     Document Type: Article

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