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Volumn 518, Issue , 1998, Pages 57-65
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Round-robin tests of modulus and strength of polysilicon
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
BENDING (DEFORMATION);
BRITTLENESS;
ELASTIC MODULI;
MECHANICAL TESTING;
MECHANICAL VARIABLES MEASUREMENT;
STRENGTH OF MATERIALS;
IN PLANE BENDING;
TENSILE MEASUREMENT;
SEMICONDUCTING SILICON;
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EID: 0032292269
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (86)
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References (15)
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