Lubrication of digital micromirror devices ™

Tribology Letters

Volumn 3, Issue 3, 1997, Pages 239-247

  Henck, Steven A ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

Digital micromirror device; DMD; Lubrication; MEMS; Microelectromechanical systems; PFDA; PFPE; SAM; Tribology

Indexed keywords

ELECTROMECHANICAL TECHNIQUES; LUBRICATION; MICROSTRUCTURES; TRIBOLOGY;

EID: 0030726261     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1019129021492     Document Type: Article

References (46)

1. L.J. Hornbeck, Proc. Soc. Phot-Opt. Eng. 1150 (1989) 86.
2. L.J. Hornbeck, SPIE: Micromachining and Microfabrication '95, Austin, 23-24 October 1995.
3. W.E. Nelson and R.L. Bhuva, SPIE: Color Hard Copy and Graphic Arts IV, San Jose, 6-10 February 1995, p. 2413.
4. L.J. Hornbeck, EOS/SPIE Eur. Symp. on Lasers, Optics and Vision for Productivity in Manufacturing I, Besançon, June 1996.
5. M.A. Mignardi, Sol. State Technol. 37 (1994) 63.
6. R.L. Knipe, EOS/SPIE Eur. Symp. on Lasers, Optics and Vision for Productivity in Manufacturing I, Besançon, June 1996.
7. J.N. Israelachvili, Intermolecular and Surface Forces (Academic Press, San Diego, 1992) p. 313.
8. M.R. Douglass and C.G. Malemes, Society for Information Display, San Diego, 12-17 May 1996.
9. M.R. Douglass and D.M. Kozuch, Society for Information Display Int. Symp. Digest of Technical Papers 26 (1995) 49.
10. L.M. Loewenstein, C.H. Huffman and C.J. Davis, Mater. Res. Soc. Symp. Proc. 98 (1987) 267.
11. R. Legtenberg, H.A.C. Tilmans, J. Elders and M. Elwenspoek, Sensors and Actuators A 43 (1994) 230.
12. S.T. Walsh, R. Boylan and S.F. Bart, Micro (March 1995) 49.
13. R. Knipe, unpublished.
14. R. Dobrozemsky, J. Vac. Sci. Technol. A 5 (1987) 2520.
15. A. Ulman, An Introduction to Ultrathin Organic Films: From Langmuir-Blodgett to Self-Assembly (Academic Press, Boston, 1991).
16. D.L. Allara and R.G. Nuzzo, Langmuir 1 (1985) 45.
17. D.L. Allara and R.G. Nuzzo, Langmuir 1 (1985) 52.
18. J.L. Dote and R.L. Mowery, J. Phys. Chem. 92 (1988) 1571.
19. S.H. Chen and C.F Frank, Langmuir 5 (1989) 978.
20. Y.T. Tao, J. Am. Chem. Soc. 115 (1993) 4350.
21. R.M. Wallace, P.J. Chen, S.A. Henck and D.A. Webb, J. Vac. Sci. A 13 (1995) 1345.
22. P.J. Chen, R.M. Wallace and S.A. Henck, American Vacuum Society 42nd National Symposium, Minneapolis, 16-20 October 1995, paper AS-ThA8; J. Vac. Sci., in preparation.
23. P.J. Chen, R.M. Wallace and S.A. Henck, American Vacuum Society 42nd National Symposium, Minneapolis, 16-20 October 1995, paper AS-ThA8; J. Vac. Sci., in preparation.
24. H. Knözinger and P. Ratnasamy, Catal. Rev. Sci. Eng. 17 (1978) 31.
25. D.L. Cocke, E.D. Johnson and R.P. Merrill, Catal. Rev. Sci. Eng. 26 (1984) 163.
26. M. Mitsuya and Y. Taniguchi, J. Colloid Interf. Sci. 107 (1985) 287.
27. O. Levine and W.A. Zisman, J. Phys. Chem. 61 (1957) 1068.
28. O. Levine and W.A. Zisman, J. Phys. Chem. 61 (1957) 1188.
29. L.J. Hornbeck, Low Reset Voltage Process for DMD, US Patent 5,331,454, 19 July 1994.
30. L.J. Hornbeck, Method of Producing Micromechanical Devices, US Patent 5,411,769, 2 May 1995.
31. E.F. Hare, E.G. Sharfrin and W.A. Zisman, J. Phys. Chem. 58 (1954) 236.
32. A. Ulman, MRS Bulletin (June 1995) 46.
33. R.L. Alley, G.J. Cuan, R.T. Howe and K. Komvopoulos, Technical Digest, Proc. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, June 1992, p. 202.
34. K. Deng, R.J. Collins, M. Mehregany and C.N. Sukenik, in: Proc. 8th IEEE Workshop on Micro Electro Mechanical Systems, Amsterdam, January 1995, pp. 368-373.
35. L. Netzer, R. Iscovici and J. Sagiv, Thin Solid Films 99 (1983) 235.
36. L. Netzer, R. Iscovici and J. Sagiv, Thin Solid Films 100 (1983) 67.
37. N.G. Cave, A.J. Kinloch, S. Mugford and J.F. Watts, Surf. and Interf. Anal. 17 (1991) 120.
38. I. Haller, J. Am Chem. Soc. 100 (1978) 8050.
39. J.A. Koropchak, Spectroscopy 8 (1994) 21.
40. V.J. Novotny, J. Chem. Phys. 92 (1990) 3189.
41. C.M. Mate, J. Appl. Phys. 72 (1992) 3084.
42. P.H. Kasai, Macromolecules 25 (1992) 6791.
43. P. Herrera-Fierro, W.R. Jones and S.V. Pepper, J. Vac. Sci. Technol. A11 (1993) 354.
44. P.H. Kasai and P. Wheeler, Appl. Surf. Sci. 52 (1991) 91.
45. D.A. Webb, Polymeric Coatings for Micromechanical Devices, US Patent 5,447,600, 5 September 1995.
46. L.F. Coffin, Lubrication Eng. 12 (1956) 50.