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Journal of Laser Micro Nanoengineering

Volumn 3, Issue 3, 2007, Pages 182-185

Surface microstructuring of inclined trench structures of silica glass by laser-induced backside wet etching

(5) Niino, Hiroyuki a Kawaguchi, Yoshizo a Sato, Tadatake a Narazaki, Aiko a Kurosaki, Ryozo a

a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

Author keywords

DPSS UV laser; Equilateral prism; Galvanometer based point scanning; Laser induced back side wet etching (LIBWE); Oblique incidence; Silica glass

Indexed keywords

EID: 84882032639 PISSN: None EISSN: 18800688 Source Type: Journal
DOI: 10.2961/jlmn.2008.03.0010 Document Type: Article

Times cited : (8)

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