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Volumn 252, Issue 13 SPEC. ISS., 2006, Pages 4392-4396

In situ reflectivity investigations of solid/liquid interface during laser backside etching

Author keywords

Etching; Fused silica; Laser; Solid liquid interface; Time resolved reflectivity

Indexed keywords

BUBBLES (IN FLUIDS); EXCIMER LASERS; FUSED SILICA; HEATING; INTERFACES (MATERIALS); REFLECTION;

EID: 33646557049     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.06.044     Document Type: Article
Times cited : (26)

References (38)
  • 20
    • 23244435253 scopus 로고    scopus 로고
    • Precise etching of fused silica for refractive and diffractive micro-optical applications
    • Zimmer K., and Böhme R. Precise etching of fused silica for refractive and diffractive micro-optical applications. Opt. Lasers Eng. 43 (2005) 1349
    • (2005) Opt. Lasers Eng. , vol.43 , pp. 1349
    • Zimmer, K.1    Böhme, R.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.