Imprinting by hot embossing in polymer substrates using a template of silica glass surface-structured by the ablation of LIBWE method

Applied Physics A: Materials Science and Processing

Volumn 79, Issue 4-6, 2004, Pages 827-828

  Niino, H ^a   Ding, X ^a   Kurosaki, R ^a   Narazaki, A ^a   Sato, T ^a   Kawaguchi, Y ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; DIFFRACTION GRATINGS; ETCHING; FABRICATION; FUSED SILICA; LASER ABLATION; MICROSTRUCTURE; MOLDING; POLYSTYRENES; RESINS; ROBUSTNESS (CONTROL SYSTEMS);

HOT EMBOSSING; IMPRINTING; POLYMER SUBSTRATES; SILICONE RESIN;

POLYMERS;

EID: 4344676838     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-004-2820-x     Document Type: Conference Paper

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