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Journal of Photochemistry and Photobiology A: Chemistry

Volumn 166, Issue 1-3, 2004, Pages 135-140

Fabrication of beam homogenizers in quartz by laser micromachining

(6) Kopitkovas, G a Lippert, Thomas a David, C a Canulescu, S a Wokaun, A a Gobrecht, J a

a PAUL SCHERRER INSTITUTE (Switzerland)

Author keywords

Homogenizer; Laser ablation; Microlens; Quartz; Wet etching

Indexed keywords

ACETONE; CHLORINE; PYRENE; TETRAHYDROFURAN; XENON;

ABSORPTION; ARTICLE; CHEMICAL PROCEDURES; CHEMICAL STRUCTURE; CONTROLLED STUDY; EXCIMER LASER; LENS; LOW TEMPERATURE PROCEDURES; SURFACE PROPERTY;

EID: 3543113172 PISSN: 10106030 EISSN: None Source Type: Journal
DOI: 10.1016/j.jphotochem.2004.05.001 Document Type: Article

Times cited : (61)

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