Laser induced backside wet etching: Mechanisms and fabrication of micro-optical elements

Journal of Physics: Conference Series

Volumn 59, Issue 1, 2007, Pages 526-532

  Kopitkovas, G ^a   Lippert, T ^a   Venturini, J ^b   David, C ^a   Wokaun, A ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

^b SOPRA   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 34547375287     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/59/1/113     Document Type: Article

References (34)

1. Sinzinger S and Jahns J 2003 Microoptics (Weinheim, Germany: WILEYVCH GmbH & Co. KGaA)
2. Nussbaum P, Volkel R, Herzig H P, Eisner M and Haselbeck S 1997 Pure Appl. Opt. 6 617-36
3. Hertel I V, Stoian R, Ashkenasi D, Rosenfeld A and Campbell E E 2000 Proc. SPIE - Int. Soc. Opt. Eng. 4088 17-24
4. Ihlemann J, Muller S, Puschmann S, Schafer D, Wei M, Li J and Herman P R 2003 Appl. Phys. A, Mater. Sci. Process. A 76 751-3
5. Li J, Herman P R, Wei X M, Chen K P, Ihlemann J, Marowsky G, Oesterlin P and Burghardt B 2002 Proc. SPIE - Int. Soc. Opt. Eng. 4637 228-34
6. Marcinkevicius A, Juodkazis S, Watanabe M, Miwa M, Matsuo S, Misawa H and Nishii J 2001 Opt. Lett. 26 277-279
7. Wang J, Niino H and Yabe A 1999 Appl. Phys. A-Mater. Sci. Process. 69 271-3
8. Wang J, Niino H and Yabe A 1999 Appl. Phys. A-Mater. Sci. Process. 68 111-3
9. Wang J, Niino H and Yabe A 1999 Japan. J. Appl. Phys. Part 2 - Lett. 38 761-3
10. Niino H, Ding X, Kurosaki R, Narazaki A, Sato T and Kawaguchi Y 2003 742
11. Niino H, Yasui Y, Ding X M, Narazaki A, Sato T, Kawaguchi Y and Yabe A 2003 J. Photochem. Photobiol. A-Chem. 158 179-82
12. Niino H, Yasui Y, Ximing D, Narazaki A, Sato T, Kawaguchi Y and Yabe A 2003 Proc. SPIE - Int. Soc. Opt. Eng. 4977 269-80
13. Niino H, Ding X, Kurosaki R, Narazaki A, Sato T and Kawaguchi Y 2004 Appl. Phys. A-Mater. Sci. Process. 79 827-8
14. Kawaguchi Y, Ding X, Narazaki A, Sato T and Niino H 2005 Appl. Phys. A-Mater. Sci. Process. 80 275-81
15. Yasui Y, Niino H, Kawaguchi Y and Yabe A 2002 Appl. Surf. Sci. 186 552-5
16. Ding X M, Kawaguchi Y, Sato T, Narazaki A, Kurosaki R and Niino H 2004 J. Photochem. Photobiol. A-Chem. 166 129-33
17. Wang J, Niino H and Yabe A 2000 Appl. Surf. Sci. 154 571-6
18. Kopitkovas G, Lippert T, David C, Wokaun A and Gobrecht J 2004 Thin Solid Films 453-54 31-5
19. Böhme R, Braun A and Zimmer K 2002 Appl. Surf. Sci. 186 276-81
20. Ding X M, Sato T, Kawaguchi Y and Niino H 2003 Japan. J. Appl. Phys. Part 2 - Lett. 42 176-8
21. Zimmer K, Böhme R, Braun A, Rauschenbach B and Bigl F 2002 Appl. Phys. A-Mater. Sci. Process. 74 453-6
22. Kopitkovas G, Lippert T, David C, Wokaun A and Gobrecht J 2003 Microelectron. Eng. 67-8 438-44
23. Ding X, Kawaguchi Y, Niino H and Yabe A 2002 Appl. Phys. A-Mater. Sci. Process. 75 641-5
24. Vass C, Hopp B, Smausz T and Ignacz F 2004 Thin Solid Films 453-54 121-6
25. Kawaguchi Y, Ding X, Narazaki A, Sato T and Niino H 2004 Appl. Phys. A-Mater. Sci. Process. 79 883-5
26. Kopitkovas G, Lippert T, David C, Sulcas R, Hobley J, Wokaun A J and Gobrecht J 2004 Proc. SPIE - Int. Soc. Opt. Eng. 5662 515-25
27. Kopitkovas G, Lippert T, David C, Canulescu S, Wokaun A and Gobrecht J 2004 J. Photochem. Photobiol. A-Chem. 166 135-40
28. David C and Hambach D 1999 Microelectron. Eng. 46 219-22
29. David C, Wei J, Lippert T and Wokaun A 2001 Microelectron. Eng. 57-8 453-60
30. Vass C, Smausz T and Hopp B 2004 J. Phys. D-Appl. Phys. 37 2449-54
31. Fukumura H and Masuhara H 1994 Chem. Phys. Lett. 221 373-8
32. Raimondi F, Abolhassani S, Brütsch R, Geiger F, Lippert T, Wambach J, Wei J and Wokaun A 2000 J. Appl. Phys. 88 3659-66
33. Dickey F M and Holswade S C 2000 Laser beam shaping theory and techniques (New York, USA: Marcel Dekker, Inc.)
34. Duley W W 1996 UV lasers: effects and applications in materials science (Cambridge, UK: Press Syndicate of the University of Cambridge)