Direct fabrication of microgratings in fused quartz by laser-induced plasma-assisted ablation with a KrF excimer laser

Optics Letters

Volumn 23, Issue 18, 1998, Pages 1486-1488

  Zhang, Jie ^a   Sugioka, Koji ^a   Midorikawa, Katsumi ^a  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; ELECTRON DEVICE MANUFACTURE; EXCIMER LASERS; IRRADIATION; LASER BEAMS; LASER PRODUCED PLASMAS; LASER PULSES; LENSES; OPTICAL WAVEGUIDES; SEMICONDUCTOR DEVICE STRUCTURES; SUBSTRATES;

LASER INDUCED PLASMA ASSISTED ABLATION; LASER IRRADIATION; LIGHT INTENSITY MODULATION; MASK PROJECTION SYSTEM;

LASER ABLATION;

EID: 0032529941     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.23.001486     Document Type: Article

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