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Volumn 79, Issue 4-6, 2004, Pages 883-885
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Transient pressure induced by laser ablation of liquid toluene: Toward the understanding of laser-induced backside wet etching
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Author keywords
[No Author keywords available]
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Indexed keywords
ATTENUATION;
ENERGY DISSIPATION;
ETCHING;
EXCIMER LASERS;
FUSED SILICA;
IRRADIATION;
KRYPTON;
LASER BEAMS;
OPTICAL IMAGE STORAGE;
OPTICAL MICROSCOPY;
PRESSURE GAGES;
TOLUENE;
TRANSPARENCY;
FULL WIDTH AT HALF MAXIMUM (FWHM);
LASER INDUCED BACKSIDE WET ETCHING (LIBWE);
PROPAGATION TIME;
TRANSIENT PRESSURES;
LASER ABLATION;
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EID: 4344659971
PISSN: 09478396
EISSN: None
Source Type: Journal
DOI: 10.1007/s00339-004-2580-7 Document Type: Conference Paper |
Times cited : (53)
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References (16)
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