Crack-free direct-writing on glass using a low-power UV laser in the manufacture of a microfluidic chip

Journal of Micromechanics and Microengineering

Volumn 15, Issue 6, 2005, Pages 1147-1156

  Cheng, Ji Yen ^a   Yen, Meng Hua ^a,b   Wei, Cheng Wey ^a,b   Chuang, Yung Chuan ^a   Young, Tai Horng ^b  

^a RESEARCH CENTER FOR APPLIED SCIENCES   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Crack free; Glass machining; Microfluidic; UV laser

Indexed keywords

COMPUTER SOFTWARE; ETCHING; FLUIDICS; GLASS; LASERS; PHOTOLITHOGRAPHY; THERMODYNAMIC STABILITY; ULTRAVIOLET DEVICES;

DIRECT-WRITING; LASER-INDUCED BACKSIDE WET ETCHING (LIBWE); MICROFLUIDIC CHIPS; UV LASERS;

MICROPROCESSOR CHIPS;

EID: 18844379690     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/6/005     Document Type: Article

References (49)

1. Edel J B, Fortt R, de Mello J C and de Mello A J 2002 Microfluidic routes to the controlled production of nanoparticles Chem. Commun. 10 1136-7
2. Mitchell M C, Spikmans V and de Mello A J 2001 Microchip-based synthesis and analysis: control of multicomponent reaction products and intermediates Analyst 126 24-7
3. Wootton R C R, Fortt R and de Mello A J 2002 On-chip generation and reaction of unstable intermediates-monolithic nanoreactors for diazonium chemistry: azo dyes Lab. Chip 2 5-7
4. Wootton R C R, Fortt R and de Mello A J 2002 A microfabricated nanoreactor for safe, continuous generation and use of singlet oxygen Org. Process Res. Dev. 6 187-9
5. Wilding P, Shoffner M A and Kricka L J 1994 PCR in a silicon microstructure Clin. Chem. 40 1815-8
6. Northrup M A, Benett B, Hadley D, Landre P, Lehew S, Richards J and Stratton P 1998 A miniature analytical instrument for nucleic acids based on micromachined silicon reaction chambers Anal. Chem. 70 918-22
7. He P, Haswell S J and Fletcher P D I 2004 Microwave heating of heterogeneously catalysed Suzuki reactions in a micro reactor Lab. Chip 4 38-41
8. Daridon A, Sequeira M, Pennarun-Thomas G, Dirac H, Krog J P, Gravesen P, Lichtenberg J, Diamond D, Verpoorte E and de Rooij N F 2001 Chemical sensing using an integrated microfluidic system based on the Berthelot reaction Sensors Actuators B 76 235-43
9. Salimi-Moosavi H, Tang T and Harrison D J 1997 Electroosmotic pumping of organic solvents and reagents in microfabricated reactor chips J. Am. Chem. Soc. 119 8716-7
10. Daridon A, Fascio V, Lichtenberg J, Wutrich R, Langen H, Verpoorte E and de Rooij N F 2001 Multi-layer microfluidic glass chips for microanalytical applications Fresenius' J. Anal. Chem. 371 261-9
11. Shoffner M A, Cheng J, Hvichia G E, Kricka L J and Wilding P 1996 Chip PCR: I. Surface passivation of microfabricated silicon-glass chips for PCR Nucleic Acids Res. 24 375-9
12. Cheng J-Y, Wei C-W, Hsu K-H and Young T-H 2004 Direct-write laser micromachining and universal surface modification of PMMA for device development Sensors Actuators B 99 186-96
13. Lim D, Kamotani Y, Cho B, Mazumder J and Takayama S 2003 Fabrication of microfluidic mixers and artificial vasculatures using a high-brightness diode-pumped Nd:YAG laser direct write method Lab. Chip 3 318-23
14. 2-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic systems Lab. Chip 2 242-6
15. Liu Y, Rauch C B, Stevens R L, Lenigk R, Yang J, Rhine D B and Grodzinski P 2002 DNA amplification and hybridization assays in integrated plastic monolithic devices Anal. Chem. 74 3063-70
16. Giridhar M S, Seong K, lzgen A S L, Khulbe P, Peyghambarian N and Mansuripur M 2004 Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices Appl. Opt. 43 4584-9
17. 2 lasers Appl. Surf. Sci. 46 430-4
18. Ihlemann J, Wolff B and Simon P 1992 Nanosecond and femtosecond excimer laser ablation of fused silica Appl. Phys. A 54 363-8
19. Ihlemann J 1992 Excimer laser ablation of fused silica Appl. Surf. Sci. 54 193-200
20. Dyer P E, Farley R J, Giedl R and Karnakis D M 1996 Excimer laser ablation of polymers and glasses for grating fabrication Appl. Surf. Sci. 96-8 537-49
21. Ihlemann J and Wolff-Rottke B 1996 Excimer laser micro machining of inorganic dielectric Appl. Surf. Sci. 106 282-6
22. Shuttleworth S 1996 Optimisation of laser wavelength in the ablation sampling of glass materials Appl. Surf. Sci. 96-98 513-7
23. Varel H, Ashkenasi D, Rosenfeld A, Wahmer M and Campbell E E B 1997 Micromachining of quartz with ultrashort laser pulses Appl. Phys. A 65 367-73
24. Kruger J, Kautek W, Lenzner M, Sartania S, Spielmann C and Krausz F 1998 Laser micromachining of barium aluminium borosilicate glass with pulse durations between 20 fs and 3 ps Appl. Opt. 127-129 892-8
25. Rudolph P, Bonse J, Kruger J and Kautek W 1999 Femtosecond- and nanosecond-pulse laser ablation of bariumalumoborosilicate glass Appl. Phys. A 69 S763-6
26. Li Y, Itoh K, Watanabe W, Yamada K, Kuroda D, Nishii J and Jiang Y 2001 Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses Opt. Lett. 26 1912-4
27. Schaffer C B, Brodeur A, Garcia J F and Mazur E 2001 Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy Opt. Lett. 26 93-5
28. Zhang J, Sugioka K and Midorikawa K 1998 Laser-induced plasma-assisted ablation of fused quartz using the fourth harmonic of a Nd:YAG laser Appl. Phys. A 67 545-9
29. Wang J, Niino H and Yabe A 1999 One-step microfabrication of fused silica by laser ablation of an organic solution Appl. Phys. A 68 111-3
30. Wang J, Niino H and Yabe A 1999 Micromachining of quartz crystal with excimer lasers by laser-induced backside wet etching Appl. Phys. A 69 S271-3
31. Zhang J, Sugioka K and Midorikawa K 1999 High-quality and high-efficiency machining of glass materials by laser-induced plasma-assisted ablation using conventional nanosecond UV, visible, and infrared lasers Appl. Phys. A 69 S879-82
32. Schafer D, Ihlemann J, Marowsky G and Herman P R 2001 F2-laser ablation patterning of dielectric layers Appl. Phys. A 72 377-9
33. Ding X, Kawaguchi Y, Niino H and Yabe A 2002 Laser-induced high-quality etching of fused silica using a novel aqueous medium Appl. Phys. A 75 641-5
34. Bohme R, Braun A and Zimmer K 2002 Backside etching of UV-transparent materials at the interface to liquids Appl. Surf. Sci. 186 276-81
35. Zimmer K, Braun A and Bohme R 2003 Etching of fused silica and glass with excimer laser at 351 nm Appl. Surf. Sci. 208-209 199-204
36. Niino H, Yasui Y, Ding X, Narazaki A, Sato T, Kawaguchi Y and Yabe A 2003 Surface micro-fabrication of silica glass by excimer laser irradiation of organic solvent J. Photochem. Potobiol. A 158 179-82
37. Vass C, Hopp B, Smausz T and Ignacz F 2004 Experiments and numerical calculations for the interpretation of the backside wet etching of fused silica Thin Solid Films 453-454 121-6
38. Ding X, Yasui Y, Kawaguchi Y, Niino H and Yabe A 2002 Laser-induced back-side wet etching of fused silica with an aqueous solution containing organic molecules Appl. Phys. A 75 437-40
39. Siegman A E 1986 Lasers (Sausalito, CA: University Science Books)
40. Oleschuk R D, Shultz-Lockyear L L, Ning Y and Harrison D J 2000 Trapping of bead-based reagents within microfluidic systems: on-chip solid-phase extraction and electrochromatography Anal. Chem. 72 585-90
41. Ekstrom S, Malmstrom J, Wallman L, Lofgren M, Nilsson J, Laurell T and Marko-Varga G 2002 On-chip microextraction for proteomic sample preparation of in-gel digests Proteomics 2 413-21
42. Paegel B M, Emrich C A, Wedemayer G J, Scherer J R and Mathies R A 2002 High throughput DNA sequencing with a microfabricated 96-lane capillary array electrophoresis bioprocessor Proc. Natl Acad. Sci. 99 574-9
43. Goto M, Sato K, Tokeshi M and Kitamori T 2003 Development of microchip-based bioassay system using cultured cells Micro Total Analysis ed M A Northrup, K F Jensen and D J Harrison (CA, USA: Squaw Valley)
44. Mello A P, Bari M A and Prendergast P J 2002 A comparison of excimer laser etching and dry etching process for surface fabrication of biomaterials J. Mater. Process. Technol. 124 284-92
45. Friedel R A and Orchin M 1951 Ultraviolet Spectra of Aromatic Compounds (New York: Wiley)
46. Hirshberg Y 1948 Trans. Faraday Soc. 4 285-9
47. Berlamn B 1971 Handbook of Fluorescence Spectra of Aromatic Molecules (New York: Academic)
48. Schmidt R, Schaffner K, Trost W and Brauer H-D 1984 J. Phys. Chem. 88 956-8
49. Turro N J 1979 Modern Molecular Photochemistry (Merlo Park, CA: Benjamin/Cummings) p 172