Laser ablation of toluene liquid for surface micro-structuring of silica glass

Applied Surface Science

Volumn 252, Issue 13 SPEC. ISS., 2006, Pages 4387-4391

  Niino, H ^a   Kawaguchi, Y ^a   Sato, T ^a   Narazaki, A ^a   Gumpenberger, T ^a   Kurosaki, R ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Diode pumped solid state UV laser; Laser induced backside wet etching (LIBWE); Silica glass; UV absorption

Indexed keywords

GALVANOMETERS; LASER ABLATION; LASER BEAMS; MICROSTRUCTURE; TOLUENE; ULTRAVIOLET DEVICES;

DIODE-PUMPED SOLID STATE UV LASER; LASER-INDUCED BACKSIDE WET ETCHING; PLUME PROPAGATION; POINT SCANNING SYSTEM; REPETITION RATE; SURFACE MICRO-STRUCTURING; TOLUENE SOLID FILM;

FUSED SILICA;

EID: 33646598083     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.07.084     Document Type: Article

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