SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Applied Physics A: Materials Science and Processing

Volumn 83, Issue 1, 2006, Pages 9-12

Effects of halogenated organic solvents on laser-induced backside wet etching of fused silica

(2) Bohme R a Zimmer, K a

a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FUSED SILICA; HALOGENATION; LASER APPLICATIONS; SURFACE PHENOMENA;

ETCH RATE; HEATED SURFACES; PULSE NUMBER; SMOOTH SURFACES;

ORGANIC SOLVENTS;

EID: 32144459530 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-006-3483-6 Document Type: Article

Times cited : (20)

References (22)

1
- 0032794020
- J. Wang, H. Niino, A. Yabe, Appl. Phys. A 68, 111 (1999)
- (1999) Appl. Phys. A , vol.68 , pp. 111
- Wang, J.¹ Niino, H.² Yabe, A.³

2
- 6344282355
- K. Zimmer, R. Böhme, B. Rauschenbach, Appl. Phys. A 79, 1883 (2004)
- (2004) Appl. Phys. A , vol.79 , pp. 1883
- Zimmer, K.¹ Böhme, R.² Rauschenbach, B.³

3
- 0032203578
- J. Zhang, K. Sugioka, K. Midorikawa, Appl. Phys. A 67, 545 (1998)
- (1998) Appl. Phys. A , vol.67 , pp. 545
- Zhang, J.¹ Sugioka, K.² Midorikawa, K.³

4
- 0000427228
- A.V. Simakin, E.N. Loubnin, G. A. Shafeev, Appl. Phys. A 69, 267 (1999)
- (1999) Appl. Phys. A , vol.69 , pp. 267
- Simakin, A.V.¹ Loubnin, E.N.² Shafeev, G.A.³

5
- 0037185172
- R. Böhme, A. Braun, K. Zimmer, Appl. Surf. Sci. 186, 276 (2002)
- (2002) Appl. Surf. Sci. , vol.186 , pp. 276
- Böhme, R.¹ Braun, A.² Zimmer, K.³

6
- 0036887339
- X. Ding, Y. Kawaguchi, H. Niino, A. Yabe, Appl. Phys. A 75, 641 (2002)
- (2002) Appl. Phys. A , vol.75 , pp. 641
- Ding, X.¹ Kawaguchi, Y.² Niino, H.³ Yabe, A.⁴

7
- 0037414629
- H. Niino, Y. Yasui, X.M. Ding, A. Narazaki, T. Sato, Y. Kawaguchi, A. Yabe, J. Photochem. Photobiol. A 158, 179 (2003)
- (2003) J. Photochem. Photobiol. A , vol.158 , pp. 179
- Niino, H.¹ Yasui, Y.² Ding, X.M.³ Narazaki, A.⁴ Sato, T.⁵ Kawaguchi, Y.⁶ Yabe, A.⁷

8
- 0037443169
- K. Zimmer, A. Braun, R. Böhme, Appl. Surf. Sci. 208, 199 (2003)
- (2003) Appl. Surf. Sci. , vol.208 , pp. 199
- Zimmer, K.¹ Braun, A.² Böhme, R.³

9
- 1542426356
- R. Böhme, D. Spemann, K. Zimmer, Thin Solid Films 453-454, 127 (2004)
- (2004) Thin Solid Films , vol.453-454 , pp. 127
- Böhme, R.¹ Spemann, D.² Zimmer, K.³

10
- 3543113172
- G. Kopitkovas, T. Lippeit, C. David, S. Canulescu, A. Wokaun, J. Gobrecht, J. Photochem. Photobiol. A 166, 135 (2004)
- (2004) J. Photochem. Photobiol. A , vol.166 , pp. 135
- Kopitkovas, G.¹ Lippeit, T.² David, C.³ Canulescu, S.⁴ Wokaun, A.⁵ Gobrecht, J.⁶

11
- 19744362935
- R. Böhme, K. Zimmer, Appl. Surf. Sci. 247, 256 (2005)
- (2005) Appl. Surf. Sci. , vol.247 , pp. 256
- Böhme, R.¹ Zimmer, K.²

12
- 1642369894
- G. Kopitkovas, T. Lippert, C. David, A. Wokaun, J. Gobrecht, Thin Solid Films 453-454, 31 (2004)
- (2004) Thin Solid Films , vol.453-454 , pp. 31
- Kopitkovas, G.¹ Lippert, T.² David, C.³ Wokaun, A.⁴ Gobrecht, J.⁵

13
- 1542426361
- C. Vass, B. Hopp, T. Smausz, F. Ignácz, Thin Solid Films 453-454, 121 (2004)
- (2004) Thin Solid Films , vol.453-454 , pp. 121
- Vass, C.¹ Hopp, B.² Smausz, T.³ Ignácz, F.⁴

14
- 0037185158
- Y. Yasui, H. Niino, Y. Kawaguchi, A. Yabe, Appl. Surf. Sci. 186, 552 (2002)
- (2002) Appl. Surf. Sci. , vol.186 , pp. 552
- Yasui, Y.¹ Niino, H.² Kawaguchi, Y.³ Yabe, A.⁴

15
- 10644260431
- R. Böhme, J. Zajadacz, K. Zimmer, B. Rauschenbach, Appl. Phys. A 80, 433 (2005)
- (2005) Appl. Phys. A , vol.80 , pp. 433
- Böhme, R.¹ Zajadacz, J.² Zimmer, K.³ Rauschenbach, B.⁴

16
- 84870414017
- NIST chemistry webBook
- March
- NIST Chemistry WebBook, Standard Reference Database No. 69 - March 2003, Release, http://webbook.nist.gov/
- (2003) Standard Reference Database No. 69 , vol.69

17
- 0037326890
- S. Georgiou, A. Koubenakis, Chem. Rev. 103, 349 (2003)
- (2003) Chem. Rev. , vol.103 , pp. 349
- Georgiou, S.¹ Koubenakis, A.²

18
- 1642368936
- T. Kamo, Y. Kodera, Y. Sato, S. Kushiyama, Polym. Degrad. Stab. 84, 79 (2004)
- (2004) Polym. Degrad. Stab. , vol.84 , pp. 79
- Kamo, T.¹ Kodera, Y.² Sato, Y.³ Kushiyama, S.⁴

19
- 0003634650
- Oxford Science
- M. Sugawara, Plasma Etching, Fundamentals and Applications (Oxford Science, 1998)
- (1998) Plasma Etching, Fundamentals and Applications
- Sugawara, M.¹

20
- 4544253894
- C. Vass, T. Smausz, B. Hopp, J. Phys. D 37, 2449 (2004)
- (2004) J. Phys. D , vol.37 , pp. 2449
- Vass, C.¹ Smausz, T.² Hopp, B.³

21
- 0030717798
- J. Pola, M. Urbanova, Z. Bastl, Z. Plzak, J. Subrt, V. Vorlicek, J. Gregora, C. Crowley, R. Taylor, Carbon 35, 605 (1997)
- (1997) Carbon , vol.35 , pp. 605
- Pola, J.¹ Urbanova, M.² Bastl, Z.³ Plzak, Z.⁴ Subrt, J.⁵ Vorlicek, V.⁶ Gregora, J.⁷ Crowley, C.⁸ Taylor, R.⁹

22
- 33646557049
- DOI: 10.1016/j.apsusc.2005.06.044, online
- R. Böhme, T. Otto, K. Zimmer, DOI: 10.1016/j.apsusc.2005.06.044, Appl. Surf. Sci. (2005), online
- (2005) Appl. Surf. Sci.
- Böhme, R.¹ Otto, T.² Zimmer, K.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.