SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Applied Physics A: Materials Science and Processing

Volumn 85, Issue 1, 2006, Pages 75-78

Laser backside etching of fused silica with ultra-short pulses

(4) Bohme R a Pissadakis, S b Ruthe, D a Zimmer, K a

a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM (Germany)

b INSTITUTE OF ELECTRONIC STRUCTURE AND LASER (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; LASER BEAM CUTTING; MORPHOLOGY; TOLUENE; ULTRASHORT PULSES;

CARBON DEPOSITION; LASER BACKSIDE ETCHING; LASER PULSE ENERGY;

FUSED SILICA;

EID: 33747498776 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-006-3652-7 Document Type: Article

Times cited : (33)

References (26)

1
- 0033889471
- P.R. Herman, R.S. Marjoribanks, A. Oettl, K. Chen, I. Konovalov, S. Ness, Appl. Surf. Sci. 154, 577 (2000)
- (2000) Appl. Surf. Sci. , vol.154 , pp. 577
- Herman, P.R.¹ Marjoribanks, R.S.² Oettl, A.³ Chen, K.⁴ Konovalov, I.⁵ Ness, S.⁶

2
- 0033907378
- M. Lenzner, F. Krausz, J. Krüger, W. Kautek, Appl. Surf. Sci. 154, 11 (2000)
- (2000) Appl. Surf. Sci. , vol.154 , pp. 11
- Lenzner, M.¹ Krausz, F.² Krüger, J.³ Kautek, W.⁴

3
- 0031249383
- H. Varel, D. Ashkenasi, A. Rosenfeld, M. Wahmer, E.E.B. Campbell, Appl. Phys. A 65, 367 (1997)
- (1997) Appl. Phys. A , vol.65 , pp. 367
- Varel, H.¹ Ashkenasi, D.² Rosenfeld, A.³ Wahmer, M.⁴ Campbell, E.E.B.⁵

4
- 0032794020
- J. Wang, H. Niino, A. Yabe, Appl. Phys. A 68, 111 (1999)
- (1999) Appl. Phys. A , vol.68 , pp. 111
- Wang, J.¹ Niino, H.² Yabe, A.³

5
- 0032529941
- J. Zhang, K. Sugioka, K. Midorikawa, Opt. Lett. 23, 1486 (1998)
- (1998) Opt. Lett. , vol.23 , pp. 1486
- Zhang, J.¹ Sugioka, K.² Midorikawa, K.³

6
- 6344282355
- K. Zimmer, R. Böhme, B. Rauschenbach, Appl. Phys. A 79, 1883 (2004)
- (2004) Appl. Phys. A , vol.79 , pp. 1883
- Zimmer, K.¹ Böhme, R.² Rauschenbach, B.³

7
- 33646717317
- C. Vass, D. Sebök, B. Hopp, Appl. Surf. Sci. 252, 4768 (2006)
- (2006) Appl. Surf. Sci. , vol.252 , pp. 4768
- Vass, C.¹ Sebök, D.² Hopp, B.³

8
- 0037185172
- R. Böhme, A. Braun, K. Zimmer, Appl. Surf. Sci. 186, 276 (2002)
- (2002) Appl. Surf. Sci. , vol.186 , pp. 276
- Böhme, R.¹ Braun, A.² Zimmer, K.³

9
- 1542426356
- R. Böhme, D. Spemann, K. Zimmer, Thin Solid Films 453-454, 127 (2004)
- (2004) Thin Solid Films , vol.453-454 , pp. 127
- Böhme, R.¹ Spemann, D.² Zimmer, K.³

10
- 0037188013
- K. Hatanaka, Y. Tsuboi, H. Fukumura, H. Masuhara, J. Phys. Chem. B 106, 3049 (2002)
- (2002) J. Phys. Chem. B , vol.106 , pp. 3049
- Hatanaka, K.¹ Tsuboi, Y.² Fukumura, H.³ Masuhara, H.⁴

11
- 19744362935
- R. Böhme, K. Zimmer, Appl. Surf. Sci. 247, 256 (2005)
- (2005) Appl. Surf. Sci. , vol.247 , pp. 256
- Böhme, R.¹ Zimmer, K.²

12
- 10644246802
- Y. Kawaguchi, X. Ding, A. Narazaki, T. Sato, H. Niino, Appl. Phys. A 80, 275 (2005)
- (2005) Appl. Phys. A , vol.80 , pp. 275
- Kawaguchi, Y.¹ Ding, X.² Narazaki, A.³ Sato, T.⁴ Niino, H.⁵

13
- 0030565932
- J. Ihlemann, B. Wolff-Rottke, Appl. Surf. Sci. 106, 282 (1996)
- (1996) Appl. Surf. Sci. , vol.106 , pp. 282
- Ihlemann, J.¹ Wolff-Rottke, B.²

14
- 0027109531
- N. Leclerc, C. Pfleiderer, H. Hitzler, J. Wolfrum, K.O. Greulich, S. Thomas, W. Englisch, J. Non-Cryst. Solids 149, 115 (1992)
- (1992) J. Non-cryst. Solids , vol.149 , pp. 115
- Leclerc, N.¹ Pfleiderer, C.² Hitzler, H.³ Wolfrum, J.⁴ Greulich, K.O.⁵ Thomas, S.⁶ Englisch, W.⁷

15
- 2342644102
- K. Kajihara, Y. Ikuta, M. Oto, M. Hirano, L. Skuja, H. Hosono, Nucl. Instrum. Methods B 218, 323 (2004)
- (2004) Nucl. Instrum. Methods B , vol.218 , pp. 323
- Kajihara, K.¹ Ikuta, Y.² Oto, M.³ Hirano, M.⁴ Skuja, L.⁵ Hosono, H.⁶

16
- 33747495426
- G. Violakis, M. Konstantaki, S. Pissadakis, IEEE Photon. Technol. Lett. 18, 1182 (2006)
- (2006) IEEE Photon. Technol. Lett. , vol.18 , pp. 1182
- Violakis, G.¹ Konstantaki, M.² Pissadakis, S.³

17
- 0037443243
- F. Costache, M. Henyk, J. Reif, Appl. Surf. Sci. 208, 486 (2003)
- (2003) Appl. Surf. Sci. , vol.208 , pp. 486
- Costache, F.¹ Henyk, M.² Reif, J.³

18
- 33744604184
- J.F. Young, J.S. Preston, H.M. Vandriel, J.E. Sipe, Phys. Rev. B 27, 1155 (1983)
- (1983) Phys. Rev. B , vol.27 , pp. 1155
- Young, J.F.¹ Preston, J.S.² Vandriel, H.M.³ Sipe, J.E.⁴

19
- 4544253894
- C. Vass, T. Smausz., B. Hopp, J. Phys. D 37, 2449 (2004)
- (2004) J. Phys. D , vol.37 , pp. 2449
- Vass, C.¹ Smausz, T.² Hopp, B.³

20
- 33646557049
- R. Böhme, T. Otto, K. Zimmer, Appl. Surf. Sci. 252, 4392 (2006)
- (2006) Appl. Surf. Sci. , vol.252 , pp. 4392
- Böhme, R.¹ Otto, T.² Zimmer, K.³

21
- 0001229969
- C.L. Braun, S. Kato, S. Lipsky, J. Chem. Phys. 39, 1645 (1963)
- (1963) J. Chem. Phys. , vol.39 , pp. 1645
- Braun, C.L.¹ Kato, S.² Lipsky, S.³

22
- 0003549363
- Wiley, Chichester
- D.N. Nikogosyan, Properties of Optical and Laser-Related Materials - A Handbook (Wiley, Chichester. 1997)
- (1997) Properties of Optical and Laser-related Materials - A Handbook
- Nikogosyan, D.N.¹

23
- 0000215248
- L.V. Keldysh, Sov. Phys. JETP 20, 1307 (1965)
- (1965) Sov. Phys. JETP , vol.20 , pp. 1307
- Keldysh, L.V.¹

24
- 0030717798
- J. Pola, M. Urbanova, Z. Bastl, Z. Plzak, J. Subrt, V. Vorlicek, I. Gregora, C. Crowley, R. Taylor, Carbon 35, 605 (1997)
- (1997) Carbon , vol.35 , pp. 605
- Pola, J.¹ Urbanova, M.² Bastl, Z.³ Plzak, Z.⁴ Subrt, J.⁵ Vorlicek, V.⁶ Gregora, I.⁷ Crowley, C.⁸ Taylor, R.⁹

25
- 84975575102
- N. Leclerc, C. Pfleiderer, H. Hitzler, J. Wolfrum, K.O. Greulich, S. Thomas, H. Fabian, R. Takke, W. Englisch, Opt. Lett. 16, 940 (1991)
- (1991) Opt. Lett. , vol.16 , pp. 940
- Leclerc, N.¹ Pfleiderer, C.² Hitzler, H.³ Wolfrum, J.⁴ Greulich, K.O.⁵ Thomas, S.⁶ Fabian, H.⁷ Takke, R.⁸ Englisch, W.⁹

26
- 0034300853
- F. Piao, W.G. Oldham, E.E. Haller, J. Non-Cryst. Solids 276, 61 (2000)
- (2000) J. Non-cryst. Solids , vol.276 , pp. 61
- Piao, F.¹ Oldham, W.G.² Haller, E.E.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.