Fabrication of micro-optical elements in quartz by laser induced backside wet etching

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 438-444

  Kopitkovas, G ^a   Lippert, T ^a   David, C ^a   Wokaun, A ^a   Gobrecht, J ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

Laser ablation; Micro optics; Wet etching

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; ETCHING; EXCIMER LASERS; FABRICATION; INTERFACES (MATERIALS); LASER ABLATION; MICROSTRUCTURE; QUARTZ;

WET ETCHING;

MICROOPTICS;

EID: 0038358327     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00099-6     Document Type: Conference Paper

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