Micromachining of transparent materials with super-heated liquid generated by multiphotonic absorption of organic molecule

Applied Surface Science

Volumn 154, Issue , 2000, Pages 571-576

  Wang, Jun ^a   Niino, Hiroyuki ^a   Yabe, Akira ^a  

^a NATL INST OF MAT AND CHEM RES   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACETONE; CALCIUM COMPOUNDS; ETCHING; EXCIMER LASERS; FUSED SILICA; LASER ABLATION; MICROMACHINING; MULTIPHOTON PROCESSES; OLEFINS; TRANSPARENCY;

CALCIUM FLUORIDE; LASER-INDUCED BACKSIDE WET ETCHING (LIBWE); PYRENE;

OPTICAL MATERIALS;

EID: 0033893897     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00462-6     Document Type: Article

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