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Volumn 186, Issue 1-4, 2002, Pages 276-281
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Backside etching of UV-transparent materials at the interface to liquids
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Author keywords
Ablation; CaF 2; Excimer laser; Fused silica; Laser etching; Liquid interface; Pyrene; Three dimensional micro structures
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Indexed keywords
AMORPHIZATION;
ETCHING;
EXCIMER LASERS;
FUSED SILICA;
LASER ABLATION;
MORPHOLOGY;
PYRITES;
QUARTZ;
SAPPHIRE;
SURFACE ROUGHNESS;
ULTRAVIOLET RADIATION;
TRANSPARENT MATERIALS;
INTERFACES (MATERIALS);
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EID: 0037185172
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(01)00630-4 Document Type: Conference Paper |
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Times cited : (130)
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References (12)
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