Laser processing of micro-optical components in quartz

Applied Surface Science

Volumn 254, Issue 4, 2007, Pages 1073-1078

  Kopitkovas, G ^a,b,c   Lippert, T ^a   Murazawa, N ^b   David, C ^a   Wokaun, A ^a   Gobrecht, J ^a   Winfield, R ^c  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

^b Lee Maltings ^*  (Japan)

^c UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

Beam homogenizer; LIBWE; Micro optics; Quartz

Indexed keywords

ETCHING; LASER BEAM EFFECTS; LASER BEAMS; MICROFABRICATION; MICROOPTICS; QUARTZ; WAVELENGTH; XENON;

BEAM HOMOGENIZER; LIBWE; XECL EXCIMER LASER;

MICROLENSES;

EID: 36248960651     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.09.048     Document Type: Article

References (46)

1. Sinzinger S., and Jahns J. Microoptics (2003), Wiley-VCH GmbH & Co. KGaA, Weinheim, Germany
2. Herzig H.P. Micro-optics Elements Systems and Applications (1997), Taylor & Francis Ltd, London
3. Nussbaum P., Volkel R., Herzig H.P., Eisner M., and Haselbeck S. Pure Appl. Opt. (UK) 6 (1997) 617-636
4. Lin C., Hsiharng Y., and Ching-Kong C. J. Micromech. Microeng. 13 (2003) 775-781
5. Dyer P.E., and Walton C.D. Appl. Phys. A: Mater. Sci. Process 79 (2004) 721-727
6. Li J., Herman P.R., Wei X.M., Chen K.P., Ihlemann J., Marowsky G., Oesterlin P., and Burghardt B. Proc. SPIE 4637 (2002) 228-234
7. Sugioka K. Rev. Laser Eng. (Jpn.) 30 (2002) 226-232
8. Nagashima K., Hashida M., Katto M., Tsukamoto M., Fujita M., and Izawa Y. Trans. Inst. Electr. Eng. Jpn. C (Jpn.) 124 (2004) 388-392
9. Varel H., Ashkenasi D., Rosenfeld A., Herrmann R., Noack F., and Campbell E.E.B. Appl. Phys. A: Mater. Sci. Process 62 (1996) 293-294
10. Ng M.L., Herman P.R., Nejadmalayeri A.H., and Li J. Proc. SPIE 5339 (2004) 127-133
11. Marcinkevicius A., Juodkazis S., Watanabe M., Miwa M., Matsuo S., Misawa H., and Nishii J. Opt. Lett. (USA) 26 (2001) 277-279
12. Wang J., Niino H., and Yabe A. Appl. Phys. A: Mater. Sci. Process 68 (1999) 111-113
13. Wang J., Niino H., and Yabe A. Appl. Phys. A: Mater. Sci. Process 69 (1999) 271-273
14. Wang J., Niino H., and Yabe A. Appl. Surf. Sci. 154 (2000) 571-576
15. Böhme R., Braun A., and Zimmer K. Appl. Surf. Sci. 186 (2002) 276-281
16. Yasui Y., Niino H., Kawaguchi Y., and Yabe A. Appl. Surf. Sci. 186 (2002) 552-555
17. Zimmer K., Böhme R., Braun A., Rauschenbach B., and Bigl F. Appl. Phys. A: Mater. Sci. Process 74 (2002) 453-456
18. Ding X.M., Sato T., Kawaguchi Y., and Niino H. Jpn. J. Appl. Phys. Part 2: Lett. 42 (2003) L176-L178
19. Böhme R., Spemann D., and Zimmer K. Thin Solid Films 453-54 (2004) 127-132
20. Böhme R., and Zimmer K. Appl. Surf. Sci. 239 (2004) 109-116
21. Ding X.M., Kawaguchi Y., Sato T., Narazaki A., Kurosaki R., and Niino H. J. Photochem. Photobiol. A: Chem. 166 (2004) 129-133
22. Ding X.M., Kawaguchi Y., Sato T., Narazaki A., and Niino H. Langmuir 20 (2004) 9769-9774
23. Kopitkovas G., Lippert T., David C., Canulescu S., Wokaun A., and Gobrecht J. J. Photochem. Photobiol. A: Chem. 166 (2004) 135-140
24. Böhme R., Zajadacz J., Zimmer K., and Rauschenbach B. Appl. Phys. A: Mater. Sci. Process 80 (2005) 433-438
25. Zimmer K., Böhme R., and Rauschenbach B. Appl. Phys. A 86 (2007) 409-414
26. Ding X., Kawaguchi Y., Niino H., and Yabe A. Appl. Phys. A 75 (2002) 641-645
27. Ding X., Yasui Y., Kawaguchi Y., Niino H., and Yabe A. Appl. Phys. A 75 (2002) 437-440
28. Niino H., Yasui Y., Ding X., Narazaki A., Sato T., Kawaguchi Y., and Yabe A. Proc. SPIE 4977 (2003) 269-280
29. Kawaguchi Y., Ding X., Narazaki A., Sato T., and Niino H. Appl. Phys. A: Mater. Sci. Process 79 (2004) 883-885
30. Zimmer K., Böhme R., and Rauschenbach B. Appl. Phys. A: Mater. Sci. Process 79 (2004) 1883-1885
31. Kawaguchi Y., Ding X., Narazaki A., Sato T., and Niino H. Appl. Phys. A: Mater. Sci. Process 80 (2005) 275-281
32. Vass C., Hopp B., Smausz T., and Ignacz F. Thin Solid Films 453-54 (2004) 121-126
33. Vass C., Smausz T., and Hopp B. J. Phys. D: Appl. Phys. 37 (2004) 2449-2454
34. Vass C., Osvay K., Hopp B., and Bor Z. Appl. Phys. A 87 (2007) 611
35. Vass C., Osvay K., and Hopp B. Opt. Express 14 (2006) 8354-8359
36. Niino H., Ding X., Kurosaki R., Narazaki A., Sato T., and Kawaguchi Y. CLEO/Pacific Rim (20032003) 742-1742
37. Kopitkovas G., Lippert T., Venturini J., David C., and Wokaun A. J. Phys.: Conf. Ser. 59 (2007) 526-532
38. Kopitkovas G., Lippert T., David C., Wokaun A., and Gobrecht J. JLMN-J. Laser Micro/Nanoeng. 1 (2006) 23-27
39. Kopitkovas G., Lippert T., David C., Wokaun A., and Gobrecht J. Thin Solid Films 453-54 (2004) 31-35
40. Kopitkovas G., Lippert T., David C., Sulcas R., Hobley J., Wokaun A.J., and Gobrecht J. Proc. SPIE 5662 (2004) 515-525
41. Ding X., Kawaguchi Y., Sato T., Narazaki A., and Niino H. Chem. Commun. 17 (2003) 2168-2169
42. David C., Wei J., Lippert T., and Wokaun A. Microelectron. Eng. 57-8 (2001) 453-460
43. Kim D., Ye M., and Grigoropoulos C.P. Appl. Phys. A 67 (1998) 169-181
44. Niino H., Kawaguchi Y., Sato T., Narazaki A., Gumpenberger T., and Kurosaki R. JLMN-J. Laser Micro/Nanoeng. 1 (2006) 1-6
45. Dickey F.M., and Holswade S.C. Laser Beam Shaping Theroy and Techniques (2000), Marcel Dekker Inc., New York
46. Duley W.W. UV Lasers: Effects and Applications in Materials Science (1996), Press Syndicate of the University of Cambridge, Cambridge, UK