Rapid prototyping of silica glass microstructures by the LIBWE method: Fabrication of deep microtrenches

Journal of Photochemistry and Photobiology A: Chemistry

Volumn 182, Issue 3, 2006, Pages 319-324

  Kawaguchi, Yoshizo ^a   Sato, Tadatake ^a   Narazaki, Aiko ^a   Kurosaki, Ryozo ^a   Niino, Hiroyuki ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Microtrench; Nanosecond pulsed UV laser; Rapid prototyping; Silica glass; Surface microstructuring

Indexed keywords

EID: 33747337810     PISSN: 10106030     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jphotochem.2006.05.033     Document Type: Article

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