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Applied Surface Science

Volumn 247, Issue 1-4, 2005, Pages 256-261

The influence of the laser spot size and the pulse number on laser-induced backside wet etching

(2) Bohme R a Zimmer, K a

a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM (Germany)

Author keywords

Etch rate; Excimer laser; Laser etching; Laser spot size; Pulse number

Indexed keywords

BUBBLE FORMATION; DECOMPOSITION; ETCHING; EXCIMER LASERS; LASER PULSES; LIGHT INTERFERENCE; MICROSCOPIC EXAMINATION; SURFACE ROUGHNESS;

ETCH RATE; LASER ETCHING; LASER SPOT SIZE; PULSE NUMBER;

LASER BEAM EFFECTS;

EID: 19744362935 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2005.01.058 Document Type: Article

Times cited : (56)

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