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Applied Physics A: Materials Science and Processing

Volumn 84, Issue 4, 2006, Pages 455-458

Backside laser etching of fused silica using liquid gallium

(4) Zimmer, K a Bohme R a Ruthe, D a Rauschenbach, B a

a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; EXCIMER LASERS; GALLIUM; HYDROCARBONS; LASER APPLICATIONS; THERMAL CONDUCTIVITY;

HYDROCARBON SOLUTIONS; LASER ETCHING; LASER-INDUCED BACKSIDE WET ETCHING (LIBWE); LIQUID GALLIUM;

FUSED SILICA;

EID: 33745875014 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-006-3630-0 Document Type: Article

Times cited : (41)

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