Topography and roughness evolution of microstructured surfaces at laser-induced backside wet etching

Applied Physics A: Materials Science and Processing

Volumn 80, Issue 2, 2005, Pages 433-438

  Bohme R ^a   Zajadacz, J ^a   Zimmer, K ^a   Rauschenbach, B ^a  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

LASER PULSES; MASKS; MICROSTRUCTURE; PARAMETER ESTIMATION; SHOCK WAVES; SURFACE ROUGHNESS; THERMAL DIFFUSION IN SOLIDS;

ENERGY DENSITY; HIGH-RESOLUTION LASER TECHNIQUE; OVER ETCHING; TOPOGRAPHY;

ETCHING;

EID: 10644260431     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-004-3015-1     Document Type: Article

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