One-step microfabrication of fused silica by laser ablation of an organic solution

Applied Physics A: Materials Science and Processing

Volumn 68, Issue 1, 1999, Pages 111-113

  Wang, J ^a   Niino, H ^a   Yabe, A ^a  

^a NATL INST OF MAT AND CHEM RES   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACETONE; ETCHING; LASER ABLATION; LASER PULSES;

LASER INDUCED BACKSIDE WET ETCHING (LIBWE); PYRENE;

FUSED SILICA;

EID: 0032794020     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390050863     Document Type: Article

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