Femtosecond-laser ablation dynamics of dielectrics: Basics and applications for thin films

Reports on Progress in Physics

Volumn 76, Issue 3, 2013, Pages

  Balling, P ^a   Schou, J ^b  

^a AARHUS UNIVERSITY   (Denmark)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84874440741     PISSN: 00344885     EISSN: None     Source Type: Journal    
DOI: 10.1088/0034-4885/76/3/036502     Document Type: Article

References (261)

1. Bäuerle D 2010 Laser chemical processing: an overview to the 30th anniversary Appl. Phys. A 101 447-59
2. Keldysh L V 1965 Ionization in field of a strong electromagnetic wave Sov. Phys. JETP - USSR 20 1307
3. Bloembergen N 1974 Laser-induced electric breakdown in solids IEEE J. Quantum Electron. QE10 375-86
4. Bloembergen N 1997 A brief history of light breakdown J. Nonlinear Opt. Phys. Mater. 6 377-85
5. Campbell E E B, Ashkenasi D and Rosenfeld A 1999 Ultra-short-pulse laser irradiation and ablation of dielectrics Lasers in Materials Science (Materials Science Forum vol 301) (Zurich-uetikon, Switzerland: Transtec publications Ltd) pp 123-44
6. Kruger J and Kautek W 2004 Ultrashort pulse laser interaction with dielectrics and polymers Polymers and Light (Advances in Polymer Science vol 168) ed T K Lippert (Springer: Berlin) pp 247-89
7. Gamaly E G 2011 The physics of ultra-short laser interaction with solids at non-relativistic intensities Phys. Rep. 508 91-243
8. Gattass R R and Mazur E 2008 Femtosecond laser micromachining in transparent materials Nature Photon. 2 219-25
9. Poumellec B, Lancry M, Chahid-Erraji A and Kazansky P G 2011 Modification thresholds in femtosecond laser processing of pure silica: review of dependencies on laser parameters [Invited] Opt. Mater. Express 1 766-82
10. Krausz F, Fermann M E, Brabec T, Curley P F, Hofer M, Ober M H, Spielmann C, Wintner E and Schmidt A J 1992 Femtosecond solid-state lasers IEEE J. Quantum Electron. 28 2097-122
11. French P M W 1995 The generation of ultrashort laser-pulses Rep. Prog. Phys. 58 169-262
12. Backus S, Durfee C G, Murnane M M and Kapteyn H C 1998 High power ultrafast lasers Rev. Sci. Instrum. 69 1207-23
13. Brabec T and Krausz F 2000 Intense few-cycle laser fields: frontiers of nonlinear optics Rev. Mod. Phys. 72 545-91
14. Keller U 2004 Ultrafast solid-state lasers Progress in Optics (Progress in Optics vol 46) (Amsterdam: Elsevier) pp 1-115
15. Shank C V 1988 Generation of ultrashort optical pulses Top. Appl. Phys. 60 5-34
16. De Spence, Kean P N and Sibbett W 1991 60 fsec pulse generation from a self-mode-locked Ti-sapphire laser Opt. Lett. 16 42-4
17. Strickland D and Mourou G 1985 Compression of amplified chirped optical pulses Opt. Commun. 56 219-21
18. Fermann M E 2003 Ultrafast fiber oscillators Ultrafast Lasers: Technology and Applications (Optical Engineering) ed M E Fermann (New York: Marcel Dekker Inc) pp 89-154
19. Limpert J, Roser F, Schreiber T and Tunnermann A 2006 High-power ultrafast fiber laser systems IEEE J. Sel. Top. Quantum Electron. 12 233-44
20. Tuennermann A, Schreiber T and Limpert J 2010 Fiber lasers and amplifiers: an ultrafast performance evolution Appl. Opt. 49 F71-8
21. Shank C V, Yen R and Hirlimann C 1983 Time-resolved reflectivity measurements of femtosecond-optical-pulse induced phase-transitions in silicon Phys. Rev. Lett. 50 454-7
22. Kuper S and Stuke M 1987 Femtosecond UV excimer laser ablation Appl. Phys. B 44 199-204
23. Ihlemann J, Wolff B and Simon P 1992 Nanosecond and femtosecond excimer laser ablation of fused-silica Appl. Phys. A 54 363-8
24. Kautek W and Kruger J 1994 Femtosecond Pulse Laser-Ablation Of Metallic, Semiconducting, Ceramic, And Biological-Materials SPIE - Int. Soc Optical Engineering. Symp. on Laser Materials Processing: Industrial and Microelectronics Applications (Vienna, Austria, 5-8 April 1994) ed E Beyer pp 600-11 Laser Materials Processing: Industrial And Microelectronics Applications (Proceedings of the Society of Photo-Optical Instrumentation Engineers (SPIE) vol 2207) (doi:10.1117/12.184768)
25. 2 with pulse widths from 7 ns to 150 fs Appl. Phys. Lett. 64 3071-3
26. Pronko P P, Dutta S K, Squier J, Rudd Jv, Du D and Mourou G 1995 Machining of submicron holes using a femtosecond laser at 800 nm Opt. Commun. 114 106-10
27. Preuss S, Demchuk A and Stuke M 1995 Subpicosecond uv laser-ablation of metals Appl. Phys. A 61 33-7
28. Chichkov B N, Momma C, Nolte S, vonAlvensleben F and Tunnermann A 1996 Femtosecond, picosecond and nanosecond laser ablation of solids Appl. Phys. A 63 109-15
29. Smith D L 1995 Thin-film Deposition: Principles and Practice (New York: McGraw-Hill)
30. Musil J, Vlcek J and Baroch P 2006 Magnetron discharges for thin films plasma processing Materials Surface Processing by Direct Energy Techniques ed Y Pauleau (Amsterdam: Elsevier) pp 67-110
31. Cheung J T 1994 History and fundamentals of pulsed laser deposition Pulsed Laser Deposition of Thin Films ed D B Chrisey and G Hubler (New York: Wiley) pp 1-22
32. Smith H M and Turner A F 1965 Vacuum deposited thin films using a ruby laser Appl. Opt. 4 147-8
33. 2 laser Appl. Opt. 8 1115-8
34. Desserre J and Eloy J F 1975 Interaction of pulsed coherent light-beam with complex target - application to production of thin-film compounds Thin Solid Films 29 29-41
35. c bulk material Appl. Phys. Lett. 51 619-21
36. Rijnders G and Blank D H A 2007 Growth kinetics during pulsed laser deposition Pulsed Laser Deposition of Thin Films ed R Eason (Hoboken: Wiley) pp 177-90
37. Qian F, Singh R K, Dutta S K and Pronko P P 1995 Laser deposition of diamond-like carbon-films at high intensities Appl. Phys. Lett. 67 3120-2
38. Okoshi M, Higuchi S and Hanabusa M 1999 Femtosecond laser ablation of frozen acetone for deposition of diamond-like carbon films J. Appl. Phys. 86 1768-70
39. Okoshi M, Higashikawa K and Hanabusa M 2000 Pulsed laser deposition of ZnO thin films using a femtosecond laser Appl. Surf. Sci. 154 424-7
40. Millon E, Albert O, Loulergue J C, Etchepare J, Hulin D, Seiler W and Perrière J 2000 Growth of heteroepitaxial ZnO thin films by femtosecond pulsed-laser deposition J. Appl. Phys. 88 6937-9
41. Bäuerle D 2011 Laser Processing and Chemistry 4th edn (Berlin: Springer)
42. Ready J F 2001 LIA Handbook of Laser Materials Processing (Orlando: Laser Institute of America)
43. Sokolowski-Tinten K and von der Linde D 2004 Ultrafast phase transitions and lattice dynamics probed using laser-produced x-ray pulses J. Phys.: Condens. Matter 16 R1517-36
44. Hsu E M, Mailman N A, Botton G A and Haugen H K 2011 Microscopic investigation of single-crystal diamond following ultrafast laser irradiation Appl. Phys. A 103 185-92
45. Lausten R and Balling P 2001 On-the-fly depth profiling during ablation with ultrashort laser pulses: a tool for accurate micromachining and laser surgery Appl. Phys. Lett. 79 884-6
46. Webster P J L, Yu J X Z, Leung B Y C, Anderson M D, Yang V X D and Fraser J M 2010 In situ 24 kHz coherent imaging of morphology change in laser percussion drilling Opt. Lett. 35 646-8
47. Liu J M 1982 Simple technique for measurements of pulsed gaussian-beam spot sizes Opt. Lett. 7 196-8
48. Puerto D, Gawelda W, Siegel J, Bonse J, Bachelier G and Solis J 2008 Transient reflectivity and transmission changes during plasma formation and ablation in fused silica induced by femtosecond laser pulses Appl. Phys. A 92 803-8
49. Vestentoft K and Balling P 2006 Formation of an extended nanostructured metal surface by ultra-short laser pulses: single-pulse ablation in the high-fluence limit Appl. Phys. A 84 207-13
50. Christensen B H, Vestentoft K and Balling P 2007 Short-pulse ablation rates and the two-temperature model Appl. Surf. Sci. 253 6347-52
51. Preuss S, Spath M, Zhang Y and Stuke M 1993 Time resolved dynamics of subpicosecond laser ablation Appl. Phys. Lett. 62 3049-51
52. Kruger J and Kautek W 1999 The femtosecond pulse laser: a new tool for micromachining Laser Phys. 9 30-40
53. Puerto D, Siegel J, Gawelda W, Galvan-Sosa M, Ehrentraut L, Bonse J and Solis J 2010 Dynamics of plasma formation, relaxation, and topography modification induced by femtosecond laser pulses in crystalline and amorphous dielectrics J. Opt. Soc. Am. B 27 1065-76
54. 2 Phys. Rev. Lett. 73 1990-3
55. Mao S S, Quere F, Guizard S, Mao X, Russo R E, Petite G and Martin P 2004 Dynamics of femtosecond laser interactions with dielectrics Appl. Phys. A 79 1695-709
56. Vu B T V, Landen O L and Szoke A 1995 Time-resolved probing of femtosecond laser-produced plasmas in transparent solids by electron thermal transport Phys. Plasmas 2 476-85
57. vonderLinde D and Schuler H 1996 Breakdown threshold and plasma formation in femtosecond laser-solid interaction J. Opt. Soc. Am. B 13 216-22
58. Seuthe T, Höfner M, Reinhardt F, Tsai W J, Bonse J, Eberstein M, Eichler H J and Grehn M 2012 Femtosecond laser-induced modification of potassium-magnesium silicate glasses: an analysis of structural changes by near edge x-ray absorption spectroscopy Appl. Phys. Lett. 100 224101
59. Chan J W, Huser T, Risbud S and Krol D M 2001 Structural changes in fused silica after exposure to focused femtosecond laser pulses Opt. Lett. 26 1726-8
60. Little D J, Ams M, Gross S, Dekker P, Miese C T, Fuerbach A and Withford M J 2011 Structural changes in BK7 glass upon exposure to femtosecond laser pulses J. Raman Spectrosc. 42 715-18
61. Couprie M-E and Filhol J-M 2008 X radiation sources based on accelerators C. R. Phys. 9 487-506
62. Abramowitz M and Stegun I A 1964 Handbook of Mathematical Functions with Gormulas, Graphs, and Mathematical Tables (Washington, DC: National Bureau of Standards)
63. Tien A C, Backus S, Kapteyn H, Murnane M and Mourou G 1999 Short-pulse laser damage in transparent materials as a function of pulse duration Phys. Rev. Lett. 82 3883-6
64. Gruzdev V E 2004 Laser-induced ionization of solids: back to Keldysh 36th Annual Boulder Damage Symposium on Optical Materials for High Power Lasers, NIST (Boulder, CO, 20-22 September 2004) ed G J Exarhos pp 480-92 Laser-Induced Damage In Optical Materials: 2004 (Proceedings of the Society of Photo-Optical Instrumentation Engineers (SPIE) vol 5647) (doi:10.1117/12.585170)
65. Kaiser A, Rethfeld B, Vicanek M and Simon G 2000 Microscopic processes in dielectrics under irradiation by subpicosecond laser pulses Phys. Rev. B 61 11437-50
66. Ammosov M V, Delone N B and Krainov V P 1986 Tunnel ionization of complex atoms and of atomic ions in an alternating electromagnetic field Sov. Phys. JETP - USSR 64 1191
67. Du D, Liu X and Mourou G 1996 Reduction of multi-photon ionization in dielectrics due to collisions Appl. Phys. B 63 617-21
68. Temnov V V, Sokolowski-Tinten K, Zhou P, El-Khamhawy A and von der Linde D 2006 Multiphoton ionization in dielectrics: Comparison of circular and linear polarization Phys. Rev. Lett. 97 237403
69. Gertsvolf M, Spanner M, Rayner D M and Corkum P B 2010 Demonstration of attosecond ionization dynamics inside transparent solids J. Phys. B: At. Mol. Opt. Phys. 43 131002
70. Gaier L N, Lein M, Stockman M I, Yudin G L, Corkum P B, Ivanov M Y and Knight P L 2005 Hole-assisted energy deposition in dielectrics and clusters in the multiphoton regime J. Mod. Opt. 52 1019-30
71. Gruzdev V E 2007 Photoionization rate in wide band-gap crystals Phys. Rev. B 75 205106
72. Gruzdev V E and Chen J K 2008 Laser-induced ionization and intrinsic breakdown of wide band-gap solids Appl. Phys. A 90 255-61
73. Itina T E and Shcheblanov N 2010 Electronic excitation in femtosecond laser interactions with wide-band-gap materials Appl. Phys. A 98 769-75
74. Shcheblanov N S, Silaeva E P and Itina T E 2012 Electronic excitation and relaxation processes in wide band gap dielectric materials in the transition region of the Keldysh parameter Appl. Surf. Sci. 258 9417-20
75. Stuart B C, Feit M D, Rubenchik A M, Shore B W and Perry M D 1995 Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses Phys. Rev. Lett. 74 2248
76. Stuart B C, Feit M D, Herman S, Rubenchik A M, Shore B W and Perry M D 1996 Nanosecond-to-femtosecond laser-induced breakdown in dielectrics Phys. Rev. B 53 1749
77. 2 with picosecond and femtosecond laser pulses Appl. Phys. 62 293-4
78. Lenzner M, Kruger J, Sartania S, Cheng Z, Spielmann C, Mourou G, Kautek W and Krausz F 1998 Femtosecond optical breakdown in dielectrics Phys. Rev. Lett. 80 4076-9
79. 2 Europhys. Lett. 29 401-6
80. Petite G, Daguzan P, Guizard S and Martin P 1996 Conduction electrons in wide-bandgap oxides: A subpicosecond time-resolved optical study Nucl. Instrum. Methods Phys. Res. 107 97-101
81. Martin P, Guizard S, Daguzan P, Petite G, DOliveira P, Meynadier P and Perdrix M 1997 Subpicosecond study of carrier trapping dynamics in wide-band-gap crystals Phys. Rev. B 55 5799-810
82. Li M, Menon S, Nibarger J P and Gibson G N 1999 Ultrafast electron dynamics in femtosecond optical breakdown of dielectrics Phys. Rev. Lett. 82 2394-7
83. Petite G, Guizard S, Martin P and Quere F 1999 Comment on 'Ultrafast electron dynamics in femtosecond optical breakdown of dielectrics' Phys. Rev. Lett. 83 5182
84. Noack J and Vogel A 1999 Laser-induced plasma formation in water at nanosecond to femtosecond time scales: calculation of thresholds, absorption coefficients, and energy density IEEE J. Quantum Electron. 35 1156-67
85. Kennedy P K 1995 A first-order model for computation of laser-induced breakdown thresholds in ocular and aqueous-media: I. Theory IEEE J. Quantum Electron. 31 2241-9
86. Sarpe C, Koehler J, Winkler T, Wollenhaupt M and Baumert T 2012 Real-time observation of transient electron density in water irradiated with tailored femtosecond laser pulses New J. Phys. 14 075021
87. Vogel A, Noack J, Huttman G and Paltauf G 2005 Mechanisms of femtosecond laser nanosurgery of cells and tissues Appl. Phys. B 81 1015-47
88. Gamaly E G, Rode A V, Luther-Davies B and Tikhonchuk V T 2002 Ablation of solids by femtosecond lasers: ablation mechanism and ablation thresholds for metals and dielectrics Phys. Plasmas 9 949-57
89. Rethfeld B 2004 Unified model for the free-electron avalanche in laser-irradiated dielectrics Phys. Rev. Lett. 92 187401
90. Rethfeld B 2006 Free-electron generation in laser-irradiated dielectrics Phys. Rev. B 73 035101
91. Christensen B H and Balling P 2009 Modeling ultrashort-pulse laser ablation of dielectric materials Phys. Rev. B 79 155424
92. Christensen M N, Byskov-Nielsen J, Christensen B H and Balling P 2010 Single-shot ablation of sapphire by ultrashort laser pulses Appl. Phys. A 101 279-82
93. Wædegaard K, Frislev M, Kjær L A and Balling P 2012 Femtosecond laser excitation of dielectric materials: optical properties and ablation Int. Symposium on High Power Laser Ablation (HPLA) (Santa Fe, NM, 30 April-3 May 2012) ed C Phipps pp 32-43 (AIP Conference Proceedings vol 1464) (doi:10.1063/1.4739858)
94. Wædegaard K, Frislev M and Balling P 2012 Femtosecond laser excitation of dielectric materials: experiments and modeling of optical properties and ablation depths Appl. Phys. A DOI:10.1007/s00339-012-7136-7
95. Landau L D and Lifshitz E M 1960 Electrodynamics of Continuous Media (Oxford: Pergamon)
96. Ashcroft N W and Mermin N D 1976 Solid State Phys. (Philadelphia, PA, USA: Brooks/Cole)
97. Guizard S, Semerok A, Gaudin J, Hashida A, Martin P and Quere F 2002 Femtosecond laser ablation of transparent dielectrics: measurement and modelisation of crater profiles Appl. Surf. Sci. 186 364-8
98. Quere F, Guizard S and Martin P 2001 Time-resolved study of laser-induced breakdown in dielectrics Europhys. Lett. 56 138-44
99. Rethfeld B, Krutsch H and Hoffmann D H H 2010 Tracing laser-induced dielectric breakdown in solids Contrib. Plasma Phys. 50 16-20
100. Rethfeld B, Brenk O, Medvedev N, Krutsch H and Hoffmann D H H 2010 Interaction of dielectrics with femtosecond laser pulses: application of kinetic approach and multiple rate equation Appl. Phys. A 101 19-25
101. Feit M D, Komashko A M and Rubenchik A M 2004 Ultra-short pulse laser interaction with transparent dielectrics Appl. Phys. A 79 1657-61
102. Yakovlev D G and Urpin V A 1980 Thermal and electrical conductivity in white dwarfs and neutron stars Sov. Astron. 24 303-10
103. Eidmann K, Meyer-ter Vehn J, Schlegel T and Huller S 2000 Hydrodynamic simulation of subpicosecond laser interaction with solid-density matter Phys. Rev. E 62 1202-14
104. Arnold D, Cartier E and Dimaria D J 1992 Acoustic-phonon runaway and impact ionization by hot-electrons in silicon dioxide Phys. Rev. B 45 1477-80
105. Arnold D, Cartier E and Dimaria D J 1994 Theory of high-field electron-transport and impact ionization in silicon dioxide Phys. Rev. B 49 10278-97
106. Huba J D 2011 NRL Plasma Formulary
107. Lee Y T and More R M 1984 An electron conductivity model for dense-plasmas Phys. Fluids 27 1273-86
108. Kruer W L 1988 The Physics of Laser Plasma Interactions (Redwood City, CA: Addison-Wesley Publishing Company)
109. Chimier B, Uteza O, Sanner N, Sentis M, Itina T, Lassonde P, Legare F, Vidal F and Kieffer J C 2011 Damage and ablation thresholds of fused-silica in femtosecond regime Phys. Rev. B 84 094104
110. Jiang L and Tsai H L 2005 Energy transport and material removal in wide bandgap materials by a femtosecond laser pulse Int. J. Heat Mass Transfer 48 487-99
111. Rudolph W, Emmert L A, Ngyuen D, Karras C, Sun Z and Weber R 2011 Subpicosecond laser breakdown in optical thin films 1st Pacific Rim Laser Damage Symposium on Optical Materials for High Power Lasers (PLD) (Shanghai, Peoples Republic of China, 6-9 November, 2011) ed C J Shao Pacific Rim Laser Damage 2011: Optical Materials For High Power Lasers (Proceedings of SPIE vol 8206)
112. Quere F, Guizard S, Martin P, Petite G, Gobert O, Meynadier P and Perdrix M 1999 Ultrafast carrier dynamics in laser-excited materials: subpicosecond optical studies Appl. Phys. B 68 459-63
113. Penano J R, Sprangle P, Hafizi B, Manheimer W and Zigler A 2005 Transmission of intense femtosecond laser pulses into dielectrics Phys. Rev. E 72 036412
114. Petrov G M and Davis J 2008 Interaction of intense ultra-short laser pulses with dielectrics J. Phys. B: At. Mol. Opt. Phys. 41 025601
115. Jiang L and Tsai H-L 2008 A plasma model combined with an improved two-temperature equation for ultrafast laser ablation of dielectrics J. Appl. Phys. 104 093101
116. Brenk O and Rethfeld B 2011 Electron dynamics in transparent materials under high-intensity laser irradiation 43rd Annual Laser Damage Symposium on Optical Materials for High Power Lasers (Natl Inst Stand & Technol, Boulder, CO, 18-21 September, 2011) ed G J Exarhos Laser-Induced Damage In Optical Materials: 2011 (Proceedings of SPIE vol 8190) (doi:10.1117/12.899189)
117. 3 Phys. Rev. B 62 13167-73
118. Stoian R, Rosenfeld A, Ashkenasi D, Hertel I V, Bulgakova N M and Campbell E E B 2002 Surface charging and impulsive ion ejection during ultrashort pulsed laser ablation Phys. Rev. Lett. 88 097603
119. Jiang L and Tsai H L 2004 Prediction of crater shape in femtosecond laser ablation of dielectrics J. Phys. D: Appl. Phys. 37 1492-6
120. Jiang L and Tsai H L 2006 Plasma modeling for ultrashort pulse laser ablation of dielectrics J. Appl. Phys. 100 023116
121. Bourgeade A, Mezel C and Saut O 2010 Modeling the early ionization of dielectrics by ultrashort laser pulses J. Sci. Comput. 44 170-90
122. Arnold C L, Heisterkamp A, Ertmer W and Lubatschowski H 2007 Computational model for nonlinear plasma formation in high NA micromachining of transparent materials and biological cells Opt. Express 15 10303-17
123. Guizard S, Fedorov N, Mouskeftaras A and Klimentov S 2010 Int. Symp. on High Power Laser Ablation 2010 (Santa Fe, NM, 18-22 April, 2010) ed C R Phipps pp 336-46 Femtosecond Laser Ablation of Dielectrics: Experimental Studies of Fundamental Processes (AIP Conference Proceedings vol 1278)
124. 2 crystals Phys. Rev. B 73 054105
125. Kautek W, Kruger J, Lenzner M, Sartania S, Spielmann C and Krausz F 1996 Laser ablation of dielectrics with pulse durations between 20 fs and 3 ps Appl. Phys. Lett. 69 3146-8
126. Louzon E, Henis Z, Pecker S, Ehrlich Y, Fisher D, Fraenkel M and Zigler A 2005 Reduction of damage threshold in dielectric materials induced by negatively chirped laser pulses Appl. Phys. Lett. 87 241903
127. Mero M, Liu J, Rudolph W, Ristau D and Starke K 2005 Scaling laws of femtosecond laser pulse induced breakdown in oxide films Phys. Rev. B 71 115109
128. Xu S Z, Jia T Q, Sun H Y, Li C B, Li X, Feng D H, Qiu J R and Xu Z Z 2006 Mechanisms of femtosecond laser-induced breakdown and damage in MgO Opt. Commun. 259 274-80
129. Giguere D, Olivie G, Vidal F, Toetsch S, Girard G, Ozaki T, Kieffer J-C, Nada O and Brunette I 2007 Laser ablation threshold dependence on pulse duration for fused silica and corneal tissues: experiments and modeling J. Opt. Soc. Am. A 24 1562-8
130. 2 and YAG Opt. Commun. 274 163-6
131. Sanner N, Uteza O, Chimier B, Sentis M, Lassonde P, Legare F and Kieffer J C 2010 Toward determinism in surface damaging of dielectrics using few-cycle laser pulses Appl. Phys. Lett. 96 071111
132. Uteza O, Sanner N, Chimier B, Brocas A, Varkentina N, Sentis M, Lassonde P, Legare F and Kieffer J C 2011 Control of material removal of fused silica with single pulses of few optical cycles to sub-picosecond duration Appl. Phys. A 105 131-41
133. Englert L, Rethfeld B, Haag L, Wollenhaupt M, Sarpe-Tudoran C and Baumert T 2007 Control of ionization processes in high band gap materials via tailored femtosecond pulses Opt. Express 15 17855-62
134. Englert L, Wollenhaupt M, Haag L, Sarpe-Tudoran C, Rethfeld B and Baumert T 2008 Material processing of dielectrics with temporally asymmetric shaped femtosecond laser pulses on the nanometer scale Appl. Phys. A 92 749-53
135. Carr C W, Radousky H B and Demos S G 2003 Wavelength dependence of laser-induced damage: determining the damage initiation mechanisms Phys. Rev. Lett. 91 127402
136. Zavestovskaya I N, Eliseev P G, Krokhin O N and Men'kova N A 2008 Analysis of the nonlinear absorption mechanisms in ablation of transparent materials by high-intensity and ultrashort laser pulses Appl. Phys. A 92 903-6
137. Ziener C, Foster P S, Divall E J, Hooker C J, Hutchinson M H R, Langley A J and Neely D 2003 Specular reflectivity of plasma mirrors as a function of intensity, pulse duration, and angle of incidence J. Appl. Phys. 93 768-70
138. Doumy G, Quere F, Gobert O, Perdrix M, Martin P, Audebert P, Gauthier J C, Geindre J P and Wittmann T 2004 Complete characterization of a plasma mirror for the production of high-contrast ultraintense laser pulses Phys. Rev. E 69 026402
139. Chowdhury I H, Wu A Q, Xu X and Weiner A M 2005 Ultra-fast laser absorption and ablation dynamics in wide-band-gap dielectrics Appl. Phys. A 81 1627-32
140. Ashkenasi D, Lorenz M, Stoian R and Rosenfeld A 1999 Surface damage threshold and structuring of dielectrics using femtosecond laser pulses: the role of incubation Appl. Surf. Sci. 150 101-6
141. Lenzner M, Kruger J, Kautek W and Krausz F 1999 Incubation of laser ablation in fused silica with 5-fs pulses Appl. Phys. A 69 465-6
142. Rosenfeld A, Lorenz M, Stoian R and Ashkenasi D 1999 Ultrashort-laser- pulse damage threshold of transparent materials and the role of incubation Appl. Phys. A 69 pp 373-6
143. Hertwig A, Martin S, Kruger J and Kautek W 2004 Surface damage and color centers generated by femtosecond pulses in borosilicate glass and silica Appl. Phys. A 79 1075-7
144. Bonse J, Wrobel J M, Kruger J and Kautek W 2001 Ultrashort-pulse laser ablation of indium phosphide in air Appl. Phys. A 72 89-94
145. Jee Y, Becker M F and Walser R M 1988 Laser-Induced Damage on Single-Crystal Metal-Surfaces J. Opt. Soc. Am. B 5 648-59
146. Martin S, Hertwig A, Lenzner M, Kruger J and Kautek W 2003 Spot-size dependence of the ablation threshold in dielectrics for femtosecond laser pulses Appl. Phys. A 77 883-4
147. Emmert L A, Mero M and Rudolph W 2010 Modeling the effect of native and laser-induced states on the dielectric breakdown of wide band gap optical materials by multiple subpicosecond laser pulses J. Appl. Phys. 108 043523
148. Nguyen D N, Emmert L A, Patel D, Menoni C S and Rudolph W 2010 Transient phenomena in the dielectric breakdown of HfO2 optical films probed by ultrafast laser pulse pairs Appl. Phys. Lett. 97 191909
149. Bonse J, Kruumlger J, Houmlhm S and Rosenfeld A 2012 Femtosecond laser-induced periodic surface structures J. Laser Appl. 24 042006
150. Eason R 2007 Pulsed Laser Deposition of Thin Films (Hoboken, NJ: Wiley)
151. Chrisey D B and Hubler G K 1994 Pulsed Laser Deposition of Thin Films (New York: Wiley)
152. Eliezer S et al 2004 Synthesis of nanoparticles with femtosecond laser pulses Phys. Rev. B 69 144119
153. Perez D and Lewis L J 2003 Molecular-dynamics study of ablation of solids under femtosecond laser pulses Phys. Rev. B 67 184102
154. Vitello M, Amoruso S and Wang X 2005 Femtosecond laser ablation and deposition Pulsed Laser Deposition of Optoelectronic Films (Optoelectronic Materials and Devices) vol 2 ed M Popescu (Bucharest, Romania: INOE) pp 41-80
155. Perrière J, Boulmer-Leborgne C, Benzerga R and Tricot S 2007 Nanoparticle formation by femtosecond laser ablation J. Phys. D: Appl. Phys. 40 7069-76
156. Lorazo P, Lewis L J and Meunier M 2003 Short-pulse laser ablation of solids: from phase explosion to fragmentation Phys. Rev. Lett. 91 225502
157. Zhigilei L V and Garrison B J 2000 Microscopic mechanisms of laser ablation of organic solids in the thermal and stress confinement irradiation regimes J. Appl. Phys. 88 1281-98
158. Zhigilei L V 2003 Dynamics of the plume formation and parameters of the ejected clusters in short-pulse laser ablation Appl. Phys. A 76 339-50
159. Cheng C R and Xu X F 2005 Mechanisms of decomposition of metal during femtosecond laser ablation Phys. Rev. B 72 165415
160. Amoruso S, Bruzzese R, Wang X, Nedialkov N N and Atanasov P A 2007 Femtosecond laser ablation of nickel in vacuum J. Phys. D: Appl. Phys. 40 331-40
161. Upadhyay A K, Inogamov N A, Rethfeld B and Urbassek H M 2008 Ablation by ultrashort laser pulses: atomistic and thermodynamic analysis of the processes at the ablation threshold Phys. Rev. B 78 045437
162. Zhigilei L V, Lin Z and Ivanov D S 2009 atomistic modeling of short pulse laser ablation of metals: connections between melting, spallation, and phase explosion J. Phys. Chem. C 113 11892-906
163. Zhigilei L V, Lin Z, Ivanov D S, Leveugle E, Duff W H, Thomas D, Sevilla C and Guy S T 2010 Atomic/molecular-level simulations of laser-material interactions Laser-Surface Interactions for New Materials Production: Tailoring Structure and Properties (Springer Series in Materials Science vol 130) ed A Miotello and P M Ossi (New York: Springer) pp 43-79
164. Perez D and Lewis L J 2002 Ablation of solids under femtosecond laser pulses Phys. Rev. Lett. 89 255504
165. Blink J A and Hoover W G 1985 Fragmentation of suddenly heated liquids Phys. Rev. A 32 1027-35
166. Barker J A, Henderson D and Abraham F F 1981 Phase-diagram of the two-dimensional lennard-jones system - evidence for 1st-order transitions Physica A 106 226-38
167. Holian B L and Grady D E 1988 Fragmentation by molecular-dynamics - the microscopic big-bang Phys. Rev. Lett. 60 1355-8
168. Vidal F, Johnston T W, Laville S, Barthelemy O, Chaker M, Le Drogoff B, Margot J and Sabsabi M 2001 Critical-point phase separation in laser ablation of conductors Phys. Rev. Lett. 86 2573-6
169. Povarnitsyn M E, Itina T E, Sentis M, Khishchenko K V and Levashov P R 2007 Material decomposition mechanisms in femtosecond laser interactions with metals Phys. Rev. B 75 235414
170. Lorazo P, Lewis L J and Meunier M 2006 Thermodynamic pathways to melting, ablation, and solidification in absorbing solids under pulsed laser irradiation Phys. Rev. B 73 134108
171. Zel'dovich Ya B and Raizer Yu P 2002 Physics of Shock Waves and High-Temperature Hydrodynamic Phenomena (New York: Dover)
172. Hansen T N, Schou J and Lunney J G 1999 Langmuir probe study of plasma expansion in pulsed laser ablation Appl. Phys. A 69 S601-4
173. Toftmann B, Schou J and Lunney J G 2003 Dynamics of the plume produced by nanosecond ultraviolet laser ablation of metals Phys. Rev. B 67 104101
174. Cherednikov Y, Inogamov N A and Urbassek H M 2011 Atomistic modeling of ultrashort-pulse ultraviolet laser ablation of a thin LiF film J. Opt. Soc. Am. B 28 1817-24
175. Amoruso S, Bruzzese R, Spinelli N, Velotta R, Vitiello M and Wang X 2004 Emission of nanoparticles during ultrashort laser irradiation of silicon targets Europhys. Lett. 67 404-10
176. Amoruso S, Ausanio G, Bruzzese R, Vitiello M and Wang X 2005 Femtosecond laser pulse irradiation of solid targets as a general route to nanoparticle formation in a vacuum Phys. Rev. B 71 033406
177. Grojo D, Hermann J and Perrone A 2005 Plasma analyses during femtosecond laser ablation of Ti, Zr, and Hf J. Appl. Phys. 97 063306
178. Teghil R, D'Alessio L, Santagata A, Zaccagnino M, Ferro D and Sordelet D J 2003 Picosecond and femtosecond pulsed laser ablation and deposition of quasicrystals Appl. Surf. Sci. 210 307-17
179. Albert O, Roger S, Glinec Y, Loulergue J C, Etchepare J, Boulmer-Leborgne C, Perrière J and Millon E 2003 Time-resolved spectroscopy measurements of a titanium plasma induced by nanosecond and femtosecond lasers Appl. Phys. A 76 319-23
180. De Bonis A, Teghil R, Rau J V, Galasso A, Orlando S and Santagata A 2011 Characterization of gaseous phase and nanoparticles produced in ultra-short pulsed laser ablation of transition metal borides Appl. Surf. Sci. 257 5315-18
181. Amoruso S, Bruzzese R, Spinelli N, Velotta R, Vitiello M, Wang X, Ausanio G, Iannotti V and Lanotte L 2004 Generation of silicon nanoparticles via femtosecond laser ablation in vacuum Appl. Phys. Lett. 84 4502-4
182. 2 Appl. Phys. A 101 639-44
183. Sanz M, Lopez-Arias M, Marco J F, de Nalda R, Amoruso S, Ausanio G, Lettieri S, Bruzzese R, Wang X and Castillejo M 2011 Ultrafast laser ablation and deposition of wide band gap semiconductors J. Phys. Chem. C 115 3203-11
184. Amoruso S, Bruzzese R, Wang X and Xia J 2008 Propagation of a femtosecond pulsed laser ablation plume into a background atmosphere Appl. Phys. Lett. 92 041503
185. Noel S and Hermann J 2009 Reducing nanoparticles in metal ablation plumes produced by two delayed short laser pulses Appl. Phys. Lett. 94 053120
186. Glover T E et al 2003 Metal-insulator transitions in an expanding metallic fluid: particle formation kinetics Phys. Rev. Lett. 90 236102
187. Anisimov S I, Bauerle D and Lukyanchuk B S 1993 Gas-dynamics and film profiles in pulsed-laser deposition of materials Phys. Rev. B 48 12076-81
188. Anisimov S I, Lukyanchuk B S and Luches A 1996 An analytical model for three-dimensional laser plume expansion into vacuum in hydrodynamic regime Appl. Surf. Sci. 96-8 24-32
189. 2 from excimer-ablated copper J. Appl. Phys. 69 1721-9
190. Willmott P R and Huber J R 2000 Pulsed laser vaporization and deposition Rev. Mod. Phys. 72 315-28
191. Amoruso S, Wang X, Altucci C, de Lisio C, Armenante M, Bruzzese R, Spinelli N and Velotta R 2002 Double-peak distribution of electron and ion emission profile during femtosecond laser ablation of metals Appl. Surf. Sci. 186 358-63
192. Claeyssens F, Henley S J and Ashfold M N R 2003 Comparison of the ablation plumes arising from ArF laser ablation of graphite, silicon, copper, and aluminum in vacuum J. Appl. Phys. 94 2203-11
193. Zhang Z, VanRompay P A, Nees J A and Pronko P P 2002 Multi-diagnostic comparison of femtosecond and nanosecond pulsed laser plasmas J. Appl. Phys. 92 2867-74
194. 3 : a comparison between plume dynamics and composition of the films Appl. Phys. A 105 167-76
195. Thestrup B, Toftmann B, Schou J, Doggett B and Lunney J G 2002 Ion dynamics in laser ablation plumes from selected metals at 355 nm Appl. Surf. Sci. 197-198 175-80
196. Baraldi G, Perea A and Afonso C N 2011 Dynamics of ions produced by laser ablation of several metals at 193 nm J. Appl. Phys. 109 043302
197. Perrière J, Millon E, Seiler W, Boulmer-Leborgne C, Craciun V, Albert O, Loulergue J C and Etchepare J 2002 Comparison between ZnO films grown by femtosecond and nanosecond laser ablation J. Appl. Phys. 91 690-6
198. Schou J 2009 Physical aspects of the pulsed laser deposition technique: the stoichiometric transfer of material from target to film Appl. Surf. Sci. 255 5191-8
199. Amoruso S, Toftmann B and Schou J 2004 Thermalization of a UV laser ablation plume in a background gas: from a directed to a diffusionlike flow Phys. Rev. E 69 056403
200. Predtechensky M R and Mayorov A P 1992 Expansion of laser-plasma in oxygen at laser deposition of HTSC films - theoretical-model Appl. Supercond. 1 2011-17
201. Amoruso S, Schou J and Lunney J G 2008 Influence of the atomic mass of the background gas on laser ablation plume propagation Appl. Phys. A 92 907-11
202. Bulgakova N M, Stoian R, Rosenfeld A, Hertel I V and Campbell E E B 2004 Electronic transport and consequences for material removal in ultrafast pulsed laser ablation of materials Phys. Rev. B 69 054102
203. Sattler K, Muhlbach J, Echt O, Pfau P and Recknagel E 1981 Evidence for coulomb explosion of doubly charged microclusters Phys. Rev. Lett. 47 160-3
204. Stoian R, Rosenfeld A, Hertel I V, Bulgakova N M and Campbell E E B 2004 Comment on 'Coulomb explosion in femtosecond laser ablation of Si(1 1 1)' Appl. Phys. Lett. 85 694-5
205. Bulgakova N M, Stoian R, Rosenfeld A, Hertel I V, Marine W and Campbell E E B 2005 A general continuum approach to describe fast electronic transport in pulsed laser irradiated materials: the problem of Coulomb explosion Appl. Phys. A 81 345-56
206. Reif J, Costache F, Eckert S and Henyk M 2004 Mechanisms of ultra-short laser pulse ablation from ionic crystals Appl. Phys. A 453-454 1229-31
207. Costache F and Reif J 2004 Femtosecond laser induced Coulomb explosion from calcium fluoride Thin Solid Films 453 334-9
208. Henyk M, Costache F and Reif J 2002 Femtosecond laser ablation from sodium chloride and barium fluoride Appl. Surf. Sci. 186 381-4
209. Roeterdink W G, Juurlink L B F, Vaughan O P H, Diez J D, Bonn M and Kleyn A W 2003 Coulomb explosion in femtosecond laser ablation of Si(1 1 1) Appl. Phys. Lett. 82 4190-2
210. Dachraoui H, Husinsky W and Betz G 2006 Ultra-short laser ablation of metals and semiconductors: evidence of ultra-fast Coulomb explosion Appl. Phys. A 83 333-6
211. Bashir S, Shahid Rafique M and Husinsky W 2012 Identification of ultra-fast electronic and thermal processes during femtosecond laser ablation of Si Appl. Phys. A 109 421-9
212. Szymonski M 1993 Electronic sputtering of alkali halides Fundamental Processes in Sputtering of Atoms and Molecules (SPUT92) Kongelige Danske Videnskabernes Selskab: Matematisk-Fysiske Meddelelser Symp. on the Occasion of the 250th Anniversary of the Royal-Danish-Academy-of-Sciences-and-Letters - Fundamental Processes in Sputtering of Atoms and Molecules (SPUT92) (Copenhagen, Denmark, 30 August-4 September 1992) ed P Sigmund pp 495-526
213. Johnson R E and Schou J 1993 Sputtering of inorganic insulators Fundamental Processes in Sputtering of Atoms and Molecules (SPUT92) Kongelige Danske Videnskabernes Selskab: Matematisk-Fysiske Meddelelser Symp. on the Occasion of the 250th Anniversary of the Royal-Danish-Academy-of-Sciences-and- Letters - Fundamental Processes in Sputtering of Atoms and Molecules (SPUT92) (Copenhagen, Denmark, 30 August-4 September, 1992) ed P Sigmund pp 403-93
214. Kimmel G A, Orlando T M, Cloutier P and Sanche L 1997 Low-energy (5-40 eV) electron-stimulated desorption of atomic hydrogen and metastable emission from amorphous ice J. Phys. Chem. B 101 6301-3
215. Lowndes D H 1998 Growth and doping of compound semiconductor films by pulsed laser ablation Laser Ablation and Desorption (Experimental Methods in the Physical Sciences vol 30) ed J C Miller and R F Haglund (San Diego, CA: Academic) pp 475-571
216. 3 Appl. Phys. A 77 73-80
217. Toftmann B, Doggett B, Budtz-Jørgensen C, Schou J and Lunney J G 2013 Comparison of plume dynamics in UV femtosecond and nanosecond laser ablation of silver J. Appl. Phys. submitted
218. Teghil R, D'Alessio L, De Bonis A, Galasso A, Ibris N, Maria Salvi A, Santagata A and Villani P 2009 Nanoparticles and thin film formation in ultrashort pulsed laser deposition of vanadium oxide J. Phys. Chem. A 113 14969-74
219. Donnelly T, Lunney J G, Amoruso S, Bruzzese R, Wang X and Ni X 2010 Dynamics of the plumes produced by ultrafast laser ablation of metals J. Appl. Phys. 108 043309
220. Donnelly T, Lunney J G, Amoruso S, Bruzzese R, Wang X and Ni X 2010 Angular distributions of plume components in ultrafast laser ablation of metal targets Appl. Phys. A 100 569-74
221. Schou J, Amoruso S and Lunney J G 2007 Plume dynamics Laser Ablation and its Applications ed C R Phipps (New York: Springer) pp 67-95
222. Claeyssens F, Ashfold M N R, Sofoulakis E, Ristoscu C G, Anglos D and Fotakis C 2002 Plume emissions accompanying 248 nm laser ablation of graphite in vacuum: effects of pulse duration J. Appl. Phys. 91 6162-72
223. Stock M and Molian P 2004 Femtosecond pulsed laser deposition of amorphous, ultrahard boride thin films J. Vac. Sci. Technol. A 22 670-5
224. Ristoscu C, Ghica C, Papadopoulou E L, Socol G, Gray D, Mironov B, Mihailescu I N and Fotakis C 2011 Modification of AlN thin films morphology and structure by temporally shaping of fs laser pulses used for deposition Thin Solid Films 519 6381-7
225. Gyorgy E, Ristoscu C, Mihailescu I N, Klini A, Vainos N, Fotakis C, Ghica C, Schmerber G and Faerber J 2001 Role of laser pulse duration and gas pressure in deposition of AlN thin films J. Appl. Phys. 90 456-61
226. Zhang Z, VanRompay P A, Nees J A, Clarke R, Pan X and Pronko P P 2000 Nitride film deposition by femtosecond and nanosecond laser ablation in low-pressure nitrogen discharge gas Appl. Surf. Sci. 154 165-71
227. Watanabe K, Taniguchi T and Kanda H 2004 Direct-bandgap properties and evidence for ultraviolet lasing of hexagonal boron nitride single crystal Nature Mater. 3 404-9
228. Sanz M, de Nalda R, Marco J F, Izquierdo J G, Banares L and Castillejo M 2010 Femtosecond pulsed laser deposition of nanostructured CdS films J. Phys. Chem. C 114 4864-8
229. Tong X L, Jiang D S, Liu Z M, Luo M Z, Li Y, Lu P X, Yang G and Long H 2008 Structural characterization of CdS thin film on quartz formed by femtosecond pulsed laser deposition at high temperature Thin Solid Films 516 2003-8
230. Tong X L, Jiang D S, Yan Q Y, Hu W B, Liu Z M and Luo M Z 2008 Deposition of CdS thin films onto Si(1 1 1) substrate by PLD with femtosecond pulse Vacuum 82 1411-14
231. Teghil R, Santagata A, De Bonis A, Galasso A and Villani P 2009 Chromium carbide thin films deposited by ultra-short pulse laser deposition Appl. Surf. Sci. 255 7729-33
232. Dinh L N, Hayes S E, Wynne A E, Wall M A, Saw C K, Stuart B C, Balooch M, Paravastu A K and Reimer J A 2002 Properties of GaAs nanoclusters deposited by a femtosecond laser J. Mater. Sci. 37 3953-8
233. Trelenberg T W, Dinh L N, Saw C K, Stuart B C and Balooch M 2004 Femtosecond pulsed laser ablation of GaAs Appl. Surf. Sci. 221 364-9
234. Tong X L, Jiang D S, Liu L and Dai H 2008 Comparison between GaN thin film grown by femtosecond and nanosecond pulsed laser depositions J. Vac. Sci. Technol. B 26 1398-403
235. Pronko P P, Zhang Z and VanRompay P A 2003 Critical density effects in femtosecond ablation plasmas and consequences for high intensity pulsed laser deposition Appl. Surf. Sci. 208-209 492-501
236. Teghil R, D'Alessio L, De Bonis A, Galasso A, Villani P, Zaccagnino M, Santagata A and Ferro D 2005 Ferntosecond pulsed laser ablation of group 4 carbides Appl. Surf. Sci. 247 51-6
237. Taurian O E, Springborg M and Christensen N E 1985 Self-consistent electronic-structures of MgO and SrO Solid State Commun. 55 351-5
238. Darby M S B, May-Smith T C, Eason R W, Donnelly T, Lunney J G and Rogers K D 2008 A comparative study of gadolinium gallium garnet growth by femtosecond and nanosecond pulsed laser deposition Appl. Surf. Sci. 254 3364-9
239. Ghica C, Ristoscu C, Socol G, Brodoceanu D, Nistor L C, Mihailescu I N, Klini A and Fotakis C 2006 Growth and characterization of β-SiC films obtained by fs laser ablation Appl. Surf. Sci. 252 4672-7
240. Kim S, Spanier J E and Herman I P 2000 Optical transmission, photoluminescence, and Raman scattering of porous SiC prepared from p-type 6H SiC Japan. J. Appl. Phys. Part 1 39 5875-8
241. 2 thin films grown on sapphire by femtosecond pulsed laser deposition J. Appl. Phys. 91 1060-5
242. 2 (1 1 0)-1X1 Surface Phys. Rev. B 38 2072-83
243. Teghil R, De Bonis A, Galasso A, Villani P and Santagata A 2007 Ferntosecond pulsed laser ablation deposition of tantalum carbide Appl. Surf. Sci. 254 1220-3
244. Teghil R, D'Alessio L, De Bonis A, Galasso A, Villani P and Santagata A 2006 Femtosecond pulsed laser ablation and deposition of titanium carbide Thin Solid Films 515 1411-18
245. 2 films prepared by pulsed laser deposition: laser desorption and cationization of model adsorbates J. Phys. Chem. C 114 17409-15
246. 2 films Appl. Surf. Sci. 255 5206-10
247. Teghil R, De Bonis A, Galasso A, Villani P, Santagata A, Ferro D and Barinov S M 2009 Nanostructured thin films obtained by ultra-short pulse laser deposition of vanadium carbide Appl. Surf. Sci. 255 5220-3
248. Krishnakumar S and Menon C S 1996 Optical and electrical properties of vanadium pentoxide thin films Phys. Status Solidi A 153 439-44
249. Rau J V, Latini A, Teghil R, De Bonis A, Fosca M, Caminiti R and Albertini V R 2011 Superhard tungsten tetraboride films prepared by pulsed laser deposition method ACS Appl. Mater. Interfaces 3 3738-43
250. De Bonis A, Teghil R, Santagata A, Galasso A and Rau J V 2012 Thin films deposited by femtosecond pulsed laser ablation of tungsten carbide Appl. Surf. Sci. 258 9198-201
251. Chau J L H, Yang M-C, Nakamura T, Sato S, Yang C-C and Cheng C-W 2010 Fabrication of ZnO thin films by femtosecond pulsed laser deposition Opt. Laser Technol. 42 1337-9
252. Yang Y, Long H, Yang G, Chen A, Zheng Q and Lu P 2009 Femtosecond laser deposited zinc oxide film and its optical properties Vacuum 83 892-6
253. Liu B, Hu Z, Che Y, Allenic A, Sun K and Pan X 2008 Growth of ZnO nanoparticles and nanorods with ultrafast pulsed laser deposition Appl. Phys. A 93 813-18
254. Yang Y, Long H, Yang G, Dai N, Zheng Q and Lu P 2008 Structural properties of ZnO thin films on Si substrate using femtosecond laser deposition J. Cryst. Growth 310 551-5
255. Klini A, Manousaki A, Anglos D and Fotakis C 2005 Growth of ZnO thin films by ultraviolet pulsed-laser ablation: study of plume dynamics J. Appl. Phys. 98 123301
256. Okoshi M, Higashikawa K and Hanabusa M 2001 Wavelength dependence of femtosecond pulsed laser deposition of zinc oxide films Japan. J. Appl. Phys. Part 1 40 1287-8
257. Rode A V, Gamaly E G and Luther -Davies 2007 Ultrafast laser ablation and film deposition Pulsed Laser Deposition of Thin Films ed R Eason (Hoboken, NJ: Wiley) pp 99-129
258. Acharya K P, Mahalingm K and Ullrich B 2010 Structural, compositional, and optoelectronic properties of thin-film CdS on p-GaAs prepared by pulsed-laser deposition Thin Solid Films 518 1784-7
259. Mclaughlin M, Sakeek H F, Maguire P, Graham W G, Molloy J, Morrow T, Laverty S and Anderson J 1993 Properties of ZnS thin-films prepared by 248 nm pulsed-laser deposition Appl. Phys. Lett. 63 1865-7
260. Svendsen W, Ellegaard O and Schou J 1996 Laser ablation deposition measurements from silver and nickel Appl. Phys. A 63 247-55
261. Noel S, Hermann J and Itina T 2007 Investigation of nanoparticle generation during femtosecond laser ablation of metals Appl. Surf. Sci. 253 6310-15