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Volumn 30, Issue C, 1997, Pages 475-571

11. Growth and Doping of Compound Semiconductor Films by Pulsed Laser Ablation

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EID: 77956703021     PISSN: 10794042     EISSN: None     Source Type: Book Series    
DOI: 10.1016/S0076-695X(08)60403-2     Document Type: Article
Times cited : (21)

References (259)
  • 3
    • 0003592140 scopus 로고
    • Chrisey D.B., and Hubler G.K. (Eds), John Wiley and Sons, New York
    • In: Chrisey D.B., and Hubler G.K. (Eds). Pulsed Laser Deposition of Thin Films (1994), John Wiley and Sons, New York
    • (1994) Pulsed Laser Deposition of Thin Films
  • 4
    • 77956696969 scopus 로고    scopus 로고
    • D. C. Paine, and J. C. Bravman, eds. Laser ablation for materials synthesis. Mat. Res. Soc. Symp. Proc. 191, Materials Research Society, Pittsburgh, 1992
    • D. C. Paine, and J. C. Bravman, eds. Laser ablation for materials synthesis. Mat. Res. Soc. Symp. Proc. 191, Materials Research Society, Pittsburgh, 1992
  • 5
    • 0027277946 scopus 로고    scopus 로고
    • B. Braren, J. J. Dubowski, and D. P. Norton, eds. Laser ablation in materials processing: Fundamentals and applications. Mater. Res. Soc. Symp. Proc. 285, Materials Research Society, Pittsburgh, 1993
    • B. Braren, J. J. Dubowski, and D. P. Norton, eds. Laser ablation in materials processing: Fundamentals and applications. Mater. Res. Soc. Symp. Proc. 285, Materials Research Society, Pittsburgh, 1993
  • 6
    • 77956687103 scopus 로고    scopus 로고
    • H. A. Atwater, J. T. Dickinson, D. H. Lowndes, and A. Polman, eds. Film synthesis and growth using energetic beams. Mater. Res. Soc. Symp. Proc. 388, Materials Research Society, Pittsburgh, 1995
    • H. A. Atwater, J. T. Dickinson, D. H. Lowndes, and A. Polman, eds. Film synthesis and growth using energetic beams. Mater. Res. Soc. Symp. Proc. 388, Materials Research Society, Pittsburgh, 1995
  • 7
    • 77956698949 scopus 로고    scopus 로고
    • Advanced laser processing of materials-Fundamentals and applications Mater. Res. Soc
    • R. Singh, D. P. Norton, L. D. Laude, J. Narayan, and J. Cheung, eds, press
    • R. Singh, D. P. Norton, L. D. Laude, J. Narayan, and J. Cheung, eds. Advanced laser processing of materials-Fundamentals and applications Mater. Res. Soc. Symp. Proc. 397, Materials Research Society, Pittsburgh, 1996, in press
    • (1996) Symp. Proc. 397, Materials Research Society, Pittsburgh
  • 8
    • 77956692906 scopus 로고
    • February
    • MRS Bulletin, vol. 17, no. 2, February, 1992
    • (1992) MRS Bulletin , vol.17 , Issue.2
  • 9
    • 77956669419 scopus 로고
    • Miller J.C., and Haglund Jr. R.F. (Eds), Springer-Verlag, New York
    • In: Miller J.C., and Haglund Jr. R.F. (Eds). Laser Ablation Mechanisms and Applications (1992), Springer-Verlag, New York
    • (1992) Laser Ablation Mechanisms and Applications
  • 10
    • 77956671757 scopus 로고
    • Second Intl. Conf. on Laser Ablation (COLA-93)
    • J. C. Miller, and D. B. Geohegan, eds, Amer. Inst, of Physics, New York
    • J. C. Miller, and D. B. Geohegan, eds. Second Intl. Conf. on Laser Ablation (COLA-93). AIP Conf. Proc. 288, Amer. Inst, of Physics, New York, 1993
    • (1993) AIP Conf. Proc , vol.288
  • 11
    • 77956699565 scopus 로고    scopus 로고
    • Laser ablation-Mechanisms and applications III (COLA-95). European Mater. Res. Soc
    • E. Fogarassy, D. B. Geohegan, and M. Stuke, eds, press
    • E. Fogarassy, D. B. Geohegan, and M. Stuke, eds. Laser ablation-Mechanisms and applications III (COLA-95). European Mater. Res. Soc. Symp. Proc. 55, 1996, in press
    • Symp. Proc , vol.55 , Issue.1996
  • 13
    • 77956663581 scopus 로고
    • Proc. of Symp. E: Laser surface processing and characterization. E-MRS Spring Conference, Strasbourg, France, 1991. Appl. Surface Sci
    • I. W. Boyd, ed, published in Applied Surface Science
    • I. W. Boyd, ed. Proc. of Symp. E: Laser surface processing and characterization. E-MRS Spring Conference, Strasbourg, France, 1991. Appl. Surface Sci. 54, 1-535 (1992). Also see earlier conferences in this series, published in Applied Surface Science.
    • (1992) Also see earlier conferences in this series , vol.54 , pp. 1-535
  • 15
    • 0024104822 scopus 로고
    • Formation of dielectric and semiconductor thin films by laser-assisted evaporation
    • Sankur H., and Cheung J.T. Formation of dielectric and semiconductor thin films by laser-assisted evaporation. Appl. Physics A47 (1988) 271
    • (1988) Appl. Physics , vol.A47 , pp. 271
    • Sankur, H.1    Cheung, J.T.2
  • 16
    • 0024030501 scopus 로고
    • Pulsed laser evaporation and epitaxy of thin semiconductor films
    • Materials Science and Engineering for the 1990s
    • Dubowski J.J. Pulsed laser evaporation and epitaxy of thin semiconductor films. Chemtronics 3 (1988) 66 Materials Science and Engineering for the 1990s
    • (1988) Chemtronics , vol.3 , pp. 66
    • Dubowski, J.J.1
  • 17
    • 77956693295 scopus 로고    scopus 로고
    • Growth of epitaxial thin films by pulsed laser ablation
    • Boatner L.A. (Ed), Amer. Inst, of Physics, New York in press
    • Lowndes D.H. Growth of epitaxial thin films by pulsed laser ablation. In: Boatner L.A. (Ed). Modern Topics in Single Crystal Growth (1996), Amer. Inst, of Physics, New York in press
    • (1996) Modern Topics in Single Crystal Growth
    • Lowndes, D.H.1
  • 18
    • 77956684843 scopus 로고    scopus 로고
    • The INSPEC database was used to compile a bibliography for compound semiconductor growth by PLD. Although an effort was made to obtain a comprehensive listing, omissions may have occurred if the key words used in this search did not appear in an article's title or abstract. The author apologizes in advance to uncited authors for any such unintentional omissions
    • The INSPEC database was used to compile a bibliography for compound semiconductor growth by PLD. Although an effort was made to obtain a comprehensive listing, omissions may have occurred if the key words used in this search did not appear in an article's title or abstract. The author apologizes in advance to uncited authors for any such unintentional omissions
  • 20
    • 77956665717 scopus 로고
    • INSPEC database
    • INSPEC database, 1990-95
    • (1990)
  • 21
    • 77956680829 scopus 로고
    • National Research Council, National Academy Press, Washington, D.C.
    • Maintaining Competitiveness in the Age of Materials (1989), National Research Council, National Academy Press, Washington, D.C. 98
    • (1989) Maintaining Competitiveness in the Age of Materials , pp. 98
  • 22
    • 0027188674 scopus 로고    scopus 로고
    • Research assistance task force report on Photovoltaic Materials: Innovations and Fundamental Research Opportunities (A. Zunger, ed.). J. Electronic Mater. 22, 3-72 (1993).
    • Research assistance task force report on Photovoltaic Materials: Innovations and Fundamental Research Opportunities (A. Zunger, ed.). J. Electronic Mater. 22, 3-72 (1993).
  • 25
    • 0031546402 scopus 로고    scopus 로고
    • Pulsed laser deposition of epitaxial A1N, GaN, and InN thin films on sapphire (OOO1)
    • Feiler D., Williams R.S., Talin A.A., Yoon H., and Goorsky M.S. Pulsed laser deposition of epitaxial A1N, GaN, and InN thin films on sapphire (OOO1). J. of Crystal Growth 171 (1997) 12
    • (1997) J. of Crystal Growth , vol.171 , pp. 12
    • Feiler, D.1    Williams, R.S.2    Talin, A.A.3    Yoon, H.4    Goorsky, M.S.5
  • 31
    • 0027969563 scopus 로고
    • Highly doped p-type, n-type CdS thin films and diodes
    • Chai B.H.T., Payne S.A., Fan T.Y., and Cassanho A. (Eds), Materials Research Society, Pittsburgh
    • Shen W.P., and Kwok H.S. Highly doped p-type, n-type CdS thin films and diodes. In: Chai B.H.T., Payne S.A., Fan T.Y., and Cassanho A. (Eds). New Materials for Advanced Solid State Lasers (1994), Materials Research Society, Pittsburgh 173
    • (1994) New Materials for Advanced Solid State Lasers , pp. 173
    • Shen, W.P.1    Kwok, H.S.2
  • 32
    • 0000372095 scopus 로고
    • Growth of HgCdTe epilayers with any predesigned compositional profile by laser molecular beam epitaxy
    • See also, J. T. Cheung. Bandgap engineering of HgCdTe by pulsed laser deposition [3, pp. 519-533].
    • Cheung J.T., and Madden J. Growth of HgCdTe epilayers with any predesigned compositional profile by laser molecular beam epitaxy. J. Vac. Sci. Technol. B5 (1987) 705 See also, J. T. Cheung. Bandgap engineering of HgCdTe by pulsed laser deposition [3, pp. 519-533].
    • (1987) J. Vac. Sci. Technol. , vol.B5 , pp. 705
    • Cheung, J.T.1    Madden, J.2
  • 34
    • 36549102606 scopus 로고
    • Deposition of superconducting Y-Ba-Cu-O films at 400°C without postannealing
    • Witanachchi S., Kwok H.S., Wang X.W., and Shaw D.T. Deposition of superconducting Y-Ba-Cu-O films at 400°C without postannealing. Appl. Phys. Lett. 53 (1988) 234
    • (1988) Appl. Phys. Lett. , vol.53 , pp. 234
    • Witanachchi, S.1    Kwok, H.S.2    Wang, X.W.3    Shaw, D.T.4
  • 37
    • 36549104638 scopus 로고
    • Effect of incident kinetic energy and surface coverage on the dissociative chemisorption of oxygen on W(110)
    • Rettner C.T., DeLouise L.A., and Auerbach D.J. Effect of incident kinetic energy and surface coverage on the dissociative chemisorption of oxygen on W(110). J. Chem. Phys. 85 (1986) 1131
    • (1986) J. Chem. Phys. , vol.85 , pp. 1131
    • Rettner, C.T.1    DeLouise, L.A.2    Auerbach, D.J.3
  • 38
    • 0001500472 scopus 로고
    • The dynamics of the dissociative adsorption of alkanes on Ir(110)
    • Hamza A.V., Steinruck H.-P., and Madix R.J. The dynamics of the dissociative adsorption of alkanes on Ir(110). J. Chem. Phys. 86 (1987) 6506
    • (1987) J. Chem. Phys. , vol.86 , pp. 6506
    • Hamza, A.V.1    Steinruck, H.-P.2    Madix, R.J.3
  • 40
    • 0001091094 scopus 로고
    • x as probed by laserinduced fluorescence spectroscopy
    • x as probed by laserinduced fluorescence spectroscopy. Phys. Rev. Lett. 67 (1991) 2102
    • (1991) Phys. Rev. Lett. , vol.67 , pp. 2102
    • Otis, C.E.1    Dreyfus, R.W.2
  • 42
    • 77956694326 scopus 로고    scopus 로고
    • Lowndes, D.H., Rouleau, C.M., Geohegan, D.B., Puretzky, A.A., Strauss, M.A., Pedraza, A.J., Park, J.W., Budai, J.D. & Poker, D.B. Pulsed laser ablation growth and doping of epitaxial compound semiconductor films [7, in press]
    • Lowndes, D.H., Rouleau, C.M., Geohegan, D.B., Puretzky, A.A., Strauss, M.A., Pedraza, A.J., Park, J.W., Budai, J.D. & Poker, D.B. Pulsed laser ablation growth and doping of epitaxial compound semiconductor films [7, in press]
  • 43
    • 77956659083 scopus 로고    scopus 로고
    • Rouleau, C.M., Lowndes, D.H., Strauss, M.A., Cao, S., Pedraza, A.J., Geohegan, D.B., Puretzky, A.A. & Allard, F. Effect of ambient gas pressure on pulsed laser ablation plume dynamics and ZnTe film growth [7, in press]
    • Rouleau, C.M., Lowndes, D.H., Strauss, M.A., Cao, S., Pedraza, A.J., Geohegan, D.B., Puretzky, A.A. & Allard, F. Effect of ambient gas pressure on pulsed laser ablation plume dynamics and ZnTe film growth [7, in press]
  • 51
    • 0001393484 scopus 로고
    • Low-temperature formation of multilayered Bi(Pb)-Sr-Ca-Cu-O thin films by successive deposition using laser ablation
    • Kanai M., Kawai T., Kawai S., and Tabata H. Low-temperature formation of multilayered Bi(Pb)-Sr-Ca-Cu-O thin films by successive deposition using laser ablation. Appl. Phys. Lett. 54 (1989) 1802
    • (1989) Appl. Phys. Lett. , vol.54 , pp. 1802
    • Kanai, M.1    Kawai, T.2    Kawai, S.3    Tabata, H.4
  • 52
    • 0028758902 scopus 로고
    • Controlled formation of oxide materials by laser molecular beam epitaxy
    • see also H. Koinuma, M. Kawasaki, and M. Yoshimoto. Laser-MBE for atomically defined ceramic film growth [7, in press].
    • Koinuma H., and Yoshimoto M. Controlled formation of oxide materials by laser molecular beam epitaxy. Appl. Surf. Sci. 75 (1994) 308 see also H. Koinuma, M. Kawasaki, and M. Yoshimoto. Laser-MBE for atomically defined ceramic film growth [7, in press].
    • (1994) Appl. Surf. Sci. , vol.75 , pp. 308
    • Koinuma, H.1    Yoshimoto, M.2
  • 56
    • 77956713272 scopus 로고    scopus 로고
    • L.-C. Chen. Particulates generated by pulsed laser ablation [3, pp. 167-198], (a) p. 187; (b) p. 182
    • L.-C. Chen. Particulates generated by pulsed laser ablation [3, pp. 167-198], (a) p. 187; (b) p. 182
  • 57
    • 0007304223 scopus 로고
    • Processes occurring in an erosion plasma during laser vacuum deposition. III. Condensation in gas flows during laser vaporization of materials
    • Gaponov S.V., Gudkov A.A., and Fraerman A.A. Processes occurring in an erosion plasma during laser vacuum deposition. III. Condensation in gas flows during laser vaporization of materials. Sov. Phys. Tech. Phys. 27 (1982) 1130
    • (1982) Sov. Phys. Tech. Phys. , vol.27 , pp. 1130
    • Gaponov, S.V.1    Gudkov, A.A.2    Fraerman, A.A.3
  • 59
    • 0029305556 scopus 로고
    • Role of temporal delay in dual-laser ablated plumes
    • Witanachchi S., and Mukherjee P. Role of temporal delay in dual-laser ablated plumes. J. Vac. Sci. Technol. A13 (1995) 1171
    • (1995) J. Vac. Sci. Technol. , vol.A13 , pp. 1171
    • Witanachchi, S.1    Mukherjee, P.2
  • 60
    • 36549096046 scopus 로고
    • On the dual role of the Knudsen layer and unsteady adiabatic expansion in pulse sputtering phenomena
    • Kelly R. On the dual role of the Knudsen layer and unsteady adiabatic expansion in pulse sputtering phenomena. J. Chem. Phys. 92 (1990) 5047
    • (1990) J. Chem. Phys. , vol.92 , pp. 5047
    • Kelly, R.1
  • 63
    • 24244460619 scopus 로고
    • Pulsed-laser evaporation techniques for deposition of thin films: Physics and theoretical model
    • Singh R.K., and Narayan J. Pulsed-laser evaporation techniques for deposition of thin films: Physics and theoretical model. Phys. Rev. B41 (1990) 8843
    • (1990) Phys. Rev. , vol.B41 , pp. 8843
    • Singh, R.K.1    Narayan, J.2
  • 64
    • 0040467314 scopus 로고
    • Theoretical model for deposition of superconducting thin films using pulsed laser evaporation technique
    • Singh R.K., Holland O.W., and Narayan J. Theoretical model for deposition of superconducting thin films using pulsed laser evaporation technique. J. Appl. Phys. 68 (1990) 233
    • (1990) J. Appl. Phys. , vol.68 , pp. 233
    • Singh, R.K.1    Holland, O.W.2    Narayan, J.3
  • 65
    • 36549100318 scopus 로고
    • Role of the oxygen atomic beam in low-temperature growth of superconducting films by laser deposition
    • Zheng J.P., Ying Q.Y., Witanachchi S., Huang Z.Q., Shaw D.T., and Kwok H.S. Role of the oxygen atomic beam in low-temperature growth of superconducting films by laser deposition. Appl. Phys. Lett. 54 (1989) 954
    • (1989) Appl. Phys. Lett. , vol.54 , pp. 954
    • Zheng, J.P.1    Ying, Q.Y.2    Witanachchi, S.3    Huang, Z.Q.4    Shaw, D.T.5    Kwok, H.S.6
  • 66
    • 36449007129 scopus 로고
    • On the origin of spatial nonuniformities in the composition of pulsed-laser-deposited films
    • Saenger K.L. On the origin of spatial nonuniformities in the composition of pulsed-laser-deposited films. J. Appl. Phys. 70 (1991) 5629
    • (1991) J. Appl. Phys. , vol.70 , pp. 5629
    • Saenger, K.L.1
  • 67
    • 0001562975 scopus 로고
    • On the effect of Knudsen-layer formation on studies of evaporation, sputtering, and desorption
    • Kelly R., and Dreyfus R.W. On the effect of Knudsen-layer formation on studies of evaporation, sputtering, and desorption. Surf. Sci. 198 (1988) 263
    • (1988) Surf. Sci. , vol.198 , pp. 263
    • Kelly, R.1    Dreyfus, R.W.2
  • 68
    • 0024275972 scopus 로고
    • Reconsidering the mechanisms of laser sputtering with Knudsen-layer formation taken into account
    • Kelly R., and Dreyfus R.W. Reconsidering the mechanisms of laser sputtering with Knudsen-layer formation taken into account. Nucl. Instr, and Meth. in Physics Res. B32 (1988) 341
    • (1988) Nucl. Instr, and Meth. in Physics Res. , vol.B32 , pp. 341
    • Kelly, R.1    Dreyfus, R.W.2
  • 71
    • 0000816453 scopus 로고
    • Fast ICCD photography of YBCO laser ablation plume propagation in vacuum and ambient oxygen
    • Geohegan D.B. Fast ICCD photography of YBCO laser ablation plume propagation in vacuum and ambient oxygen. Appl. Phys. Lett. 60 (1992) 2732
    • (1992) Appl. Phys. Lett. , vol.60 , pp. 2732
    • Geohegan, D.B.1
  • 72
    • 0026946833 scopus 로고
    • c. superconductor film growth
    • Sartwell B.D., McGuire G.E., and Hofmann S. (Eds), Elsevier, Amsterdam
    • c. superconductor film growth. In: Sartwell B.D., McGuire G.E., and Hofmann S. (Eds). Metallurgical Coatings and Thin Films 1992 II (1992), Elsevier, Amsterdam 138
    • (1992) Metallurgical Coatings and Thin Films 1992 , vol.II , pp. 138
    • Geohegan, D.B.1
  • 75
    • 0014933309 scopus 로고
    • Time of start of screening of a surface evaporating under the influence of laser radiation
    • Nemchinov I.V., and Popov S.V. Time of start of screening of a surface evaporating under the influence of laser radiation. JETP Lett. 11 (1970) 312
    • (1970) JETP Lett. , vol.11 , pp. 312
    • Nemchinov, I.V.1    Popov, S.V.2
  • 76
    • 0037501995 scopus 로고
    • High-temperature plasmas produced by laser beam irradiation of single solid particles
    • Haught A.F., and Polk D.H. High-temperature plasmas produced by laser beam irradiation of single solid particles. Phys. Fluids 9 (1966) 2047
    • (1966) Phys. Fluids , vol.9 , pp. 2047
    • Haught, A.F.1    Polk, D.H.2
  • 78
    • 77956654293 scopus 로고    scopus 로고
    • Angular distribution of ablated material, p. 215
    • Angular distribution of ablated material., p. 215
  • 82
    • 77956689047 scopus 로고    scopus 로고
    • 76, pp. 204-206
    • [76, pp. 204-206]
  • 83
    • 0026941883 scopus 로고
    • Composition variations in pulsed laser deposited Y-Ba-Cu-O thin films as a function of deposition parameters
    • Foote M.C., Jones B.B., Hunt B.D., Barner J.B., Vasquez R.P., and Bajuk L.J. Composition variations in pulsed laser deposited Y-Ba-Cu-O thin films as a function of deposition parameters. Physica C201 (1992) 176
    • (1992) Physica , vol.C201 , pp. 176
    • Foote, M.C.1    Jones, B.B.2    Hunt, B.D.3    Barner, J.B.4    Vasquez, R.P.5    Bajuk, L.J.6
  • 85
    • 24244461285 scopus 로고
    • Laser-induced target modification effects on pulsed laser deposition of Y-Ba-Cu-O superconducting thin films
    • Muenchausen R.E., Foltyn S.R., Nogar N.S., Estler R.C., Peterson E.J., and Wu X.D. Laser-induced target modification effects on pulsed laser deposition of Y-Ba-Cu-O superconducting thin films. Nucl. Instr. Meth. A303 (1991) 204
    • (1991) Nucl. Instr. Meth. , vol.A303 , pp. 204
    • Muenchausen, R.E.1    Foltyn, S.R.2    Nogar, N.S.3    Estler, R.C.4    Peterson, E.J.5    Wu, X.D.6
  • 86
    • 77956670733 scopus 로고    scopus 로고
    • 76, p. 211
    • [76, p. 211]
  • 87
    • 0342957205 scopus 로고
    • Thickness profiles of films deposited from laser erosion plasmas
    • Gorbunov A.A., and Konov V.I. Thickness profiles of films deposited from laser erosion plasmas. Sov. Phys. Tech. Phys. 34 (1990) 1271
    • (1990) Sov. Phys. Tech. Phys. , vol.34 , pp. 1271
    • Gorbunov, A.A.1    Konov, V.I.2
  • 91
    • 36549091810 scopus 로고
    • Generation of high-energy atomic beams in laser-superconducting target interaction
    • Zheng J.P., Huang Z.Q., Shaw D.T., and Kwok H.S. Generation of high-energy atomic beams in laser-superconducting target interaction. Appl. Phys. Lett. 54 (1989) 280
    • (1989) Appl. Phys. Lett. , vol.54 , pp. 280
    • Zheng, J.P.1    Huang, Z.Q.2    Shaw, D.T.3    Kwok, H.S.4
  • 99
    • 21644477594 scopus 로고
    • Textured aluminum-doped zinc oxide thin films from atmospheric pressure chemical-vapor deposition
    • Hu J., and Gordon R.G. Textured aluminum-doped zinc oxide thin films from atmospheric pressure chemical-vapor deposition. J. Appl. Phys. 71 (1992) 880
    • (1992) J. Appl. Phys. , vol.71 , pp. 880
    • Hu, J.1    Gordon, R.G.2
  • 100
    • 36449008780 scopus 로고
    • Simulations of crystal growth: Effects of atomic beam energy
    • Gilmer G.H., and Roland C. Simulations of crystal growth: Effects of atomic beam energy. Appl. Phys. Lett. 65 (1994) 824
    • (1994) Appl. Phys. Lett. , vol.65 , pp. 824
    • Gilmer, G.H.1    Roland, C.2
  • 101
    • 0000470360 scopus 로고
    • Limiting thickness her: For epitaxial growth and room-temperature Si growth on Si(100)
    • Eaglesham D.J., Gossman H.-J., and Cerullo M. Limiting thickness her: For epitaxial growth and room-temperature Si growth on Si(100). Phys. Rev. Lett. 65 (1990) 1227
    • (1990) Phys. Rev. Lett. , vol.65 , pp. 1227
    • Eaglesham, D.J.1    Gossman, H.-J.2    Cerullo, M.3
  • 103
    • 0001354309 scopus 로고
    • Epitaxial growth of silicon: A molecular-dynamics simulation
    • Schneider M., Schuller I.K., and Rahman A. Epitaxial growth of silicon: A molecular-dynamics simulation. Phys. Rev. B36 (1987) 1340
    • (1987) Phys. Rev. , vol.B36 , pp. 1340
    • Schneider, M.1    Schuller, I.K.2    Rahman, A.3
  • 104
    • 0000138638 scopus 로고
    • Molecular-dynamics simulation of molecularbeams epitaxial growth of the silicon (100) surface
    • Gawlinski E.T., and Gunton J.D. Molecular-dynamics simulation of molecularbeams epitaxial growth of the silicon (100) surface. Phys. Rev. B36 (1987) 4774
    • (1987) Phys. Rev. , vol.B36 , pp. 4774
    • Gawlinski, E.T.1    Gunton, J.D.2
  • 105
    • 0000687005 scopus 로고
    • The influence of reconstruction on epitaxial growth: Ge on Si(100)-(2X1) and Si(III)-(7X7)
    • Gossman H.J., and Feldman L.C. The influence of reconstruction on epitaxial growth: Ge on Si(100)-(2X1) and Si(III)-(7X7). Surf. Sci. 155 (1985) 413
    • (1985) Surf. Sci. , vol.155 , pp. 413
    • Gossman, H.J.1    Feldman, L.C.2
  • 108
    • 33144475026 scopus 로고
    • Defect generation and morphology of (100) Si surfaces during low-energy Ar-iron bombardment
    • Ramana Murty M.V., and Atwater H.A. Defect generation and morphology of (100) Si surfaces during low-energy Ar-iron bombardment. Phys. Rev. B45 (1992) 1507
    • (1992) Phys. Rev. , vol.B45 , pp. 1507
    • Ramana Murty, M.V.1    Atwater, H.A.2
  • 110
    • 25844481496 scopus 로고
    • Monte Carlo simulations of the transport of laser-ablated atoms in a diluted gas
    • Kools J.C.S. Monte Carlo simulations of the transport of laser-ablated atoms in a diluted gas. J. Appl. Phys. 74 (1993) 6401
    • (1993) J. Appl. Phys. , vol.74 , pp. 6401
    • Kools, J.C.S.1
  • 111
    • 30244482545 scopus 로고
    • Collisional generations of precursor ions by laser-produced plasma expanding in a gas
    • Goforth R.R., and Koopman D.W. Collisional generations of precursor ions by laser-produced plasma expanding in a gas. Phys. Fluids 17 (1974) 698
    • (1974) Phys. Fluids , vol.17 , pp. 698
    • Goforth, R.R.1    Koopman, D.W.2
  • 112
    • 0016093343 scopus 로고
    • Collisional coupling in counterstreaming laserproduced plasmas
    • Koopman D.W., and Goforth R.R. Collisional coupling in counterstreaming laserproduced plasmas. Phys. Fluids 17 (1974) 1560
    • (1974) Phys. Fluids , vol.17 , pp. 1560
    • Koopman, D.W.1    Goforth, R.R.2
  • 113
    • 0347768808 scopus 로고
    • Momentum transfer interaction of a laser-produced plasma with a low-pressure background
    • Koopman D.W. Momentum transfer interaction of a laser-produced plasma with a low-pressure background. Phys. Fluids 15 (1972) 1959
    • (1972) Phys. Fluids , vol.15 , pp. 1959
    • Koopman, D.W.1
  • 114
    • 77956689862 scopus 로고    scopus 로고
    • Wood, R.F., Chen, K.-R., Liu, C.-L., Leboeuf, J.N., Donato, J., Puretzky, A.A. & Geohegan, D.B. Elastic collision model of multi-component particle flux in laser ablation processes. Bull. Amer. Phys. Soc., in press; and, submitted for publication
    • Wood, R.F., Chen, K.-R., Liu, C.-L., Leboeuf, J.N., Donato, J., Puretzky, A.A. & Geohegan, D.B. Elastic collision model of multi-component particle flux in laser ablation processes. Bull. Amer. Phys. Soc., in press; and, submitted for publication
  • 116
    • 21544433576 scopus 로고
    • Low resistivity indium tin oxide films by pulsed laser deposition
    • Zheng J.P., and Kwok H.S. Low resistivity indium tin oxide films by pulsed laser deposition. Appl. Phys. Lett. 63 (1993) 1
    • (1993) Appl. Phys. Lett. , vol.63 , pp. 1
    • Zheng, J.P.1    Kwok, H.S.2
  • 117
    • 0001237842 scopus 로고
    • Crystalline phases of II-VI compound semiconductors grown by pulsed laser deposition
    • Shen W.P., and Kwok H.S. Crystalline phases of II-VI compound semiconductors grown by pulsed laser deposition. Appl. Phys. Lett. 65 (1994) 2162
    • (1994) Appl. Phys. Lett. , vol.65 , pp. 2162
    • Shen, W.P.1    Kwok, H.S.2
  • 118
    • 77956692585 scopus 로고    scopus 로고
    • R. E. Leuchtner. Pulsed laser deposition of ZnO: Energetic Rydberg state atoms and their impact on film growth [7, in press]
    • R. E. Leuchtner. Pulsed laser deposition of ZnO: Energetic Rydberg state atoms and their impact on film growth [7, in press]
  • 119
    • 4243154885 scopus 로고
    • Investigation of the thermalization of sputtered atoms in a magnetron discharge using laser-induced fluorescence
    • Park W.Z., Eguchi T., Honda C., Muraoka K., Yamagata Y., James B.W., Maeda M., and Akazaki M. Investigation of the thermalization of sputtered atoms in a magnetron discharge using laser-induced fluorescence. Appl. Phys. Lett. 58 (1991) 2564-2566
    • (1991) Appl. Phys. Lett. , vol.58 , pp. 2564-2566
    • Park, W.Z.1    Eguchi, T.2    Honda, C.3    Muraoka, K.4    Yamagata, Y.5    James, B.W.6    Maeda, M.7    Akazaki, M.8
  • 120
    • 77956668031 scopus 로고    scopus 로고
    • J. T. Cheung. Semi-Annual Rept. No. 4. DARPA contract no. MDA903-79-C-0188, 1981. See also [14]
    • J. T. Cheung. Semi-Annual Rept. No. 4. DARPA contract no. MDA903-79-C-0188, 1981. See also [14]
  • 121
    • 36449004140 scopus 로고    scopus 로고
    • Nanometer-sized silicon crystallites prepared by excimer laser ablation in constant pressure inert gas
    • Yoshida T., Takeyama S., Yamada Y., and Mutoh K. Nanometer-sized silicon crystallites prepared by excimer laser ablation in constant pressure inert gas. Appl. Phys. Lett. 68 (1996) 1772
    • (1996) Appl. Phys. Lett. , vol.68 , pp. 1772
    • Yoshida, T.1    Takeyama, S.2    Yamada, Y.3    Mutoh, K.4
  • 122
    • 0025211194 scopus 로고
    • Thermal analysis of target surface in the Ba-Y-Cu-O film preparation by laser ablation materials
    • Otsubo S., Minamikawa T., Yonezawa Y., Morimoto A., and Shimizu T. Thermal analysis of target surface in the Ba-Y-Cu-O film preparation by laser ablation materials. Jap. J. Appl. Phys. 29 (1990) L73
    • (1990) Jap. J. Appl. Phys. , vol.29
    • Otsubo, S.1    Minamikawa, T.2    Yonezawa, Y.3    Morimoto, A.4    Shimizu, T.5
  • 124
    • 77956671756 scopus 로고    scopus 로고
    • J. T. Cheung. History and fundamentals of pulsed laser deposition [3, pp. 1-22]. (a) p. 15; (b) p. 14
    • J. T. Cheung. History and fundamentals of pulsed laser deposition [3, pp. 1-22]. (a) p. 15; (b) p. 14
  • 125
    • 0014507644 scopus 로고
    • Vacuum deposition by high-energy laser with emphasis on barium titanate films
    • Schwartz H., and Tourtellotte H.A. Vacuum deposition by high-energy laser with emphasis on barium titanate films. J. Vac. Sci. and Technol. 6 (1969) 376
    • (1969) J. Vac. Sci. and Technol. , vol.6 , pp. 376
    • Schwartz, H.1    Tourtellotte, H.A.2
  • 126
    • 0002672755 scopus 로고
    • Development of plume of material vaporized by giant-pulse laser
    • Ready J.F. Development of plume of material vaporized by giant-pulse laser. Appl. Phys. Lett. 3 (1963) 11
    • (1963) Appl. Phys. Lett. , vol.3 , pp. 11
    • Ready, J.F.1
  • 133
    • 77956704367 scopus 로고    scopus 로고
    • C. M. Rouleau: (a) unpublished; (b) unpublished computer simulation
    • C. M. Rouleau: (a) unpublished; (b) unpublished computer simulation
  • 134
    • 77956668030 scopus 로고    scopus 로고
    • unpublished results
    • Lowndes, D.H., unpublished results
    • Lowndes, D.H.1
  • 135
    • 77956685142 scopus 로고    scopus 로고
    • private communication
    • Mashburn, D.N., private communication
    • Mashburn, D.N.1
  • 136
    • 36449006000 scopus 로고
    • Growing diamond films from an organic liquid
    • Xiao R.-F. Growing diamond films from an organic liquid. Appl. Phys. Lett. 67 (1995) 3117
    • (1995) Appl. Phys. Lett. , vol.67 , pp. 3117
    • Xiao, R.-F.1
  • 137
    • 0024908229 scopus 로고
    • Velocity distribution of micron-size particles in thin film laser ablation deposition (LAD) of metals and oxide superconductors
    • Dupendant H.J.P., Gavigan J.P., Givord D., Lienard A., Rebouillat J.P., and Soiiche Y. Velocity distribution of micron-size particles in thin film laser ablation deposition (LAD) of metals and oxide superconductors. Appl. Surf. Sci. 43 (1989) 369
    • (1989) Appl. Surf. Sci. , vol.43 , pp. 369
    • Dupendant, H.J.P.1    Gavigan, J.P.2    Givord, D.3    Lienard, A.4    Rebouillat, J.P.5    Soiiche, Y.6
  • 138
    • 0343200547 scopus 로고
    • The production of low scattering dielectric mirrors using rotating vane particle filtration
    • Barr W.P. The production of low scattering dielectric mirrors using rotating vane particle filtration. J. Phys. E2 (1969) 1112
    • (1969) J. Phys. , vol.E2 , pp. 1112
    • Barr, W.P.1
  • 139
    • 77956700936 scopus 로고    scopus 로고
    • Edwards, R. & Pique, A. (Neocera, Inc., College Park, MD), private communication
    • Edwards, R. & Pique, A. (Neocera, Inc., College Park, MD), private communication
  • 142
    • 0025749350 scopus 로고    scopus 로고
    • y. In Extended Abstracts of the 1991 Int. Conf. on Solid State Devices and Materials, p. 438. Bus. Center Acad. Soc. Japan, Tokyo, Japan, 1991
    • y. In Extended Abstracts of the 1991 Int. Conf. on Solid State Devices and Materials, p. 438. Bus. Center Acad. Soc. Japan, Tokyo, Japan, 1991
  • 146
    • 0039196758 scopus 로고
    • Thin films of uniform thickness by pulsed laser deposition
    • Erington K.B., and Ianno N.J. Thin films of uniform thickness by pulsed laser deposition. Rev. Sci. Instr. 63 (1992) 3525
    • (1992) Rev. Sci. Instr. , vol.63 , pp. 3525
    • Erington, K.B.1    Ianno, N.J.2
  • 149
    • 77956661921 scopus 로고    scopus 로고
    • Lowndes, D.H., McCamy, J.W., Zhu, Shen & Poker, D.B. Growth of uniformthickness thin films by pulsed-laser ablation. In Solid State Division Progress Report-1992, p. 21. Report ORNL-6722, Oak Ridge National Laboratory, Oak Ridge, TN, 1992
    • Lowndes, D.H., McCamy, J.W., Zhu, Shen & Poker, D.B. Growth of uniformthickness thin films by pulsed-laser ablation. In Solid State Division Progress Report-1992, p. 21. Report ORNL-6722, Oak Ridge National Laboratory, Oak Ridge, TN, 1992
  • 151
    • 77956663272 scopus 로고
    • Analysis of the condition for obtaining homogeneous optical coatings by the pulsed laser evaporation method
    • Dubkov V.M. Analysis of the condition for obtaining homogeneous optical coatings by the pulsed laser evaporation method. Sov. J. Opt. Technol. 49 (1982) 168
    • (1982) Sov. J. Opt. Technol. , vol.49 , pp. 168
    • Dubkov, V.M.1
  • 152
    • 5544261866 scopus 로고
    • Synthetic multilayer reflectors and selectors for soft x rays. I. Choice of materials and design of multilayer mirrors
    • Gaponov S.V., Gusev S.A., Platonov Yu.Ya., and Salashchenko N.N. Synthetic multilayer reflectors and selectors for soft x rays. I. Choice of materials and design of multilayer mirrors. Sov. Phys. Tech. Phys. 29 (1984) 442
    • (1984) Sov. Phys. Tech. Phys. , vol.29 , pp. 442
    • Gaponov, S.V.1    Gusev, S.A.2    Platonov, Yu.Ya.3    Salashchenko, N.N.4
  • 153
    • 0011291871 scopus 로고
    • Synthetic multilayer reflecting and selective elements for soft x-ray radiation. II. Fabrication of multilayer soft x-ray mirrors by laser pulse deposition
    • Akhsakhalyan A.D., Gaponov S.V., Gusev S.A., Luchin V.I., Platonov Yu.Ya., and Salashchenko N.N. Synthetic multilayer reflecting and selective elements for soft x-ray radiation. II. Fabrication of multilayer soft x-ray mirrors by laser pulse deposition. Sov. Phys. Tech. Phys. 29 (1984) 448
    • (1984) Sov. Phys. Tech. Phys. , vol.29 , pp. 448
    • Akhsakhalyan, A.D.1    Gaponov, S.V.2    Gusev, S.A.3    Luchin, V.I.4    Platonov, Yu.Ya.5    Salashchenko, N.N.6
  • 154
    • 0026743623 scopus 로고
    • Manufacture and characterization of soft x-ray mirrors by laser ablation
    • Mai H., and Pompe W. Manufacture and characterization of soft x-ray mirrors by laser ablation. Appl. Surf. Sci. 54 (1992) 215
    • (1992) Appl. Surf. Sci. , vol.54 , pp. 215
    • Mai, H.1    Pompe, W.2
  • 155
    • 77956692265 scopus 로고
    • Preparation of soft x-ray monochromators by laser pulse vapour deposition (LPVD)
    • Kenway P.B., et al. (Ed), IOP, Bristol, United Kingdom
    • Mai H., Dietsch R., and Pompe W. Preparation of soft x-ray monochromators by laser pulse vapour deposition (LPVD). In: Kenway P.B., et al. (Ed). X-ray Optics and Microanalysis (1993), IOP, Bristol, United Kingdom 503
    • (1993) X-ray Optics and Microanalysis , pp. 503
    • Mai, H.1    Dietsch, R.2    Pompe, W.3
  • 156
    • 84984135062 scopus 로고
    • A modified plasma source for controlled layer thickness synthesis in laser pulse vapour deposition (LPVD)
    • Dietsch R., Mai H., Pompe W., and Vollmar S. A modified plasma source for controlled layer thickness synthesis in laser pulse vapour deposition (LPVD). Adv. Materials for Optics and Electronics 2 (1993) 19
    • (1993) Adv. Materials for Optics and Electronics , vol.2 , pp. 19
    • Dietsch, R.1    Mai, H.2    Pompe, W.3    Vollmar, S.4
  • 158
    • 84949081744 scopus 로고
    • High quality YBCO films grown over large areas by pulsed laser deposition
    • Greer J.A. High quality YBCO films grown over large areas by pulsed laser deposition. J. Vac. Sci. and Technol. A10 (1992) 1821
    • (1992) J. Vac. Sci. and Technol. , vol.A10 , pp. 1821
    • Greer, J.A.1
  • 160
    • 0029305267 scopus 로고
    • Large-area pulsed laser deposition: Techniques and applications
    • Greer J.A., and Tabat M.D. Large-area pulsed laser deposition: Techniques and applications. J. Vac. Sci. and Technol. A13 (1995) 1175
    • (1995) J. Vac. Sci. and Technol. , vol.A13 , pp. 1175
    • Greer, J.A.1    Tabat, M.D.2
  • 165
    • 0029211921 scopus 로고
    • Pulsed laser ablation: a method for deposition and processing of semiconductors at an atomic level
    • Dubowski J.J. Pulsed laser ablation: a method for deposition and processing of semiconductors at an atomic level. Materials Science Forum 173-174 (1994) 73
    • (1994) Materials Science Forum , vol.173-174 , pp. 73
    • Dubowski, J.J.1
  • 166
    • 77956709139 scopus 로고
    • Structural and optical properties of semiconductor heterostructures and superlattices grown by pulsed laser evaporation and epitaxy (PLEE)
    • Dubowski J.J. Structural and optical properties of semiconductor heterostructures and superlattices grown by pulsed laser evaporation and epitaxy (PLEE). Proc. of the SPIE 2045 (1994) 112
    • (1994) Proc. of the SPIE , vol.2045 , pp. 112
    • Dubowski, J.J.1
  • 168
    • 0027226787 scopus 로고
    • Photo luminescence study of reproduction of energy levels in CdTe films grown by pulsed laser evaporation and epitaxy
    • Wrobel J.M., Moffitt C.E., and Dubowski J.J. Photo luminescence study of reproduction of energy levels in CdTe films grown by pulsed laser evaporation and epitaxy. Mat. Res. Soc. Symp. Proc. 285 (1993) 459
    • (1993) Mat. Res. Soc. Symp. Proc. , vol.285 , pp. 459
    • Wrobel, J.M.1    Moffitt, C.E.2    Dubowski, J.J.3
  • 169
    • 0029213637 scopus 로고
    • Low temperature photoluminescence in In-doped CdMnTe/CdTe quantum wells and superlattices
    • Wrobel J.M., Dubowski J.J., and Becla P. Low temperature photoluminescence in In-doped CdMnTe/CdTe quantum wells and superlattices. Proc. of the SPIE 2403 (1995) 251
    • (1995) Proc. of the SPIE , vol.2403 , pp. 251
    • Wrobel, J.M.1    Dubowski, J.J.2    Becla, P.3
  • 170
    • 0029222765 scopus 로고
    • Photoreflectance and photoluminescence spectroscopies of In-doped CdMnTe/CdTe multiple quantum wells and superlattices
    • Labrie D., Aufgang J.B., Wrobel J.M., Dubowski J.J., and Becla P. Photoreflectance and photoluminescence spectroscopies of In-doped CdMnTe/CdTe multiple quantum wells and superlattices. Proc. of the SPIE 2403 (1995) 259
    • (1995) Proc. of the SPIE , vol.2403 , pp. 259
    • Labrie, D.1    Aufgang, J.B.2    Wrobel, J.M.3    Dubowski, J.J.4    Becla, P.5
  • 171
    • 77956654898 scopus 로고    scopus 로고
    • personal communication
    • Dubowski, J.J., personal communication
    • Dubowski, J.J.1
  • 176
    • 0026711659 scopus 로고    scopus 로고
    • Compaan, A., Bhat, A., Tabory, C., Liu, S., Li, Y., Savage, M.E., Shao, M., Tsien, L. & Bohn, R.G. Polycrystalline CdTe solar cells by pulsed laser deposition. In Proc. 22nd IEEE Photovoltaic Specialists Conf., p. 957. IEEE, 1991
    • Compaan, A., Bhat, A., Tabory, C., Liu, S., Li, Y., Savage, M.E., Shao, M., Tsien, L. & Bohn, R.G. Polycrystalline CdTe solar cells by pulsed laser deposition. In Proc. 22nd IEEE Photovoltaic Specialists Conf., p. 957. IEEE, 1991
  • 177
    • 77956678508 scopus 로고
    • Laser-driven physical vapor deposition for thin-film CdTe solar cells
    • Compaan A., and Bhat A. Laser-driven physical vapor deposition for thin-film CdTe solar cells. Int. J. Solar Energy 12 (1992) 155
    • (1992) Int. J. Solar Energy , vol.12 , pp. 155
    • Compaan, A.1    Bhat, A.2
  • 178
    • 0028760781 scopus 로고
    • Atomic nitrogen production in nitrogen-plasma sources used for the growth of ZnSe:N and related alloys by molecular-beam epitaxy
    • Vaudo R.P., Cook Jr. J.W., and Schetzina J.F. Atomic nitrogen production in nitrogen-plasma sources used for the growth of ZnSe:N and related alloys by molecular-beam epitaxy. J. Cryst. Growth 138 (1994) 430
    • (1994) J. Cryst. Growth , vol.138 , pp. 430
    • Vaudo, R.P.1    Cook Jr., J.W.2    Schetzina, J.F.3
  • 181
    • 0002470387 scopus 로고
    • Thin film photovoltaics: Status and applications to space power
    • Florence, Italy
    • Landis, G.A. & Hepp, A.F. Thin film photovoltaics: status and applications to space power. In European Space Power Conf., p. 517. (Florence, Italy, 1991).
    • (1991) European Space Power Conf , pp. 517
    • Landis, G.A.1    Hepp, A.F.2
  • 184
    • 0010474748 scopus 로고
    • 2-based solar cells. 12th NREL Photovoltaic Program Review
    • 2-based solar cells. 12th NREL Photovoltaic Program Review. AIP Conf. Proc. 303 (1994) 59
    • (1994) AIP Conf. Proc. , vol.303 , pp. 59
    • Gabor, A.M.1
  • 187
    • 0346837696 scopus 로고
    • 2 based thin film solar cells in the EUROCIS program. 12th NREL PV Program Review
    • 2 based thin film solar cells in the EUROCIS program. 12th NREL PV Program Review. AIP Conf. Proc. 303 (1994) 67
    • (1994) AIP Conf. Proc. , vol.303 , pp. 67
    • Walter, T.1    Schock, H.W.2
  • 188
    • 77956708158 scopus 로고    scopus 로고
    • NREL's CIGS Cell Establishes New Record 17.7% Conversion Efficiency. Photovoltaic Insider's Report XV, no. 4 (April, 1996).
    • NREL's CIGS Cell Establishes New Record 17.7% Conversion Efficiency. Photovoltaic Insider's Report XV, no. 4 (April, 1996).
  • 189
    • 77956657291 scopus 로고    scopus 로고
    • The author would like to acknowledge R. Noufi and M. Contreras for helpful discussions of current CIGS solar cell fabrication methods and materials problems
    • The author would like to acknowledge R. Noufi and M. Contreras for helpful discussions of current CIGS solar cell fabrication methods and materials problems
  • 217
    • 0023360776 scopus 로고
    • 2-Halbleiter mit Chalcopyritstruktur
    • 2-Halbleiter mit Chalcopyritstruktur. Z. Chem. 27 (1987) 197
    • (1987) Z. Chem. , vol.27 , pp. 197
    • K-hn, G.1    Neumann, H.2
  • 218
    • 0018493027 scopus 로고
    • Electrical properties of p-and n-type CuInSe single crystal
    • Irie T., Endo S., and Kimura S. Electrical properties of p-and n-type CuInSe single crystal. Jpn. J. Appl. Phys. 18 (1979) 1303
    • (1979) Jpn. J. Appl. Phys. , vol.18 , pp. 1303
    • Irie, T.1    Endo, S.2    Kimura, S.3
  • 220
    • 77956660344 scopus 로고    scopus 로고
    • See Möller [24, pp. 300-307], for a more complete discussion of these calculations
    • See Möller [24, pp. 300-307], for a more complete discussion of these calculations
  • 224
    • 0017677758 scopus 로고
    • Transparent conducting coatings
    • Haacke G. Transparent conducting coatings. Ann. Rev. Mater. Sci. 7 (1977) 73
    • (1977) Ann. Rev. Mater. Sci. , vol.7 , pp. 73
    • Haacke, G.1
  • 225
    • 0020135747 scopus 로고
    • Preparation and physical properties of transparent conducting oxide films
    • Jarzebski Z.M. Preparation and physical properties of transparent conducting oxide films. Phys. Status Solidi A71 (1982) 13
    • (1982) Phys. Status Solidi , vol.A71 , pp. 13
    • Jarzebski, Z.M.1
  • 226
    • 0026103327 scopus 로고
    • Solar energy materials: Overview and some examples
    • Granqvist C.G. Solar energy materials: Overview and some examples. Appl. Phys. A52 (1991) 83
    • (1991) Appl. Phys. , vol.A52 , pp. 83
    • Granqvist, C.G.1
  • 229
    • 0003524125 scopus 로고
    • Madelung O. (Ed), Springer-Verlag, Berlin
    • In: Madelung O. (Ed). Landolt-Bernstein New Series 17b (1982), Springer-Verlag, Berlin
    • (1982) Landolt-Bernstein New Series , vol.17 b
  • 230
    • 77956710630 scopus 로고
    • Kaldis E. (Ed), North-Holland, Amsterdam
    • In: Kaldis E. (Ed). Current Topics in Materials Science 7 (1981), North-Holland, Amsterdam
    • (1981) Current Topics in Materials Science , vol.7
  • 231
    • 0029336309 scopus 로고
    • Epitaxial aluminum-doped zinc oxide thin films on sapphire: II. Defect equilibria and electrical properties
    • Srikant V., Sergo V., and Clarke D.R. Epitaxial aluminum-doped zinc oxide thin films on sapphire: II. Defect equilibria and electrical properties. J. Amer. Ceram. Soc. 78 (1995) 1935
    • (1995) J. Amer. Ceram. Soc. , vol.78 , pp. 1935
    • Srikant, V.1    Sergo, V.2    Clarke, D.R.3
  • 232
    • 36549094294 scopus 로고
    • Optical properties of sputter-deposited ZnO:Al thin films
    • Jin Z.C., Hamberg I., and Granqvist C.G. Optical properties of sputter-deposited ZnO:Al thin films. J. Appl. Phys. 64 (1988) 5117
    • (1988) J. Appl. Phys. , vol.64 , pp. 5117
    • Jin, Z.C.1    Hamberg, I.2    Granqvist, C.G.3
  • 233
    • 0001649163 scopus 로고
    • Low-temperature conductivity of ZnO films prepared by chemical vapor deposition
    • Natsume Y., Sakata H., Hirayama T., and Yanagida H. Low-temperature conductivity of ZnO films prepared by chemical vapor deposition. J. Appl. Phys. 72 (1992) 4203
    • (1992) J. Appl. Phys. , vol.72 , pp. 4203
    • Natsume, Y.1    Sakata, H.2    Hirayama, T.3    Yanagida, H.4
  • 234
    • 0019634549 scopus 로고
    • Properties of zinc oxide films prepared by the oxidation of diethyl zinc
    • Roth A.P., and Williams D.F. Properties of zinc oxide films prepared by the oxidation of diethyl zinc. J. Appl. Phys. 52 (1981) 6685
    • (1981) J. Appl. Phys. , vol.52 , pp. 6685
    • Roth, A.P.1    Williams, D.F.2
  • 235
    • 77956657613 scopus 로고    scopus 로고
    • See [128, 129, 227, 228, 234-236, and 247] for references to device applications of ZnO films and their growth by various methods
    • See [128, 129, 227, 228, 234-236, and 247] for references to device applications of ZnO films and their growth by various methods
  • 236
    • 0020830212 scopus 로고
    • Highly oriented ZnO films grown by laser evaporation
    • Sankur H., and Cheung J.T. Highly oriented ZnO films grown by laser evaporation. J. Vac. Sci. Technol. Al (1983) 1806
    • (1983) J. Vac. Sci. Technol. , vol.Al , pp. 1806
    • Sankur, H.1    Cheung, J.T.2
  • 237
    • 0000425018 scopus 로고
    • 2, CdSe, and GaP near threshold laser fluence
    • 2, CdSe, and GaP near threshold laser fluence. Surf. Sci. 133 (1983) 101
    • (1983) Surf. Sci. , vol.133 , pp. 101
    • Nakayama, T.1
  • 238
    • 0029388280 scopus 로고
    • Preparation of c-axis oriented ZnO optical waveguiding films on fused silica by pulsed laser reactive ablation
    • Hu W.S., Liu Z.G., Guo X.L., Lin C., Zhu S.N., and Feng D. Preparation of c-axis oriented ZnO optical waveguiding films on fused silica by pulsed laser reactive ablation. Materials Lett. 25 (1995) 5
    • (1995) Materials Lett. , vol.25 , pp. 5
    • Hu, W.S.1    Liu, Z.G.2    Guo, X.L.3    Lin, C.4    Zhu, S.N.5    Feng, D.6
  • 239
    • 33745280783 scopus 로고
    • Characteristics of high quality ZnO thin films deposited by pulsed laser deposition
    • Craciun V., Elders J., Gardeniers J.G.E., and Boyd I.W. Characteristics of high quality ZnO thin films deposited by pulsed laser deposition. Appl. Phys. Lett. 65 (1994) 2963
    • (1994) Appl. Phys. Lett. , vol.65 , pp. 2963
    • Craciun, V.1    Elders, J.2    Gardeniers, J.G.E.3    Boyd, I.W.4
  • 243
    • 77956710290 scopus 로고
    • U. S. patent no. 5,448,906, Sept. 12
    • Cheung, J.T., U. S. patent no. 5,448,906, Sept. 12, 1995
    • (1995)
    • Cheung, J.T.1
  • 244
    • 77956671755 scopus 로고    scopus 로고
    • Leuchtner, R.E. [7, in press]
    • Leuchtner, R.E. [7, in press]
  • 245
    • 0029336303 scopus 로고
    • Epitaxial aluminum-doped zinc oxide thin films on sapphire: I. Effect of substrate orientation
    • Srikant V., Sergo V., and Clarke D.R. Epitaxial aluminum-doped zinc oxide thin films on sapphire: I. Effect of substrate orientation. J. Amer. Ceram. Soc. 78 (1995) 1931
    • (1995) J. Amer. Ceram. Soc. , vol.78 , pp. 1931
    • Srikant, V.1    Sergo, V.2    Clarke, D.R.3
  • 246
    • 0027662592 scopus 로고
    • Preparation of indium thin oxide films at room temperature by pulsed laser depositon
    • Zheng J.P., and Kwok H.S. Preparation of indium thin oxide films at room temperature by pulsed laser depositon. Thin Solid Films 232 (1993) 99
    • (1993) Thin Solid Films , vol.232 , pp. 99
    • Zheng, J.P.1    Kwok, H.S.2
  • 247
    • 77956693698 scopus 로고
    • Studies of MZS and MZOS structures with zinc oxide deposited by conventional RF diode and magnetron sputtering techniques, J. D. Dow, and I. K. Schuller (eds.)
    • Venkatesh S.N., Ramakrishnan E.S., and Jungling K.C. Studies of MZS and MZOS structures with zinc oxide deposited by conventional RF diode and magnetron sputtering techniques, J. D. Dow, and I. K. Schuller (eds.). Mater. Res. Soc. Symp. Proc. 77 (1987) 289
    • (1987) Mater. Res. Soc. Symp. Proc. , vol.77 , pp. 289
    • Venkatesh, S.N.1    Ramakrishnan, E.S.2    Jungling, K.C.3
  • 248
    • 0028413590 scopus 로고
    • 2 buffer layer by RF planar magnetron sputtering for surface acoustics ware applications
    • 2 buffer layer by RF planar magnetron sputtering for surface acoustics ware applications. J. Cryst. Growth 137 (1994) 319
    • (1994) J. Cryst. Growth , vol.137 , pp. 319
    • Shih, W.-C.1    Wu, M.-S.2
  • 249
    • 4344580546 scopus 로고
    • Surface acoustic wave properties of ZnO films on (001)-cut(110)-propagating GaAs substrates
    • Kim Y., Hunt W.D., Hickernell F.S., and Higgins R.J. Surface acoustic wave properties of ZnO films on (001)-cut(110)-propagating GaAs substrates. J. Appl. Phys. 75 (1994) 7299
    • (1994) J. Appl. Phys. , vol.75 , pp. 7299
    • Kim, Y.1    Hunt, W.D.2    Hickernell, F.S.3    Higgins, R.J.4
  • 250
    • 0346567259 scopus 로고
    • Thin-film induced stress in GaAs ridge-waveguide structure integrated with sputterdeposited ZnO films
    • Kim H.K., Kleemeier W., Li Y., Langer D.W., Cassidy D.T., and Bruce D.M. Thin-film induced stress in GaAs ridge-waveguide structure integrated with sputterdeposited ZnO films. J. Vac. Sci. Technol. B12 (1994) 1328
    • (1994) J. Vac. Sci. Technol. , vol.B12 , pp. 1328
    • Kim, H.K.1    Kleemeier, W.2    Li, Y.3    Langer, D.W.4    Cassidy, D.T.5    Bruce, D.M.6
  • 251
    • 0001459197 scopus 로고
    • Thin-film ZnO-properties and applications
    • Van de Pol F.C.M. Thin-film ZnO-properties and applications. Amer. Ceram. Soc. Bull. 69 (1990) 1959
    • (1990) Amer. Ceram. Soc. Bull. , vol.69 , pp. 1959
    • Van de Pol, F.C.M.1
  • 253
    • 0027662592 scopus 로고
    • Preparation of indium tin oxide films at room temperature by pulsed laser deposition
    • Zheng J.P., and Kwok H.S. Preparation of indium tin oxide films at room temperature by pulsed laser deposition. Thin Solid Films 232 (1993) 99
    • (1993) Thin Solid Films , vol.232 , pp. 99
    • Zheng, J.P.1    Kwok, H.S.2
  • 255
    • 0000177913 scopus 로고
    • Growth of highly oriented tin oxide thin films by laser evaporation deposition
    • Dai C.M., Su C.S., and Chuu D.S. Growth of highly oriented tin oxide thin films by laser evaporation deposition. Appl. Phys. Lett. 57 (1990) 1879
    • (1990) Appl. Phys. Lett. , vol.57 , pp. 1879
    • Dai, C.M.1    Su, C.S.2    Chuu, D.S.3


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