Magnetron Discharges for Thin Films Plasma Processing

Materials Surface Processing by Directed Energy Techniques

Volumn , Issue , 2006, Pages 67-110

  Musil, Jindrich ^a   Vlcek, Jaroslav ^a   Baroch, Pavel ^a  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY MANAGEMENT; ENERGY RESOURCES; MATERIALS;

MAGNETRON DISCHARGES;

MAGNETRONS;

EID: 84903669901     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1016/B978-008044496-3/50004-6     Document Type: Chapter

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