Control of material removal of fused silica with single pulses of few optical cycles to sub-picosecond duration

Applied Physics A: Materials Science and Processing

Volumn 105, Issue 1, 2011, Pages 131-141

  Uteza O ^a   Sanner, N ^a   Chimier, B ^a   Brocas, A ^a   Varkentina, N ^a   Sentis, M ^a   Lassonde, P ^b   Legare F ^b   Kieffer, J C ^b  

^a AIX MARSEILLE UNIVERSITY   (France)

^b INRS EMT   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION EFFICIENCY; COUPLED EVOLUTION; DENSE PLASMA; FLUENCES; HIGH SELECTIVITY; MATERIAL REMOVAL; OPTICAL CYCLES; PULSE DURATIONS; PULSE WIDTH; SINGLE PULSE; SURFACE ABLATION; TWO-REGIME; ULTRA-FAST;

ABLATION; DIELECTRIC MATERIALS; ELECTROMAGNETIC PULSE; GAUSSIAN BEAMS; MORPHOLOGY; STRIPPING (REMOVAL); ULTRASHORT PULSES;

FUSED SILICA;

EID: 80053564279     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-011-6469-y     Document Type: Article

References (43)

1. R. Gattass E. Mazur 2008 Nat. Photonics 2 219 2008NaPho...2..219G 10.1038/nphoton.2008.47
2. S.H. Chung E. Mazur 2009 J. Biophoton. 2 10 557 10.1002/jbio.200910053
3. S. Juodkazis V. Mizeikis H. Mizawa 2009 J. Appl. Phys. 106 051101 2009JAP...106e1101J 10.1063/1.3216462
4. C.R. Phipps (ed.), Laser Ablation and its Applications. Springer Ser. Opt. Sci. (Springer, New York, 2007)
5. A.P. Joglekar H. Liu G.J. Spooner E. Meyhofer G. Mourou A.J. Hunt 2003 Appl. Phys. B 77 25 10.1007/s00340-003-1246-z
6. N. Sanner O. Utéza M. Sentis P. Lassonde F. Légaré J.C. Kieffer 2010 Appl. Phys. Lett. 96 071111 2010ApPhL..96g1111S 10.1063/1.3309700
7. M. Lenzner J. Krüger W. Kautek F. Krausz 1999 Appl. Phys. A 68 369 1999ApPhA..68..369L 10.1007/s003390050906
8. M. Perry B.C. Stuart M.D. Feit A.M. Rubenchik V. Yanovsky 1999 J. Appl. Phys. 85 9 6803 1999JAP....85.6803P 10.1063/1.370197
9. D. Ashkenasi A. Rosenfeld H. Varel M. Wähmer E.E.B. Campbell 1997 Appl. Surf. Sci. 120 65 1997ApSS..120...65A 10.1016/S0169-4332(97)00218-3
10. C.B. Schaffer A. Brodeur J.F. Garcia E. Mazur 2001 Opt. Lett. 26 2 93 2001OptL...26...93S 10.1364/OL.26.000093
11. A. Couairon L. Sudrie M. Franco B. Prade A. Mysyrowicz 2005 Phys. Rev. B 71 125435 2005PhRvB..71l5435C 10.1103/PhysRevB.71.125435 (Pubitemid 40771149)
12. S. Kudryashov G. Mourou A. Joglekar J.F. Herbstman A.J. Hunt 2007 Appl. Phys. Lett. 91 141111 2007ApPhL..91n1111K 10.1063/1.2790741 (Pubitemid 47531465)
13. F. Courvoisier P.-A. Lacourt M. Jacquot M.K. Bhuyan L. Furfaro J.M. Dudley 2009 Opt. Lett. 34 20 3163 2009OptL...34.3163C 10.1364/OL.34.003163
14. S.K. Sundaram E. Mazur 2002 Nat. Mater. 1 4 217 2002NatMa...1..217S 10.1038/nmat767
15. E.G. Gamaly A.V. Rode B. Luther-Davies 2002 Phys. Plasmas 9 3 949 2002PhPl....9..949G 10.1063/1.1447555 (Pubitemid 34561718)
16. A. Kaiser B. Rethfeld M. Vicanek G. Simon 2000 Phys. Rev. B 61 17 11437 2000PhRvB..6111437K 10.1103/PhysRevB.61.11437
17. B.N. Chichkov C. Momma S. Nolte F. Von Alvensleben A. Tünnermann 1996 Appl. Phys. A 63 109 1996ApPhA..63..109C 10.1007/BF01567637
18. L. Hallo A. Bourgeade V.T. Tikhonchuk C. Mezel J. Breil 2007 Phys. Rev. B 76 024101 2007PhRvB..76b4101H 10.1103/PhysRevB.76.024101
19. N.M. Bulgakova I.M. Burakov Yu.P. Meshcheryakov R. Stoian A. Rosenfeld I.V. Hertel 2007 J. Laser Micro Nanoeng. 2 1 76 10.2961/jlmn.2007.01.0014
20. D. Puerto J. Siegel W. Gawelda M. Galvan-Sosa L. Ehrentraut J. Bonse J. Solis 2010 J. Opt. Soc. Am. B 27 5 1065 2010JOSAB..27.1065P 10.1364/JOSAB.27. 001065
21. N. Sanner N. Huot E. Audouard C. Larat J.-P. Huignard 2007 Opt. Lasers Eng. 45 737 10.1016/j.optlaseng.2006.10.009 (Pubitemid 46420466)
22. R. Stoian M. Boyle A. Thoss A. Rosenfeld G. Korn I.V. Hertel 2003 Appl. Phys. A 77 2 265 2003ApPhA..77..265S
23. T. Brixner N.H. Damrauer G. Krampert P. Niklaus G. Gerber 2003 J. Opt. Soc. Am. B, Opt. Phys. 20 5 878 2003JOSAB..20..878B 10.1364/JOSAB.20.000878
24. H. Kawashima M.M. Wefers K.A. Nelson 1995 Annu. Rev. Phys. Chem. 46 627 1995ARPC...46..627K 10.1146/annurev.pc.46.100195.003211
25. Y.V. White X. Li Z. Sikorski L.M. Davies W. Hofmeister 2008 Opt. Express 16 19 14411 2008OExpr..1614411W 10.1364/OE.16.014411
26. F. Madani-Grasset Y. Bellouard 2010 Opt. Express 18 21 21826 2010OExpr..1821826M 10.1364/OE.18.021826
27. Y. Kuroiwa N. Takeshima Y. Narita S. Tanaka K. Hirao 2004 Opt. Express 12 9 1908 2004OExpr..12.1908K 10.1364/OPEX.12.001908
28. M.C. Gower 2000 Opt. Express 7 2 56 2000OExpr...7...56G 10.1364/OE.7.000056
29. N. Sanner O. Utéza B. Bussiere G. Coustillier A. Leray T. Itina M. Sentis 2009 Appl. Phys. A 94 889 2009ApPhA..94..889S 10.1007/s00339-009-5077-6
30. B.C. Stuart M.D. Feit S. Herman A.M. Rubenchik B.W. Shore M.D. Perry 1996 Phys. Rev. B 53 4 1749 1996PhRvB..53.1749S 10.1103/PhysRevB.53.1749
31. T.Q. Jia H.X. Chen M. Huang F.L. Zhao X.X. Li S.Z. Xu H.Y. Sun D.H. Feng C.B. Li X.F. Wang R.X. Li Z.Z. Xu X.K. He H. Kuroda 2006 Phys. Rev. B 73 054105 2006PhRvB..73e4105J 10.1103/PhysRevB.73.054105 (Pubitemid 43270733)
32. A. Couairon A. Mysyrowicz 2007 Phys. Rep. 441 47 2007PhR...441...47C 10.1016/j.physrep.2006.12.005
33. R.W. Boyd, Nonlinear Optics (Academic Press, San Diego, 1992)
34. D.E. Laban W.C. Wallace R.D. Glover R.T. Sang D. Kielpinski 2010 Opt. Lett. 35 10 1653 2010OptL...35.1653L 10.1364/OL.35.001653
35. W. Liu S.L. Chin 2005 Opt. Express 13 15 5750 2005OExpr..13.5750L 10.1364/OPEX.13.005750 (Pubitemid 41121843)
36. A.A. Ionin S.I. Kudryashov L.V. Seleznev D.V. Sinitsyn 2009 JETP Lett. 90 3 181 2009JETPL..90..181I 10.1134/S0021364009150053
37. N. Sanner, O. Utéza, B. Chimier, A. Brocas, N. Varkentina, M. Sentis, P. Lassonde, F. Légaré, J.C. Kieffer, Femtosecond laser damage and ablation of dielectrics: determinism, selectivity and nanometric resolution, in Laser-Induced Damage in Optical Materials, 2010, ed. by G.J. Exarhos, V.E. Gruzdev, J.A. Menapace, D. Ristau, M.J. Soileau. SPIE Proc., vol. 7842 (SPIE, Bellingham, 2010). 78420W
38. O. Utéza, B. Chimier, N. Sanner, M. Sentis, T. Itina, P. Lassonde, F. Légaré, F. Vidal, J.C. Kieffer, About the mechanisms of femtosecond laser damage and ablation of dielectric materials, in CLEO/Europe EQEC 2011, Technical digest, p. 75, 22-26 May, Munich, Germany (2011).
39. A.Q. Wu I.H. Chowdhury X. Xu 2005 Phys. Rev. B 72 085128 2005PhRvB..72h5128W 10.1103/PhysRevB.72.085128 (Pubitemid 43406126)
40. M.D. Feit A.M. Komashko A.M. Rubenchik 2004 Appl. Phys. A 79 1657 2004ApPhA..79.1657F 10.1007/s00339-004-2683-1
41. R. Stoian A. Rosenfeld D. Askhenasi I. Hertel N.M. Bulgakova E.E.B. Campbell 2002 Phys. Rev. Lett. 88 097603 2002PhRvL..88i7603S 10.1103/PhysRevLett.88.097603
42. B. Chimier V.T. Tikhonchuk L. Hallo 2007 Phys. Rev. B 75 195124 2007PhRvB..75s5124C 10.1103/PhysRevB.75.195124
43. A. Ben-Yakar A. Harkin J. Ashmore R.L. Byer H.A. Stone 2007 J. Phys. D, Appl. Phys. 40 1447 2007JPhD...40.1447B 10.1088/0022-3727/40/5/021 (Pubitemid 46485749)