Femtosecond laser ablation of transparent dielectrics: Measurement and modelisation of crater profiles

Applied Surface Science

Volumn 186, Issue 1-4, 2002, Pages 364-368

  Guizard, S ^a,c   Semerok, A ^b   Gaudin, J ^a   Hashida, M ^b   Martin, P ^a   Quere F ^a  

^a LABORATOIRE DES SOLIDES IRRADIÉS   (France)

^b DIF   (France)

^c CENTRE LASERS INTENSES ET APPLICATIONS   (France)

Author keywords

Crater profiles; Femtosecond laser ablation; Transparent dielectrics

Indexed keywords

CORUNDUM; DIELECTRIC MATERIALS; LASER APPLICATIONS; LASER PULSES; MICROMACHINING; RELIABILITY;

FEMTOSECOND LASERS; TRANSPARENT DIELECTRICS;

LASER ABLATION;

EID: 0037185165     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00681-X     Document Type: Conference Paper

References (10)