Dynamics of plasma formation, relaxation, and topography modification induced by femtosecond laser pulses in crystalline and amorphous dielectrics

Journal of the Optical Society of America B: Optical Physics

Volumn 27, Issue 5, 2010, Pages 1065-1076

  Puerto, D ^a   Siegel, J ^a   Gawelda, W ^a   Galvan Sosa, M ^a   Ehrentraut, L ^b   Bonse, J ^c   Solis, J ^a  

^a INSTITUTO DE ÓPTICA   (Spain)

^b MAX BORN INSTITUT   (Germany)

^c BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION; AMORPHOUS MATERIALS; BIOLOGY; CRYSTALLINE MATERIALS; DIELECTRIC MATERIALS; DYNAMICS; ENERGY GAP; MECHANICAL PROPERTIES; MOLTEN MATERIALS; OPTICAL PROPERTIES; PULSED LASER APPLICATIONS; REFLECTION; SAPPHIRE; SILICA; SURFACE PROPERTIES; TOPOGRAPHY; ULTRASHORT PULSES;

ABLATION PROCESS; AMORPHOUS DIELECTRICS; BAND GAPS; CONCENTRIC RING PATTERNS; CRATER DEPTH; CRATER WALL; CRYSTALLINE DIELECTRIC; DRUDE MODELS; ELECTRON DENSITIES; ELECTRON PLASMAS; FEMTOSECOND LASER PULSE; FEMTOSECOND TIME-RESOLVED; FLUENCES; HIGH BANDGAP; HIGH REFLECTIVITY; LASER LIGHTS; MATERIAL SURFACE; NONLINEAR MECHANISMS; OPTICAL DATA; OPTICAL DIFFRACTIONS; PICOSECONDS; PLASMA FORMATIONS; PUMP PULSE; RELAXATION DYNAMICS; SKIN DEPTH; TEMPORAL EVOLUTION; THERMAL AND MECHANICAL PROPERTIES; TIME-RESOLVED; TRANSIENT EVOLUTION; TRANSMISSION IMAGES;

FUSED SILICA;

EID: 77955706098     PISSN: 07403224     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAB.27.001065     Document Type: Article

References (49)

1. A. P. Joglekar, H. Liu, E. Meyhöfer, G. Mourou, and A. J. Hunt, "Optics at critical intensity: applications to nanomorphing," Proc. Natl. Acad. Sci. U.S.A. 101, 5856-5861 (2004).
2. G. Miyaji and K. Miyazaki, "Origin of periodicity in nanostructuring on thin film surfaces ablated with femtosecond laser pulses," Opt. Express 16, 16265-16271 (2008).
3. R. Wagner, J. Gottmann, A. Horn, and E. W. Kreutz, "Subwavelength ripple formation induced by tightly focused femtosecond laser radiation," Appl. Surf. Sci. 252, 8576-8579 (2006).
4. R. S. Taylor, C. Hnatovsky, E. Simova, P. P. Rajeev, D. M. Rayner, and P. B. Corkum, "Femtosecond laser erasing and rewriting of self-organized planar nanocracks in fused silica glass," Opt. Lett. 32, 2888-2890 (2007).
5. M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, "3-D microstructuring inside photosensitive glass by femtosecond laser excitation," Appl. Phys. A 76, 857-860 (2003).
6. S. S. Mao, F. Quéré, S. Guizard, X. Mao, R. E. Russo, G. Petite, and P. Martin, "Dynamics of femtosecond laser interactions with dielectrics," Appl. Phys. A 79, 1695-1709 (2004).
7. F. Watanabe, D. G. Cahill, B. Gundrum, and R. S. Averback, "Ablation of crystalline oxides by infrared femtosecond laser pulses," J. Appl. Phys. 100, 083519 (2006).
8. R. Stoian, D. Ashkenasi, A. Rosenfeld, and E. E. B. Campbell, "Coulomb explosion in ultrashort pulsed laser ablation of Al2O3," Phys. Rev. B 62, 13167-13173 (2000).
9. I. M. Burakov, N. M. Bulgakova, R. Stoian, A. Rosenfeld, and I. V. Hertel, "Theoretical investigations of material modification using temporally shaped femtosecond laser pulses," Appl. Phys. A 81, 1639-1645 (2005).
10. J. Siegel, D. Puerto, W. Gawelda, G. Bachelier, J. Solis, L. Ehrentraut, and J. Bonse, "Plasma formation and structural modification below the visible ablation threshold in fused silica upon femtosecond laser irradiation," Appl. Phys. Lett. 91, 082902 (2007).
11. D. Puerto, W. Gawelda, J. Siegel, J. Bonse, G. Bachelier, and J. Solis, "Transient reflectivity and transmission changes during plasma formation and ablation in fused silica induced by femtosecond laser pulses," Appl. Phys. A 92, 803-808 (2008).
12. A. Ben-Yakar, A. Harkin, J. Ashmore, R. L. Byer, and H. A. Stone, "Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass: the formation of rims by single laser pulses," J. Phys. D 40, 1447-1459 (2007).
13. I. H. Chowdhury, A. Q. Wu, X. Xu, and A. M. Weiner, "Ultra-fast laser absorption and ablation dynamics in wideband- gap dielectrics," Appl. Phys. A 81, 1627-1632 (2005).
14. J. Bonse, G. Bachelier, J. Siegel, and J. Solis, "Time- and space-resolved dynamics of melting, ablation, and solidification phenomena induced by femtosecond laser pulses in germanium," Phys. Rev. B 74, 134106 (2006).
15. K. Sokolowski-Tinten, J. Bialkowski, A. Cavalleri, D. Von Der Linde, A. Oparin, J. Meyer-ter-Vehn, and S. I. Anisimov, "Transient states of matter during short pulse laser ablation," Phys. Rev. Lett. 81, 224-227 (1998).
16. K. Sokolowski-Tinten, J. Bialkowski, A. Cavalleri, M. Boing, H. Schueler, and D. Von Der Linde, "Dynamics of femtosecond laser induced ablation from solid surfaces," Proc. SPIE 3343, 46-58 (1998).
17. D. Von Der Linde and H. Schueler, "Breakdown threshold and plasma formation in femtosecond laser-solid interaction," J. Opt. Soc. Am. B 13, 216-222 (1996).
18. M. C. Downer, R. L. Fork, and C. V. Shank, "Femtosecond imaging of melting and evaporation at a photoexcited silicon surface," J. Opt. Soc. Am. B 2, 595-599 (1985).
19. V. V. Temnov, K. Sokolowski-Tinten, P. Zhou, and D. Von Der Linde, "Ultrafast imaging interferometry at femtosecondlaser- excited surfaces," J. Opt. Soc. Am. B 23, 1954-1964 (2006).
20. H. Varel, D. Ashkenasi, A. Rosenfeld, R. Herrmann, F. Noack, and E. E. B. Campbell, "Laser-induced damage in SiO2 and CaF2 with picosecond and femtosecond laser pulses," Appl. Phys. A 62, 293-294 (1996).
21. L. Sudrie, M. Franco, D. Prade, and A. Mysyrowicz, "Study of damage in fused silica induced by ultra-short IR laser pulses," Opt. Commun. 191, 333-339 (2001). (Pubitemid 32408519)
22. E. T. J. Nibbering, G. Grillon, M. A. Franco, B. S. Prade, and A. Mysyrowicz, "Determination of the inertial contribution to the nonlinear refractive index of air, N2, and O2 by used of unfocused high-intensity femtosecond laser pulses," J. Opt. Soc. Am. B 14, 650-660 (1997).
23. D. Puerto, W. Gawelda, J. Siegel, J. Solis, and J. Bonse, "Erratum: plasma formation and structural modification below the visible ablation threshold in fused silica upon femtosecond laser irradiation," Appl. Phys. Lett. 92, 219901 (2008).
24. A. Rosenfeld, D. Ashkenasi, H. Varel, M. Wähmer, and E. E. B. Campbell, "Time resolved detection of particle removal from dielectrics on femtosecond laser ablation," Appl. Surf. Sci. 127-129, 76-80 (1998).
25. S. W. Winkler, I. M. Burakov, R. Stoian, N. M. Bulgakova, A. Husakou, A. Mermillod-Blondin, A. Rosenfeld, D. Ashkenasi, and I. V. Hertel, "Transient response of dielectric materials exposed to ultrafast laser radiation," Appl. Phys. A 84, 413-422 (2006).
26. J. K. R. Weber, S. Krishnan, C. D. Anderson, and P. C. Nordine, "Liquid silica is a dielectric and not a metal, and therefore only a small reflectivity increase with respect to the solid is expected upon liquefaction," J. Am. Ceram. Soc. 78, 583-587 (1995).
27. B. Rethfeld, "Free-electron generation in laser-irradiated dielectrics," Contrib. Plasma Phys. 47, 360-367 (2007).
28. A. Q. Wu, I. H. Chowdhury, and X. Xu, "Femtosecond laser absorption in fused silica: numerical and experimental investigation," Phys. Rev. B 72, 085128 (2005).
29. M. Born and E. Wolf, Principle of Optics (Pergamon, 1980).
30. C. Quoix, G. Hamoniaux, A. Antonetti, J.-C. Gauthier, J.-P. Geindre, and P. Audebert, "Ultrafast plasma studies by phase and amplitude measurements with femtosecond spectral interferometry," J. Quant. Spectrosc. Radiat. Transf. 65, 455-462 (2000).
31. Different models to estimate the scattering times have been proposed in the literature. Whereas [24,25,37] propose a fixed scattering time, [27,29] establish a relation to the electronic density and the critical electron density. We have decided to follow the second approach.
32. M. D. Feit, A. M. Komashko, and A. M. Rubenchik, "Ultrashort pulse laser interaction with transparent dielectrics," Appl. Phys. A 79, 1657-1661 (2004).
33. R. F. Haglund and R. Kelly, "Electronic processes in sputtering by laser beams," in Fundamental Processes in Sputtering of Atoms and Molecules (SPUT2), P. Sigmund, ed. (Royal Danish Academy of Sciences and Letters, 1993), pp. 527-592.
34. G. Petite, P. Daguzan, S. Guizard, and P. Martin, "Conduction electrons in wide-bandgap oxides: a subpicosecond time-resolved optical study," Nucl. Instrum. Methods Phys. Res. B 107, 97-101 (1996).
35. P. Audebert, P. Daguzan, A. D. Santos, J. C. Gauthier, J. P. Geindre, S. Guizard, G. Hamoniaux, K. Frastev, P. Martin, G. Petite, and A. Antonetti, "Space-time observation of an electron gas in SiO2," Phys. Rev. Lett. 73, 1990-1993 (1994).
36. F. Quéré, S. Guizard, P. Martin, G. Petite, O. Gobert, P. Meynadier, and M. Perdrix, "Ultrafast carrier dynamics in laser-excited materials: subpicosecond optical studies," Appl. Phys. B 68, 459-463 (1999).
37. Q. Sun, H. Jiang, Y. Li, Z. Wu, H. Yang, and Q. Gong, "Measurement of the collision time of dense electronic plasma induced by a femtosecond laser in fused silica," Opt. Lett. 30, 320-322 (2005).
38. B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Nanosecond-to-femtosecond laserinduced breakdown in dielectrics," Phys. Rev. B 53, 1749-1761 (1996).
39. S. Preuss, M. Späth, Y. Zhang, and M. Stuke, "Time resolved dynamics of subpicosecond laser ablation," Appl. Phys. Lett. 62, 3049-3051 (1993).
40. T. Q. Jia, Z. Z. Xu, R. X. Li, H. Feng, X. X. Li, C. F. Cheng, H. Y. Sun, N. S. Xu, and H. Z. Wang, "Mechanisms in fslaser ablation in fused silica," J. Appl. Phys. 95, 5166-5171 (2004).
41. O. Uteza, B. Bussière, F. Canova, J.-P. Chambaret, P. Delaporte, T. Itina, and M. Sentis, "Laser-induced damage threshold of sapphire in nanosecond, picosecond and femtosecond regimes," Appl. Surf. Sci. 254, 799-803 (2007).
42. S. Guizard, A. Semerok, J. Gaudin, M. Hashida, P. Martin, and F. Quéré, "Femtosecond laser ablation of transparent dielectrics: measurement and modelisation of crater profiles," Appl. Surf. Sci. 186, 364-368 (2002).
43. D. R. Lide and H. V. Kehiaian, CRC Handbook of Thermophysical and Thermochemical Data (CRC, 1994).
44. D. Ashkenasi, A. Rosenfeld, H. Varel, M. Wähmer, and E. E. B. Campbell, "Laser processing of sapphire with picosecond and sub-picosecond pulses," Appl. Surf. Sci. 120, 65-80 (1997).
45. R. Wagner and J. Gottmann, "Sub-wavelength ripple formation on various materials induced by tightly focused femtosecond laser radiation," J. Phys.: Conf. Ser. 59, 333-337 (2007).
46. J. M. Liu, "Simple technique for measurements of pulsed Gaussian-beam spot sizes," Opt. Lett. 7, 196-198 (1982).
47. N. Stojanovic, D. Von Der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Förster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Düsterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006).
48. G. Urbain, Y. Bottinga, and P. Richet, "Viscosity of liquid silica, silicates and alumino-silicates," Geochim. Cosmochim. Acta 46, 1061-1072 (1982).
49. G. Urbain, "Viscosite de l'alumine liquide," Rev. Int. Hautes Temp. Refract. 19, 55-57 (1982).