Femtosecond pulsed laser ablation of GaAs

Applied Surface Science

Volumn 221, Issue 1-4, 2004, Pages 364-369

  Trelenberg, T W ^a   Dinh, L N ^a   Saw, C K ^a   Stuart, B C ^a   Balooch, M ^a,b  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Ablation; Femtosecond; GaAs; Gallium arsenide; Laser

Indexed keywords

AMORPHOUS MATERIALS; ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; CRYSTALLINE MATERIALS; LASER PULSES; NANOSTRUCTURED MATERIALS; PHONONS; PULSED LASER DEPOSITION; SAPPHIRE; SCANNING ELECTRON MICROSCOPY; SINGLE CRYSTALS; SOLID STATE LASERS; STOICHIOMETRY; VACUUM; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

BUFFER GAS; NANOCLUSTERS;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0345603135     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00937-1     Document Type: Article

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