Laser chemical processing: An overview to the 30th anniversary

Applied Physics A: Materials Science and Processing

Volumn 101, Issue 2, 2010, Pages 447-459

  Bäuerle, Dieter ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL PROCESSING; LASER CHEMICAL PROCESSING; MATERIAL DEPOSITION; NANOPARTICLE FORMATION; PRESENT STATUS; SURFACE MODIFICATION;

CHEMICAL INDUSTRY;

CHEMICAL VAPOR DEPOSITION;

EID: 78049325374     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-010-5837-3     Document Type: Article

References (184)

1. D. Bäuerle, Laser Processing and Chemistry (Springer, Berlin, 1986) (1996, 2000, 2010)
2. J.C. Miller, R.F. Haglund (eds.), Laser Ablation and Desorption. Experimental Methods in the Physical Science, vol. 30 (Academic Press, San Diego, 1998)
3. N.V. Karlov, N.A. Kirichenko, B.S. Luk'yanchuk, Laser Thermochemistry (Cambridge International Science Publishing, Cambridge, 2000)
4. M. Stuke, G. Chiari, C. Fotakis, M. Menu, G. Padeletti (eds.), Science and technology of cultural heritage materials: art conservation and restoration. Appl. Phys. A 92(1) (2008)
5. B. Luk'yanchuk, S. Juodkazis, T. Lippert (eds.), Laser ablation: fundamentals. Appl. Phys. A 92(4) (2008)
6. K. Sugioka, T. Lippert, C.B. Arnold (eds.), Laser processing. Appl. Phys. A 93(1) (2008)
7. I. Zergioti, D.B. Geohegan, K. Sugioka, T. Lippert (eds.), Lasers in nanoscience, analysis and applications. Appl. Phys. A 93(4) (2008)
8. T. Lippert, F. Garrelie, D.B. Geohegan (eds.), Material growth by pulsed laser deposition. Appl. Phys. A 93(3) (2008)
9. T.F. Deutsch D.J. Ehrlich R.M. Osgood 1979 Appl. Phys. Lett. 35 175 1979ApPhL..35..175D
10. D.J. Ehrlich R.M. Osgood T.F. Deutsch 1980 Appl. Phys. Lett. 36 916 1980ApPhL..36..916E
11. G. Leyendecker D. Bäuerle P. Geittner H. Lydtin 1981 Appl. Phys. Lett. 39 921 1981ApPhL..39..921L
12. D. Bäuerle, Chemical Processing with Lasers. Springer Series in Materials Science (Springer, Berlin, 1986)
13. D. Bäuerle, in Proc. MRS Symp. Laser Diagnostics and Photochemical Processing for Semi-Conductor Devices, ed. by R.M. Osgood et al., Boston, 1982, vol. 17 (Elsevier, Amsterdam, 1983), p. 19
14. W. Kräuter D. Bäuerle F. Fimberger 1983 Appl. Phys. A 31 13 1983ApPhA..31...13K
15. G. Leyendecker H. Noll D. Bäuerle P. Geittner H. Lydtin 1983 J. Electrochem. Soc. 130 157
16. M. Boman, D. Bäuerle, unpublished (1987)
17. F.T. Wallenberger P.C. Nordine M. Boman 1994 Compos. Sci. Technol. 51 193
18. J.L. Maxwell M. Boman R.W. Springer J. Narayan S. Gnanavelu 2006 J. Am. Chem. Soc. 128 4405
19. J. Doppelbauer, D. Bäuerle, in Laser Processing and Diagnostics II, ed. by D. Bäuerle, K.L. Kompa, L.D. Laude (Les Editions de Physique, Les Ulis, 1986), p. 53
20. D. Bäuerle, in Spatial Inhomogeneities and Transient Behaviour in Chemical Kinetics, ed. by P. Gray, G. Nicolis, F. Baras, P. Borckmans, S.K. Scott (Manchester University Press, Manchester, 1990), p. 541
21. H. Westberg M. Boman S. Johansson J. Schweitz 1993 J. Appl. Phys. 73 7864 1993JAP....73.7864W
22. O. Lehmann M. Stuke 1991 Appl. Phys. A 53 343 1991ApPhA..53..343L
23. D. Bäuerle, in Laser Processing and Diagnostics, ed. by D. Bäuerle. Springer Series in Chemical Physics, vol. 39 (Springer, Berlin, 1984), p. 166
24. K. Piglmayer, J. Doppelbauer, D. Bäuerle, in Laser Controlled Chemical Processing of Surfaces, ed. by A.W. Johnson, D.J. Ehrlich, H.R. Schlossberg (North Holland, Amsterdam, 1984), p. 47
25. P.B. Kargl R. Kullmer D. Bäuerle 1993 Appl. Phys. A 57 175 1993ApPhA..57..175K
26. K. Kasuya K. Nagato Y. Jin H. Morii T. Ooi M. Nakao 2007 Jpn. J. Appl. Phys. 46 L333 2007JaJAP..46L.333K
27. S. Chiashi M. Kohno Y. Takata S. Maruyama 2007 J. Phys. Conf. Ser. 59 155 2007JPhCS..59..155C
28. Z. Liu D.J. Styers-Barnett A.A. Puretzky C.M. Rouleau D. Yuan I.N. Ivanov K. Xiao J. Liu D.B. Geohegan 2008 Appl. Phys. A 93 987 2008ApPhA..93..987L
29. T.F. Deutsch, in Laser Proc. and Diagnostics, ed. by D. Bäuerle. Springer Ser. Chem. Phys., vol. 39 (Springer, Berlin, 1984), p. 239
30. D. Eres D.H. Lowndes D.B. Geohegan D.M. Mashburn 1988 Mater. Res. Soc Proc. 101 355
31. M. Meunier J.H. Flint J.S. Haggerty D. Adler 1987 J. Appl. Phys. 62 2812 1987JAP....62.2812M
32. R.J. von Gutfeld, in Laser Proc. and Diagnostics. Springer Ser. Chem. Phys., vol. 39 (Springer, Berlin, 1984), p. 323
33. D. Bäuerle L. Landström J. Kofler N. Arnold K. Piglmayer 2004 Proc. SPIE 5339 20 26 2004SPIE.5339...20B
34. R. Kullmer D. Bäuerle 1987 Appl. Phys. A 43 277
35. M. Müllenborn H. Dirac J.W. Petersen S. Bouwstra 1996 Sens. Actuators A 52 121
36. D.J. Ehrlich 1993 Appl. Surf. Sci. 69 115 1993ApSS...69..115E
37. G. Wysocki J. Heitz D. Bäuerle 2004 Appl. Phys. Lett. 84 2025 2004ApPhL..84.2025W
38. R.J. von Gutfeld R.T. Hodgson 1982 Appl. Phys. Lett. 40 352 1982ApPhL..40..352V
39. D.V. Podlesnik H.H. Gilgen R.M. Osgood 1984 Appl. Phys. Lett. 45 563 1984ApPhL..45..563P
40. F.E. Livingston P.M. Adams H. Helvajian 2007 Appl. Phys. A 89 97
41. D. Brodoceanu, G.D. Cole, N. Kiesel, M. Aspelmeyer, D. Bäuerle, Appl. Phys. Lett. (2010)
42. S. Gigan H.R. Böhm M. Paternostro F. Blaser G. Langer J.B. Hertzberg K.C. Schwab D. Bäuerle M. Aspelmeyer A. Zeilinger 2006 Nature 444 67 2006Natur.444...67G
43. R. Böhme S. Pissadakis M. Ehrhardt T. Rudolph D. Ruthe K. Zimmer 2007 Conf Ser. 59 173
44. Y. Kawaguchi H. Niino T. Sato A. Narazaki R. Kurosaki 2007 J. Phys. Conf. Ser. 59 380 2007JPhCS..59..380K
45. G. Kopitkovas T. Lippert J. Venturini C. David A. Wokaun 2007 J. Phys. Conf. Ser. 59 526 2007JPhCS..59..526K
46. C. Vass K. Osvay B. Hopp Z. Bor 2007 Appl. Phys. A 87 611 2007ApPhA..87..611V
47. D.J. Hwang T. Choi C.P. Grigoropoulos 2004 Appl. Phys. A 79 605 2004ApPhA..79..605H
48. J. Wang H. Niino A. Yabe 1999 Appl. Phys. A 68 111 1999ApPhA..68..111W
49. D. Bäuerle, Laser Processing and Chemistry (Springer, Berlin, 1996)
50. J.M. Vadillo J.J. Laserna 2004 Spectrochim. Acta Part B 59 147 2004AcSpe..59..147V
51. R. Noll V. Sturm Ü. Aydin D. Eilers C. Gehlen M. Höhne A. Lamott J. Makowe J. Vrenegor 2008 Spectrochim. Acta Part B 63 1159 2008AcSpe..63.1159N
52. S.F. Durrant N.I. Ward 2005 J. Anal. At. Spectrom. 20 821
53. J. Ihlemann J. Békési J.-H. Klein-Wiele P. Simon 2008 Laser Chem. 2008 623872 10.1155/2008/623872 6 pp
54. J.D. Pedarnig M. Peruzzi I. Vrejoiu D.G. Matei M. Dinescu D. Bäuerle 2005 Appl. Phys. A 81 339 2005ApPhA..81..339P
55. J.D. Pedarnig M. Peruzzi H. Salhofer R. Schwödiauer W. Reichl J. Runck 2005 Appl. Phys. A 80 1401 2005ApPhA..80.1401P
56. W. Guo Z.B. Wang L. Li D.J. Whitehead B.S. Luk'yanchuk Z. Liu 2007 Appl. Phys. Lett. 90 243101 2007ApPhL..90x3101G
57. M. Eyett D. Bäuerle W. Wersing H. Thomann 1987 J. Appl. Phys. 62 1511 1987JAP....62.1511E
58. J. Heitz X.Z. Wang P. Schwab D. Bäuerle L. Schultz 1990 J. Appl. Phys. 68 2512 1990JAP....68.2512H
59. J. Dou J. Li P.R. Herman J.S. Aitchison T. Fricke-Begemann J. Ihlemann G. Marowsky 2008 Appl. Phys. A 91 591 2008ApPhA..91..591D
60. J. Li J. Dou P.R. Herman T. Fricke-Begemann J. Ihlemann G. Marowsky 2007 J. Phys. Conf. Ser. 59 691 2007JPhCS..59..691L
61. J. Bekesi J. Meinertz J. Ihlemann P. Simon 2008 Appl. Phys. A 93 27 2008ApPhA..93...27B
62. J. Ihlemann S. Müller S. Puschmann D. Schäfer M. Wei J. Li P.R. Herman 2003 Appl. Phys. A 76 751 2003ApPhA..76..751I
63. S. Haas G. Schöpe C. Zahren H. Stiebig 2008 Appl. Phys. A 92 755 2008ApPhA..92..755H
64. W. Pfleging A. Ludwig K. Seemann R. Preu H. Mäckel S.W. Glunz 2000 Appl. Surf. Sci. 154-155 633
65. W. Pfleging, T. Hanemann, M. Torge, W. Bernauer, Proc. Inst. Mech. Eng. J. Mech. Eng. Sci. C 217 (2003), Special issue
66. R. Srinivasan V. Mayne-Banton 1982 Appl. Phys. Lett. 41 576 1982ApPhL..41..576S
67. R. Srinivasan, in Laser Proc. and Diagnostics, ed. by D. Bäuerle. Springer Ser. Chem. Phys., vol. 39 (Springer, Berlin, 1984), p. 343
68. Y. Kawamura K. Toyoda S. Namba 1982 Appl. Phys. Lett. 40 374 1982ApPhL..40..374K
69. S. Küper J. Brannon K. Brannon 1993 Appl. Phys. A 56 43 1993ApPhA..56...43K
70. M. Himmelbauer E. Arenholz D. Bäuerle K. Schilcher 1996 Appl. Phys. A 63 337 1996ApPhA..63..337H
71. K. Piglmayer E. Arenholz C. Ortwein N. Arnold D. Bäuerle 1998 Appl. Phys. Lett. 73 847 1998ApPhL..73..847P
72. D. Bäuerle K. Piglmayer R. Denk N. Arnold 2002 Lambda Phys. Highlights 60 1
73. B. Luk'yanchuk (ed.), Laser Cleaning (World Scientific, Singapore, 2002)
74. D.M. Kane (ed.), Laser Cleaning II (World Scientific, Singapore, 2007)
75. R.E. Russo, X. Mao, in Laser Ablation and Desorption, ed. by J.C. Miller, R.F. Haglund. Exp. Meth. in Phys. Sci., vol. 30 (Academic Press, San Diego, 1998), p. 375
76. G. Isenberg W. Bielser W. Meier-Ruge E. Remy 1976 J. Microsc. 107 19
77. W. Meier-Ruge W. Bielser E. Remy F. Hillenkamp R. Nitsche R. Unsöld 1976 Histochem J. 8 387
78. R. Srinivasan 1986 Science 234 559 1986Sci...234..559S
79. W. Husinsky S. Mitterer G. Grabner I. Baumgartner 1989 Appl. Phys. B 49 463 1989ApPhB..49..463H
80. T.F. Deutsch, in Laser Abl.-Mechan. and Appl, ed. by J.C. Miller, R.F. Haglund. Lecture Notes Phys., vol. 389 (Springer, Berlin, 1991)
81. K. Schütze G. Lahr 1998 Nat. Biotechnol. 16 737
82. M.H. Niemz, Laser-Tissue Interactions-Fundamentals and Applications. Biological and Medical Physics Series (Springer, Berlin, 2002)
83. A. Vogel J. Noack G. Hüttmann G. Paltauf 2007 J. Phys. Conf. Ser. 59 249 2007JPhCS..59..249V
84. N. Bityurin B.S. Luk'yanchuk M.H. Hong T.C. Chong 2003 Chem. Rev. 103 519
85. M. Prasad P.F. Conforti B.J. Garrison 2008 Appl. Phys. A 92 877 2008ApPhA..92..877P
86. S.R. John S.C. Langford J.T. Dickinson 2008 Appl. Phys. A 92 981 2008ApPhA..92..981J
87. A. Ancona F. Röser K. Rademaker J. Limpert S. Nolte A. Tünnermann 2008 Opt. Express 16 8958 2008OExpr..16.8958A
88. S. Zoppel H. Huber G.A. Reider 2007 Appl. Phys. A 89 161 2007ApPhA..89..161Z
89. S. Nolte C. Momma G. Kamlage A. Ostendorf C. Fallnich F. von Alvensleben H. Welling 1999 Appl. Phys. A 68 563 1999ApPhA..68..563N
90. S. Proyer E. Stangl P. Schwab D. Bäuerle P. Simon C. Jordan 1994 Appl. Phys. A 58 471 1994ApPhA..58..471P
91. M. Bonn D.N. Denzler S. Funk M. Wolf S.-S. Wellershoff J. Hohlfeld 2000 Phys. Rev. B 61 1101 2000PhRvB..61.1101B
92. J. Hohlfeld S. Wellershoff J. Güdde U. Conrad V. Jähnke E. Matthias 2000 Chem. Phys. 251 237
93. S.I. Anisimov B.L. Kapeliovich T.L. Perel'man 1974 Sov. Phys. JETP 39 375 1974JETP...39..375A
94. Z. Lin L.V. Zhigilei V. Celli 2008 Phys. Rev. B 77 075133 2008PhRvB..77g5133L
95. Y. Hanada K. Sugioka H. Kawano I. Shihira Ishikawa A. Miyawaki K. Midorikawa 2009 Appl. Surf. Sci. 255 9893 2009ApSS..255.9893H
96. K. Sugioka Y. Cheng K. Midorikawa F. Takase H. Takai 2006 Opt. Lett. 31 208 2006OptL...31..208S
97. K. Sugioka Y. Hanada K. Midorikawa 2007 Appl. Surf. Sci. 253 6595 2007ApSS..253.6595S
98. K. Chen J. Ihlemann P. Simon I. Baumann W. Sohler 1997 Appl. Phys. A 65 517 1997ApPhA..65..517C
99. F. Beinhorn J. Ihlemann P. Simon G. Marowsky B. Maisenhölder J. Edlinger D. Neuschläfer D. Anselmetti 1999 Appl. Surf. Sci. 138-139 107
100. S.M. Eaton H. Zhang P.R. Herman F. Yoshino L. Shah J. Bovatsek A.Y. Arai 2005 Opt. Express 13 4708 2005OExpr..13.4708E
101. X.R. Zhang X. Xu A.M. Rubenchik 2004 Appl. Phys. A 79 945 2004ApPhA..79..945Z
102. J. Krüger W. Kautek M. Lenzner S. Sartania C. Spielmann F. Krausz 1997 Proc. SPIE 2991 40 1997SPIE.2991...40K
103. M. Lenzner J. Krüger S. Sartania Z. Cheng C. Spielmann G. Mourou W. Kautek F. Krausz 1998 Phys. Rev. Lett. 80 4076 1998PhRvL..80.4076L
104. B.C. Stuart M.D. Feit S. Herman A.M. Rubenchik B.W. Shore M.D. Perry 1996 J. Opt. Soc. Am. B 13 459 1996OSAJB..13..459S
105. B. Rethfeld 2006 Phys. Rev. B 73 035101 2006PhRvB..73c5101R
106. N.M. Bulgakova R. Stoian A. Rosenfeld I.V. Hertel W. Marine E.E.B. Campbell 2005 Appl. Phys. A 81 345 2005ApPhA..81..345B
107. L.V. Zhigilei B.J. Garrison 1999 Appl. Phys. A 69 75 1999ApPhA..69S..75Z
108. L.V. Zhigilei 2003 Appl. Phys. A 76 339 2003ApPhA..76..339Z
109. M.B. Agranat S.I. Anisimov S.I. Ashitkov V.V. Zhakhovskii N.A. Inogamov K. Nishihara Yu.V. Petrov V.E. Fortov V.A. Khokhlov 2007 Appl. Surf. Sci. 253 6276 2007ApSS..253.6276A
110. A.K. Upadhyay N.A. Inogamov B. Rethfeld H.M. Urbassek 2008 Phys. Rev. B 78 045437 2008PhRvB..78d5437U
111. D.J. Hwang A. Chimmalgi C.P. Grigoropoulos 2006 J. Appl. Phys. 99 044905 2006JAP....99d4905H
112. M.H. Hong Y. Lin G.X. Chen L.S. Tan Q. Xie B. Luk'yanchuk L.P. Shi T.C. Chong 2007 J. Phys. Conf. Ser. 59 64 2007JPhCS..59...64H
113. J.H. Klein-Wiele P. Simon 2003 Appl. Phys. Lett. 83 4707 2003ApPhL..83.4707K
114. D. Brodoceanu L. Landström D. Bäuerle 2007 Appl. Phys. A 86 313 2007ApPhA..86..313B
115. Y. Zhou M.H. Hong J.Y.H. Fuh L. Lu B.S. Luk'yanchuk Z.B. Wang 2008 J. Alloys Compound. 449 246
116. B. Liu Z. Hu Y. Che Y. Chen X. Pan 2007 Appl. Phys. Lett. 90 044103 2007ApPhL..90d4103L
117. T. Seto K. Koga H. Akinaga F. Takano T. Orii M. Hirasawa 2006 J. Nanopart. Res. 8 371
118. Z. Pászti Z.E. Horváth G. Peto A. Karacs L. Guczi 1997 Appl. Surf. Sci. 109-110 67
119. T. Makino N. Suzuki Y. Yamada T. Yoshida T. Seto N. Aya 1999 Appl. Phys. A 69 Suppl. S243 1999ApPhA..69S.243M
120. D.B. Geohegan A.A. Puretzky G. Duscher S.J. Pennycook 1998 Appl. Phys. Lett. 72 2987 1998ApPhL..72.2987G
121. W. Marine B. Luk'yanchuk M. Sentis 1998 Le VIDE Sci. Tech Appl. 2-4 288 440
122. J. Muramoto Y. Nakata T. Okada M. Maeda 1998 Appl. Surf. Sci. 127-129 373
123. D.H. Lowndes C.M. Rouleau T. Thundat G. Duscher E.A. Kenik S.J. Pennycook 1998 Appl. Surf. Sci. 127-129 355
124. A.A. Puretzky D.J. Styers-Barnett C.M. Rouleau H. Hu B. Zhao I.N. Ivanov D.B. Geogehan 2008 Appl. Phys. A 93 849 2008ApPhA..93..849P
125. N.R. Madsen E.G. Gamaly A.V. Rode B. Luther-Davies 2007 J. Phys. Conf. Ser. 59 762 2007JPhCS..59..762M
126. F. Kokai K. Takahashi D. Kasuya M. Yudasaka S. Iijima 2002 Appl. Surf. Sci. 197-198 650
127. F. Kokai K. Takahashi M. Yudasaka S. Iijima 1999 Appl. Phys. A 69 Suppl. S229 1999ApPhA..69S.229K
128. A.A. Gorbunov R. Friedlein O. Jost M.S. Golden J. Fink W. Pompe 1999 Appl. Phys. A 69 Suppl. S593 1999ApPhA..69S.593G
129. M. Ullmann S.K. Friedlander A. Schmidt-Ott 2002 J. Nanopart. Res. 4 499
130. D.B. Geohegan A.A. Puretzky D.J. Rader 1999 Appl. Phys. Lett. 74 3788 1999ApPhL..74.3788G
131. T. Sasaki S. Terauchi N. Koshizaki H. Umehara 1998 Appl. Surf. Sci. 127-129 398
132. K. Hiromatsu D.J. Hwang C.P. Grigoropoulos 2008 Micro Nano Lett. 3 121
133. J. Heitz J.T. Dickinson 1999 Appl. Phys. A 68 515 1999ApPhA..68..515H
134. J.P. Sylvestre A.V. Kabashin E. Sacher M. Meunier J.H.T. Luong 2004 J. Am. Chem. Soc. 126 7176
135. S. Masai K. Hirata T. Sakka Y.H. Ogata 2007 J. Phys. Conf. Ser. 59 198 2007JPhCS..59..198M
136. N.V. Tarasenko A.V. Butsen A.A. Nevar 2008 Appl. Phys. A 93 837 2008ApPhA..93..837T
137. A. Abdolvand S.Z. Khan Y. Yuan P.L. Crouse M.J.J. Schmidt M. Sharp Z. Liu L. Li 2008 Appl. Phys. A 91 365 2008ApPhA..91..365A
138. N. Takada T. Sasaki K. Sasaki 2008 Appl. Phys. A 93 833 2008ApPhA..93..833T
139. I. Umezu H. Minami H. Senoo A. Sugimura 2007 J. Phys. Conf. Ser. 59 392 2007JPhCS..59..392U
140. N.G. Semaltianos S. Logothetidis W. Perrie S. Romani R.J. Potter M. Sharp P. French G. Dearden K.G. Watkins 2009 Appl. Phys. A 94 641 2009ApPhA..94..641S
141. I. Elaboudi S. Lazare C. Belin D. Talaga C. Labrugère 2008 Appl. Phys. A 93 827 2008ApPhA..93..827E
142. T. Venkatesan X.D. Wu B. Dutta A. Inam M.S. Hedge D.M. Hwang C.C. Chang L. Nazar B. Wilkens 1989 Appl. Phys. Lett. 54 581 1989ApPhL..54..581V
143. R. Rössler J.D. Pedarnig D. Bäuerle E.J. Connolly H.W. Zandbergen 2000 Appl. Phys. A 71 245 2000ApPhA..71..245R
144. W. Markowitsch C. Stockinger W. Lang K. Bierleutgeb J.D. Pedarnig D. Bäuerle 1997 Appl. Phys. Lett. 71 1246 1997ApPhL..71.1246M
145. S.H. Yun J.D. Pedarnig R. Rössler D. Bäuerle X. Obradors 2000 Appl. Phys. Lett. 77 1369 2000ApPhL..77.1369Y
146. H. Richter I. Puica W. Lang M. Peruzzi J.H. Durrell H. Sturm J.D. Pedarnig D. Bäuerle 2006 Phys. Rev. B 73 184506 2006PhRvB..73r4506R
147. J.H. Durrell G. Gibson Z.H. Barber J.E. Evetts R. Rössler J.D. Pedarnig D. Bäuerle 2000 Appl. Phys. Lett. 77 1686 2000ApPhL..77.1686D
148. J.H. Durrell J.E. Evetts R. Rössler M.P. Delamare J.D. Pedarnig D. Bäuerle 2003 Appl. Phys. Lett. 83 4999 2003ApPhL..83.4999D
149. Y.S. Wu Y. Zhao D. Wexler J.H. Kim S.X. Dou 2008 Physica C 468 218 2008PhyC..468..218W
150. H.Y. Zhai H.M. Christen L. Zhang C. Cantoni M. Paranthaman B.C. Sales D.K. Christen D.H. Lowndes 2001 Appl. Phys. Lett. 79 2603 2001ApPhL..79.2603Z
151. K. Iida J. Hänisch R. Hühne F. Kurth M. Kidszun S. Haindl J. Werner L. Schultz B. Holzapfel 2009 Appl. Phys. Lett. 95 192501 2009ApPhL..95s2501I
152. H. Fuji M. Igarashi Y. Hanada T. Miura S. Hanyu K. Kakimoto Y. Iijima T. Saitoh 2008 Physica C 468 1510 2008PhyC..468.1510F
153. R. Eason (ed.), Pulsed Laser Deposition of Thin Films: Applications-Led Growth of Functional Materials (Wiley, New York, 2007)
154. R. Migoni H. Bilz D. Bäuerle 1976 Phys. Rev. Lett. 37 1155 1976PhRvL..37.1155M
155. 3: II. The ferroelectric mode Z. Physik B 38 335 1980ZPhyB..38..335B
156. D.A. Muller N. Nakagawa A. Ohtomo J.L. Grazul H.Y. Hwang 2004 Nature 430 657 2004Natur.430..657M
157. A. Brinkman M. Huijben M. van Zalk J. Huijben U. Zeitler J.C. Maan W.G. van der Wiel G. Rijnders D.H.A. Blank H. Hilgemkamp 2007 Nat. Mater. Lett. 6 493 2007NatMa...6..493B
158. N. Reyren S. Thiel A.D. Caviglia L. Fitting Kourkoutis G. Hammerl C. Richter C.W. Schneider T. Kopp A.-S. Rüetschi D. Jaccard M. Gabay D.A. Muller J.-M. Triscone J. Mannhart 2007 Science 317 1196 2007Sci...317.1196R
159. A.D. Caviglia S. Gariglio N. Reyren D. Jaccard T. Schneider M. Gabay S. Thiel G. Hammerl J. Mannhart J.-M. Triscone 2008 Nature 456 624 2008Natur.456..624C
160. M. Meunier J.-S. Bernier J.-P. Sylvestre A.V. Kabashin 2008 Appl. Surf. Sci. 254 2771 2008ApSS..254.2771M
161. D.J. Late P. Misra B.N. Singh L.M. Kukreja D.S. Joag M.A. More 2009 Appl. Phys. A 95 613 2009ApPhA..95..613L
162. M. Kawasaki A. Ohtomo I. Ohkubo H. Koinuma Z.K. Tang P. Yu G.K.L. Wong B.P. Zhang Y. Segawa 1998 Mater. Sci. Eng. B 56 239
163. K.J. Lethy D. Beena R. Vinod Kumar V.P. Mahadevan Pillai V. Ganesan V. Sathe D.M. Phase 2008 Appl. Phys. A 91 637 2008ApPhA..91..637L
164. J. Gonzalo A. Perea D. Babonneau C.N. Afonso N. Beer J.P. Barnes A.K. Petford-Long D.E. Hole P.D. Townsend 2005 Phys. Rev. B 71 125420 2005PhRvB..71l5420G
165. A. Suarez-Garcia R. del Coso R. Serna J. Solis C.N. Afonso 2003 Appl. Phys. Lett. 83 1842 2003ApPhL..83.1842S
166. J.P. Barnes A.K. Petford-Long R.C. Doole R. Serna J. Gonzalo A. Suarez-Garcia C.N. Afonso D. Hole 2002 Nanotechnology 13 465 2002Nanot..13..465B
167. K. Siraj J.D. Pedarnig A. Moser D. Bäuerle N. Hari Babu D.A. Cardwell 2008 Europhys. Lett. 82 57006 2008EL.....8257006S
168. J. Röder J. Faupel H.-U. Krebs 2008 Appl. Phys. A 93 863 2008ApPhA..93..863R
169. J. Margueritat J. Gonzalo C.N. Afonso U. Hörmann G. Van Tendeloo A. Mlayah D.B. Murray L. Saviot Y. Zhou M.H. Hong B.S. Luk'yanchuk 2008 Nanotechnology 19 375701
170. G.B. Blanchet 1996 J. Appl. Phys. 80 4082 1996JAP....80.4082B
171. H.Y. Kwong M.H. Wong Y.W. Hong K.H. Wong 2007 Appl. Surf. Sci. 253 8841 2007ApSS..253.8841K
172. S.T. Li E. Arenholz J. Heitz D. Bäuerle 1998 Appl. Surf. Sci. 125 17 1998ApSS..125...17L
173. R. Schwödiauer S. Bauer-Gogonea S. Bauer J. Heitz E. Arenholz D. Bäuerle 1998 Appl. Phys. Lett. 73 2941 1998ApPhL..73.2941S
174. B. Hopp T. Smausz G. Kecskeméti A. Klini Zs. Bor 2007 Appl. Surf. Sci. 253 7806 2007ApSS..253.7806H
175. R.F. Haglund S.L. Johnson H.K. Park 2007 J. Laser Micro/Nanoeng. 2 234
176. N.L. Dygert A.P. Gies K.E. Schriver R.F. Haglund 2007 Appl. Phys. A 89 481 2007ApPhA..89..481D
177. J. Burghoff S. Nolte A. Tünnermann 2007 Appl. Phys. A 89 127 2007ApPhA..89..127B
178. A. Szameit F. Dreisow M. Heinrich T. Pertsch S. Nolte A. Tünnermann E. Suran F. Louradour A. Barthelemy S. Longhi 2008 Appl. Phys. Lett. 93 181109 2008ApPhL..93r1109S
179. S. Nolte M. Will J. Burghoff A. Tuennermann 2003 Appl. Phys. A 77 109 2003ApPhA..77..109N
180. M. Olbrich E. Rebollar J. Heitz I. Frischauf C. Romanin 2008 Appl. Phys. Lett. 92 013901 2008ApPhL..92a3901O
181. T. Gumpenberger J. Heitz D. Bäuerle H. Kahr I. Graz C. Romanin V. Svorcik F. Leisch 2003 Biomaterials 24 5139
182. Y. Hanada K. Sugioka H. Kawano T. Tsuchimoto I. Miyamoto A. Miyawaki K. Midorikawa 2009 Appl. Surf. Sci. 255 9885 2009ApSS..255.9885H
183. B. Hopp T. Smausz B. Papdi Z. Bor A. Szabó L. Kolozsvári C. Fotakis A. Nógrádi 2008 Appl. Phys. A 93 45 2008ApPhA..93...45H
184. W. Pfleging M. Bruns A. Welle S. Wilson 2007 Appl. Surf. Sci. 253 9177 2007ApSS..253.9177P