Physical aspects of the pulsed laser deposition technique: The stoichiometric transfer of material from target to film

Applied Surface Science

Volumn 255, Issue 10, 2009, Pages 5191-5198

  Schou, J ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Ion bombardment; Laser plasma; PLD; Plume expansion; Pulsed laser deposition; Sputtering; Stoichiometry

Indexed keywords

ATOM LASERS; FILM GROWTH; ION BOMBARDMENT; LASER PRODUCED PLASMAS; LIGHT ABSORPTION; PLASMA INTERACTIONS; PULSED LASER DEPOSITION; SPUTTERING; STOICHIOMETRY;

FLOW OF MATERIAL; LASER PLASMA; PHYSICAL ASPECTS; PLUME EXPANSION; PREFERENTIAL DIFFUSION; PULSED-LASER DEPOSITION TECHNIQUE; STOICHIOMETRIC FILMS; STOICHIOMETRIC TRANSFER;

PULSED LASERS;

EID: 61349164806     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.10.101     Document Type: Article

References (80)

1. In: Eason R. (Ed). Pulsed Laser Deposition of Thin Films (2007), Wiley, Hoboken
2. Laser ablation desorption. In: Miller J.C., and Haglund R.F. (Eds). Experimental Methods in the Physical Sciences vol. 30 (1998), Academic Press, New York
3. Schou J. In: Pauleau Y. (Ed). Materials Surface Processing by Directed Energy Techniques (2006), Elsevier, Amsterdam 35
4. G.K. Hubler (Ed.), Materials Research Bulletin, vol. XVII, No. 2, February, 1992.
5. Von Almen M., and Blatter A. Laser-Beam Interactions with Materials: Physical Principles and Applications (1995), Springer, Berlin-Heidelberg
6. Dijkkamp D., Venkatesan T., Wu X.D., Shaheen S.A., Jisrawi N., Min-Lee Y.H., McLean W.L., and Croft M. Appl. Phys. Lett. 51 (1987) 619
7. Venkatesan T., Wu X.D., Inam A., and Watchman J.B. Appl. Phys. Lett. 52 (1988) 1193
8. Cheung J.T., Cirlin E.-H., and Otsuka N. Appl. Phys. Lett. 53 (1988) 53
9. Chrisey D.B., and Hubler G.K. Pulsed Laser Deposition (1994), John Wiley, New York
10. Bäuerle D. Laser Processing and Chemistry. 3rd ed. (2000), Springer, Berlin
11. van de Riet E., Kools J.C.S., and Dieleman J. J. Appl. Phys. 73 (1993) 8290
12. Arnold C.B., and Aziz M.J. Appl. Phys. A 69 (1999) S23
13. Ohkoshi M., Yoshitake T., and Tsushima K. Appl. Phys. Lett. 64 (1994) 3340
14. Rijnders G.J.H.M., Koster G., Blank D.H.A., and Rogallah H. Appl. Phys. Lett. 70 (1997) 1888
15. Rijnders G., and Blank D.H.A. In: Eason R. (Ed). Pulsed Laser Deposition of Thin Films (2007), Wiley, Hoboken 177
16. Willmott P.R., and Huber J.R. Rev. Mod. Phys. 72 (2000) 315
17. Schou J., Amoruso S., and Lunney J.G. In: Phipps C.R. (Ed). Laser Ablation and its Applications (2007), Springer 67
18. Lowndes D.H. Laser ablation and desorption. In: Miller J.C., and Haglund R.F. (Eds). Experimental Methods in the Physical Sciences vol. 30 (1998), Academic Press, New York 475
19. Vestentoft K., and Balling P. Appl. Phys. A 84 (2006) 207
20. Lin Z., and Zhigilei L.V. Appl. Surf. Sci. 253 (2007) 6295
21. Zel'dovich Y.B., and Raizer Y.P. Physics of Shock Waves and High-Temperature Hydrodynamic Phenomena (2001), Dover, Mineola, New York
22. Amoruso S. Appl. Phys. A 69 (1999) 323
23. Lunney J.G., and Jordan R. Appl. Surf. Sci. 127-129 (1998) 941
24. Itina T.E., Hermann J., Delaporte P., and Sentis M. Phys. Rev. E 66 (2002) 066406
25. Geohegan D.B., and Puretzky A.A. Appl. Phys. Lett. 67 (1995) 197
26. Amoruso S., Sambri A., and Wang X. J. Appl. Phys. 100 (2006) 013302
27. Siegel J., Epurescu G., Perea A., Gordillo-Vazquez F.J., Gonzaloand J., and Afonso C.N. Opt. Lett. 29 (2004) 2228
28. Amoruso S., Bruzzese R., Spinelli N., Velotta R., Vitiello M., and Wang X. Phys. Rev. B 67 (2003) 224503
29. Amoruso S., Toftmann B., and Schou J. Phys. Rev. E 69 (2004) 056403
30. Lee H.C., Zeitoun D.E., Parisse J.D., Sentis M., and Marine W. Phys. Rev. E 62 (2000) 4152
31. Nakata Y., Kumuduni W.K.A., Okada T., and Maeda M. Appl. Phys. Lett. 64 (1994) 2599
32. Warrender J.M., and Aziz M.J. Phys. Rev. B 75 (2007) 085433
33. Ohkubo I., Matsumoto Y., Ueno K., Chikyow T., Kawasaki M., and Koinuma H. J. Crystal Growth 247 (2003) 105
34. Pervolaraki M., Giapintzakis J., Saint-Martin R., and Revcolevschi A. Appl. Surf. Sci. 255 (2009) 5236
35. Gamaly E.G., Rode A.V., Luther-Davies B., and Tikhonchuk V.T. Phys. Plasmas 9 (2002) 949
36. Reichling M. Laser ablation and desorption. In: Miller J.C., and Haglund R.F. (Eds). Experimental Methods in the Physical Sciences vol. 30 (1998), Academic Press, New York 573
37. Rethfeld B. Phys. Rev. B 73 (2006) 035101
38. Matthias E., Reichling M., Siegel J., Käding O.W., Petzoldt S., Skurk H., Bizenberger P., and Neske E. Appl. Phys. A 58 (1994) 129
39. Thestrup B., Thestrup B., Toftmann B., Schou J., Doggett B., and Lunney J.G. Appl. Surf. Sci. 197-198 (2002) 175
40. Betz G., and Wehner G.K. In: Behrisch R. (Ed). Sputtering by Particle Bombardment II (1983), Springer, Berlin-Heidelberg 11
41. Schou J. In: Vaseashta A., and Mihailescu I.N. (Eds). Functionalized Nanoscale Materials, Devices and Systems (2008), Springer 241
42. Amoruso S., Schou J., and Lunney J.G. Appl. Phys. A 92 (2008) 907
43. Anisimov S.I., Bäuerle D., and Luk'yanchuk B.S. Phys. Rev. B 48 (1993) 12076
44. Singh R.K., and Narayan J. Phys. Rev. B 41 (1990) 8843
45. Thestrup B., Toftmann B., Schou J., Doggett B., and Lunney J.G. Appl. Surf. Sci. 208-209 (2003) 33
46. Urbassek H.M., and Sibold D. Phys. Rev. Lett. 70 (1993) 1886
47. Arnold N., Gruber J., and Heitz J. Appl. Phys. A 69 (1999) S87
48. Nakata Y., Kaibara H., Okada T., and Maeda M. J. Appl. Phys. 80 (1996) 2460
49. Predtechensky M.R., and Mayorov A.P. Appl. Supercond. 1 (1993) 2011
50. Strikovski M., and Miller Jr. J.H. Appl. Phys. Lett. 73 (1998) 1733
51. Amoruso S., Toftmann B., and Schou J. Appl. Surf. Sci. 248 (2005) 323
52. Amoruso S., Schou J., and Lunney J.G. Europhys. Lett. 76 (2006) 436
53. Wood R.F., Chen K.R., Leboeuf J.N., Puretzky A.A., and Geohegan D.B. Phys. Rev. Lett. 79 (1997) 1571
54. Gonzalo J., Afonso C.N., and Perrière J. J. Appl. Phys. 79 (1996) 8042
55. Itina T.E. Nucl. Instrum. Method B 180 (2001) 112
56. Itina T.E., Marine W., and Autric M. J. Appl. Phys. 82 (1997) 3536
57. Carslaw H.S., and Jaeger J.C. Conduction of Heat in Solids (1959), Clarendon Press, Oxford p. 1
58. Smith D.L. Thin Film Deposition-Principles and Practice (1994), McGraw-Hill, New York p. 119
59. Warrender J.M., and Aziz M.J. Phys. Rev. B 76 (2007) 045414
60. Rauchbauer G., Buchsbaum A., Schiechl H., Varga P., Schmid M., and Biedermann A. Surf. Sci. 602 (2008) 1589
61. Eckstein W., and Veerbek H. Data Compendium for Plasma-Surface Interactions (1984), International Atomic Energy Agency, Vienna p. 12
62. Weller M.R., Hubbard K.M., Weathers D.L., and Tombrello T.A. Nucl. Instrum. Method B 42 (1989) 19
63. Kondoh K., Suwa M., and Morita K. Nucl. Instrum. Method B 78 (1993) 68
64. Gonzalo J., Siegel J., Perea A., Puerto D., Resta V., Galvan-Sosa M., and Afonso C.N. Phys. Rev. B 76 (2007) 035435
65. Jordan R., Cole D., Lunney J.G., Mackay K., and Givord D. Appl. Surf. Sci. 86 (1995) 24
66. Fähler S., Sturm K., and Krebs H.-U. Appl. Phys. Lett. 75 (1999) 3766
67. Hansen T.N., Schou J., and Lunney J.G. Appl. Phys. Lett. 72 (1998) 1829
68. Andersen H.H., and Bay H.L. In: Behrisch R. (Ed). Sputtering by Particle Bombardment I (1981), Springer, Berlin-Heidelberg 145
69. In: Behrisch R., and Eckstein W. (Eds). Sputtering by Particle Bombardment (2007), Springer, Berlin-Heidelberg
70. Sigmund P. In: Behrisch R. (Ed). Sputtering by Particle Bombardment I (1981), Springer, Berlin-Heidelberg 9
71. J.F. Ziegler, "SRIM", 2006 (www.srim.org).
72. J. Lindhard, V. Nielsen, M. Scharff, Mat. Fys. Medd. Dan. Vid. Selsk. 35, 10 (1968). Available at: http://www.sdu.dk/Bibliotek/E-hotel/MatFys.aspx?sc_lang=en.
73. Wilson W.D., Haggmark L.G., and Biersack J.P. Phys. Rev. B 15 (1977) 2458
74. P. Sigmund, N.Q. Lam, Mat. Fys. Medd. Dan. Vid. Selsk. 43 (1993) 255. Available at: http://www.sdu.dk/Bibliotek/E-hotel/MatFys.aspx?sc_lang=en.
75. O'Mahony D., Lunney J., Dumont T., Canulescu S., Lippert T., and Wokaun A. Appl. Surf. Sci. 254 (2007) 811
76. Barnes J.-P., Petford-Long A.K., Serna R., and Suarez-Garcia A. J. Appl. Phys. 93 (2003) 6396
77. Suárez-García A., Barnes J.-P., Serna R., Petford-Long A.K., Afonso C.N., and Hole D. Mater. Res. Soc., Symp. Proc. 780 (2003) p. Y1.2.1
78. Fähler S., Kahl S., Weisheit M., Sturm K., and Krebs H.-U. Appl. Surf. Sci. 154-155 (2000) 419
79. Sigmund P. Eur. Phys. J.D. 47 (2008) 45
80. Perez D., and Lewis L.J. Phys. Rev. B 67 (2003) 184102