The Microscope in a Computer: Image Synthesis from Three-Dimensional Full-Vector Solutions of Maxwell's Equations at the Nanometer Scale

Progress in Optics

Volumn 57, Issue , 2012, Pages 1-91

  Çapoĝlu, Ilker R ^a   Rogers, Jeremy D ^a   Taflove, Allen ^a   Backman, Vadim ^a  

^a Northwestern University   (United States)

Author keywords

Biomedical optical imaging; FDTD methods; Finite element methods; Inspection; Integral equations; Metrology; Optical microscopy; Photolithography

Indexed keywords

EID: 84864323688     PISSN: 00796638     EISSN: None     Source Type: Book Series    
DOI: 10.1016/B978-0-44-459422-8.00001-1     Document Type: Chapter

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