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Volumn 19, Issue 5, 2002, Pages 858-870

Assessment of an extended Nijboer-Zernike approach for the computation of optical point-spread functions

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; BESSEL FUNCTIONS; CALIBRATION; INTEGRATION; LIGHTING;

EID: 0042154225     PISSN: 10847529     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAA.19.000858     Document Type: Article
Times cited : (97)

References (10)
  • 2
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    • Electromagnetic diffraction in optical systems. II. Structure of the image field in an aplanatic system
    • B. Richards and B. Wolf, "Electromagnetic diffraction in optical systems. II. Structure of the image field in an aplanatic system," Proc. R. Soc. London Ser. A 253, 358-379 (1959).
    • (1959) Proc. R. Soc. London Ser. A , vol.253 , pp. 358-379
    • Richards, B.1    Wolf, B.2
  • 3
    • 0043089160 scopus 로고
    • Ph.D. dissertation (University of Groningen, Groningen, The Netherlands)
    • B. R. A. Nijboer, "The diffraction theory of aberrations," Ph.D. dissertation (University of Groningen, Groningen, The Netherlands, 1942).
    • (1942) The Diffraction Theory of Aberrations
    • Nijboer, B.R.A.1
  • 4
    • 0041653308 scopus 로고    scopus 로고
    • Extended Nijboer-Zernike approach for the computation of optical point-spread functions
    • A. J. E. M. Janssen, "Extended Nijboer-Zernike approach for the computation of optical point-spread functions," J. Opt. Soc. Am. A 19, 849-857 (2002).
    • (2002) J. Opt. Soc. Am. A , vol.19 , pp. 849-857
    • Janssen, A.J.E.M.1
  • 5
    • 84894003201 scopus 로고    scopus 로고
    • SOLID-C, a software product (release 5.6.2) (SIGMA-C GmbH, Thomas-Dehlerstrasze 9, D-81737 Munich, Germany)
    • SOLID-C, a software product (release 5.6.2) (SIGMA-C GmbH, Thomas-Dehlerstrasze 9, D-81737 Munich, Germany).
  • 7
    • 0019011060 scopus 로고
    • Wave-front interpretation with Zernike polynomials
    • J. Y. Wang and D. E. Silva, "Wave-front interpretation with Zernike polynomials," Appl. Opt. 19, 1510-1518 (1980).
    • (1980) Appl. Opt. , vol.19 , pp. 1510-1518
    • Wang, J.Y.1    Silva, D.E.2
  • 8
    • 0028742976 scopus 로고
    • Zernike circle polynomials and optical aberrations of systems with circular pupils
    • V. N. Mahajan, "Zernike circle polynomials and optical aberrations of systems with circular pupils," Appl. Opt. 33, 8121-8124 (1994).
    • (1994) Appl. Opt. , vol.33 , pp. 8121-8124
    • Mahajan, V.N.1
  • 9
    • 0033683744 scopus 로고    scopus 로고
    • Zernike coefficients, are they really enough?
    • Optical Microlithography XIII, C. J. Progler, ed.
    • C. J. Progler and A. K. Wong, "Zernike coefficients, are they really enough?" in Optical Microlithography XIII, C. J. Progler, ed., Proc. SPIE 4000, 40-52 (2000).
    • (2000) Proc. SPIE , vol.4000 , pp. 40-52
    • Progler, C.J.1    Wong, A.K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.