Analysis and simulation of diffractive imaging field in thick film photoresist by using angular spectrum theory

Optics Communications

Volumn 244, Issue 1-6, 2005, Pages 123-130

  Tang, Xionggui ^a   Gao, Fuhua ^a   Guo, Yongkang ^a   Du, Jinglei ^a   Liu, Shijie ^a   Guo, Feng ^a  

^a SICHUAN UNIVERSITY   (China)

Author keywords

Angular spectrum theory; Diffractive optics; FFT algorithm; Lithography; Optical transfer function; Thick film photoresist

Indexed keywords

ALGORITHMS; DIFFRACTIVE OPTICS; FAST FOURIER TRANSFORMS; IMAGING TECHNIQUES; LITHOGRAPHY; OPTICAL TRANSFER FUNCTION; PERMITTIVITY; PHOTORESISTS;

ANGULAR SPECTRUM THEORY; DIFFRACTIVE IMAGING FIELDS; FFT ALGORITHM; THICK FILM PHOTORESISTS;

THICK FILMS;

EID: 10844263237     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optcom.2004.09.069     Document Type: Article

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