Rigorous coupled-wave analysis of multilayered grating structures

Journal of Lightwave Technology

Volumn 22, Issue 10, 2004, Pages 2359-2363

  Lee, Wook ^a   Degertekin, F Levent ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; EIGENVALUES AND EIGENFUNCTIONS; LIGHT POLARIZATION; LIGHT PROPAGATION; MATHEMATICAL MODELS; MATRIX ALGEBRA; MAXWELL EQUATIONS; OPTICAL SENSORS;

MULTILAYERED GRATING STRUCTURES; OPTOACOUSTIC SENSORS; PHASE SENSITIVE DIFFRACTION GRATING; RIGOROUS COUPLED WAVE ANALYSIS; TRANSVERSE ELECTRIC MODE; TRANSVERSE MAGNETIC MODE;

DIFFRACTION GRATINGS;

EID: 7244248463     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2004.833278     Document Type: Article

References (14)

1. O. Solgaard, F. S. A. Sandejas, and D. M. Bloom, "Deformable grating optical modulator," Opt. Lett., vol. 17, pp. 688-690, 1992.
2. Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, "Optomechanical uncooled infrared imaging system: Design, microfabrication, and performance," J. Microelectromech. Syst., vol. 11, pp. 136-146, 2002.
3. G. G. Yaralioglu, A. Atalar, S. R. Manalis, and C. F. Quate, " Analysis and design of an interdigital cantilever as a displacement sensor," J. Appl. Phys., vol. 83, pp. 7405-7415, 1998.
4. W. Lee, N. A. Hall, and F. L. Degertekin, "Micromachined acoustic sensor array with diffraction-based optical interferometric detection," in Proc. 2003 SPIE Symp. MOEMS Display and Imaging Systems, vol. 4985, 2003, pp. 140-151.
5. M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, " Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings," J. Opt. Soc. Amer. A, vol. 12, pp. 1068-1076, 1995.
6. M. G. Moharam, D. A. Pommet, E. B. Grann, and T. K. Gaylord, "Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach," J. Opt. Soc. Amer. A, vol. 12, pp. 1077-1086, 1995.
7. D. W. Carr, J. P. Sullivan, and T. A. Friedmann, "Lateral deformable nanomechanical zero-order gratings: anomalous diffraction studied by rigorous coupled-wave analysis," Opt. Lett., vol. 28, pp. 1636-1638, 2003.
8. W. Lee and F. L. Degertekin, "Rigorous coupled-wave analysis for multilayered grating structures," in Proc. 2003 Symp. Integrated Optics: Devices, Materials, and Technologies VII, vol. 4987, 2003, pp. 264-273.
9. N. A. Hall and F. L. Degertekin, "Integrated optical interferometric detection method for miromachined capacitive acoustic transducers," Appl. Phys. Lett., vol. 80, pp. 3859-3861, 2002.
10. G. Granet and B. Guizal, "Efficient implementation of the coupled-wave method for metallic lamellar gratings in TM polarization," J. Opt. Soc. Amer. A, vol. 13, pp. 1019-1023, 1996.
11. P. Yeh, Optical Waves in Layered Media. New York: Wiley, 1988.
12. L. Li, "Formulation and comparison of two recursive matrix algorithms for modeling layered diffraction gratings," J. Opt. Soc. Amer. A, vol. 13, pp. 1024-1035, 1996.
13. C. F. R. Mateus, M. C. Y. Huang, Y. Deng, A. R. Neureuther, and C. J. Chang-Hasnain, "Ultrabroadband mirror using low-index cladded subwavelength grating," IEEE Photon. Technol. Lett., vol. 16, pp. 518-520, 2004.
14. M. G. Moharam, T. K. Gaylord, G. T. Sincerbox, H. Werlich, and B. Yung, "Diffraction characteristics of photoresist surface-relief gratings," Appl. Opt., vol. 23, pp. 3214-3220, 1984.