Extended Nijboer-Zernike approach to aberration and birefringence retrieval in a high-numerical-aperture optical system

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 22, Issue 12, 2005, Pages 2635-2650

  Braat, Joseph J M ^a   Dirksen, Peter ^b   Janssen, Augustus J E M ^b   van Haver, Sven ^a   van de Nes, Arthur S ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; BIREFRINGENCE; LIGHT POLARIZATION; OPTICAL SYSTEMS; OPTICAL TRANSFER FUNCTION; POLYNOMIALS;

EXTENDED NIJBOER-ZERNIKE APPROACH; HIGH NUMERICAL APERTURE OPTICAL SYSTEM; ZERNIKE POLYNOMIALS;

IMAGING SYSTEMS;

ALGORITHM; ARTICLE; ARTIFACT; BIREFRINGENCE; COMPUTER ASSISTED DIAGNOSIS; EVALUATION; IMAGE ENHANCEMENT; METHODOLOGY; OPTICS; REFRACTOMETRY;

ALGORITHMS; ARTIFACTS; BIREFRINGENCE; IMAGE ENHANCEMENT; IMAGE INTERPRETATION, COMPUTER-ASSISTED; OPTICS; REFRACTOMETRY;

EID: 30844445421     PISSN: 10847529     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAA.22.002635     Document Type: Article

References (38)

1. D. Malacara, Optical Shop Testing, 2nd ed. (Wiley, 1992).
2. R. W. Gerchberg and W. O. Saxton, "Phase determination from image and diffraction plane pictures in electron-microscope," Optik (Stuttgart) 34, 277-286 (1971).
3. R. W. Gerchberg and W. O. Saxton, "Practical algorithm for determination of phase from image and diffraction pictures," Optik (Stuttgart) 35, 237-246 (1972).
4. B. R. Frieden, "Restoring with maximum likelihood and maximum entropy," J. Opt. Soc. Am. 62, 511-518 (1972).
5. W. H. Richardson, "Bayesian-based iterative method of image restoration," J. Opt. Soc. Am. 62, 55-59 (1972).
6. J. R. Fienup, "Phase retrieval algorithms - a comparison," Appl. Opt. 21, 2758-2769 (1982).
7. J. R. Fienup, J. C. Marron, T. J. Schultz, and J. H. Seldin, "Hubble space telescope characterized by using phase-retrieval algorithms," Appl. Opt. 32, 1747-1767 (1993).
8. J. G. Walker, "The phase retrieval problem - a solution based on zero location by exponential apodization," Opt. Acta 28, 735-738 (1981).
9. R. A. Gonsalves, "Phase retrieval and diversity in adaptive optics," Opt. Eng. (Bellingham) 21, 829-832 (1982).
10. J. R. Fienup, "Phase retrieval for undersampled broadband images," J. Opt. Soc. Am. A 16, 1831-1837 (1999).
11. D. Van Dyck and W. Coene, "A new procedure for wavefunction restoration in high-resolution electron-microscopy," Optik (Stuttgart) 77, 125-128 (1987).
12. B. R. Frieden and C. Oh, "Multiple filter approach to phase retrieval from modulus data," Appl. Opt. 31, 1103-1108 (1992).
13. E. S. Angel and A. K. Jain, "Restoration of images degraded by spatially varying point-spread functions by a conjugate gradient method," Appl. Opt. 17, 2186-2190 (1978).
14. R. Barakat and B. H. Sandler, "Determination of the wavefront aberration function from measured values of the point-spread function - a 2-dimensional phase retrieval problem (least-squares method)," J. Opt. Soc. Am. A 9, 1715-1723 (1992).
15. I. Iglesias, "Parametric wave-aberration retrieval from point-spread function data by use of pyramidal recursive algorithm," Appl. Opt. 37, 5427-5430 (1998).
16. B. M. Hanser, M. G. L. Gustafsson, D. A. Agrad, and J. W. Sedat, "Phase retrieval for high-numerical-aperture optical systems," Opt. Lett. 28, 801-803 (2003).
17. J. Wesner, J. Heil, and T. Sure, "Reconstructing the pupil function of microscope objectives from the intensity PSF," in Current Developments in Lens Design and Optical Engineering III, R. E. Fischer, W. J. Smith, and R. B. Johnson, eds., Proc. SPIE 4767, 32-43 (2003).
18. P. Dirksen, J. J. M. Braat, A. J. E. M. Janssen, and C. Juffermans, "Aberration retrieval using the extended Nijboer-Zernike approach," J. Microlithogr., Microfabr., Microsyst. 2, 61-68 (2003).
19. A. J. E. M. Janssen, "Extended Nijboer-Zernike approach for the computation of optical point-spread functions," J. Opt. Soc. Am. A 19, 849-857 (2002).
20. J. J. M. Braat, P. Dirksen, and A. J. E. M. Janssen, "Assessment of an extended Nijboer-Zernike approach for the computation of optical point-spread functions," J. Opt. Soc. Am. A 19, 858-870 (2002).
21. W. Ignatowsky, "Diffraction by a lens of arbitrary aperture," Trans. Opt. Inst. 1, 1-36 (1919).
22. B. Richards and E. Wolf, "Electromagnetic diffraction in optical systems II. Structure of the image field in an aplanatic system," Proc. R. Soc. London, Ser. A 253, 358-379 (1959).
23. M. Mansuripur, "Distribution of light at and near the focus of high-numerical-aperture objectives," J. Opt. Soc. Am. A 3, 2086-2093 (1986).
24. M. Mansuripur, "Certain computational aspects of vector diffraction problems," J. Opt. Soc. Am. A 6, 786-805 (1989).
25. R. Kant, "An analytical solution of vector diffraction for focusing optical systems," J. Mod. Opt. 40, 337-348 (1993).
26. R. Kant, "An analytical solution of vector diffraction for focusing optical systems with Seidel aberrations," J. Mod. Opt. 40, 2293-2311 (1993).
27. C. J. R. Sheppard and P. Török, "Efficient calculation of electromagnetic diffraction in optical systems using a multipole expansion," J. Mod. Opt. 44, 803-819 (1997).
28. J. J. M. Braat, P. Dirksen, A. J. E. M. Janssen, and A. S. van de Nes, "Extended Nijboer-Zernike representation of the vector field in the focal region of an aberrated high-aperture optical system," J. Opt. Soc. Am. A 20, 2281-2292 (2003).
29. J. D. Jackson, Classical Electrodynamics, 3rd ed. (Wiley, 1998).
30. R. S. Longhurst, Geometrical and Physical Optics, 3rd ed. (Longman, 1974).
31. J. P. McGuire and R. A. Chipman, "Diffraction image formation in optical systems with polarization aberrations. I. Formulation and example," J. Opt. Soc. Am. A 7, 1614-1626 (1990).
32. S.-Y. Lu and R. A. Chipman, "Homogeneous and inhomogeneous Jones matrices," J. Opt. Soc. Am. A 11, 766-773 (1994).
33. G. D. VanWiggeren and R. Roy, "Transmission of linearly polarized light through a single-mode fiber with random fluctuations of birefringence," Appl. Opt. 38, 3888-3892 (1999).
34. S. Stallinga, "Axial birefringence in high-numerical-aperture optical systems and the light distribution close to focus," J. Opt. Soc. Am. A 18, 2846-2859 (2001).
35. S. Stallinga, "Light distribution close to focus in biaxially birefringent media," J. Opt. Soc. Am. A 21, 1785-1798 (2004).
36. S. Stallinga, "Strehl ratio for focusing into biaxially birefringent media," J. Opt. Soc. Am. A 21, 2406-2413 (2004).
37. C. van der Avoort, J. J. M. Braat, P. Dirksen, and A. J. E. M. Janssen, "Aberration retrieval from the intensity point-spread function in the focal region using the extended Nijboer-Zernike approach," J. Mod. Opt. 52, 1695-1728 (2005).
38. P. Dirkson, J. J. M. Braat, A. J. E. M. Janssen, and A. Leeuwestein, "Aberration retrieval for high-NA optical systems using the extended Nijboer-Zernike theory," in Optical Microlithography XVIII, B. W. Smith, ed., Proc. SPIE 5754, 262-273 (2005).