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Volumn 57, Issue 9, 2010, Pages 783-797

Characteristics of evanescent polarization imaging

Author keywords

native polarization and induced polarization; near field images; solid immersion lens

Indexed keywords

AIR-GAPS; ALTERNATING PHASE SHIFT MASKS; ATOMIC FORCE MICROSCOPES; CHROME-ON-GLASS; DIELECTRIC GRATING; EVANESCENT ENERGY; EXPERIMENTAL MEASUREMENTS; INDUCED POLARIZATION; MATERIAL STRUCTURE; NEAR-FIELD IMAGES; OBJECT STRUCTURE; POLARIZATION ANGLE; POLARIZATION IMAGING; SOLID IMMERSION LENS; SPATIAL FREQUENCY; TOPOGRAPHICAL IMAGES; TOPOGRAPHICAL STRUCTURE;

EID: 77954053966     PISSN: 09500340     EISSN: 13623044     Source Type: Journal    
DOI: 10.1080/09500341003660531     Document Type: Article
Times cited : (4)

References (15)
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  • 5
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    • Solid immersion lens photon tunneling microscope (invited paper)
    • Kino, G.S., Ed.; Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series SPIE Press: Bellingham, WA
    • Kino, 5.G.S.; Mansfield, S.M. Solid Immersion Lens Photon Tunneling Microscope (Invited Paper). In Society of Photo-Optical Instrumentation Engineers (SPIE) Conference; Kino, G.S., Ed.; Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, Vol. 1556; SPIE Press: Bellingham, WA, 1992.
    • (1992) Society of Photo-Optical Instrumentation Engineers (SPIE) Conference , vol.1556
    • Kino, G.S.1    Mansfield, S.M.2
  • 6
    • 33748043657 scopus 로고    scopus 로고
    • Near-field induced polarization imaging for optical data storage metrology
    • DOI 10.1117/12.685172, Optical Data Storage 2006
    • Chen, T.; Milster, T.D.; Yang, S.-H. Experimental Investigation of Photomask with Near-field Polarization Imaging. In Society of Photo-Optical Instrumentation Engineers (SPIE) Conference; Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, Vol. 6349; SPIE Press: Bellingham, WA, 2006. (Pubitemid 44300543)
    • (2006) Proceedings of SPIE - The International Society for Optical Engineering , vol.6282
    • Chen, T.1    Muster, T.D.2
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    • Zhang, J.; Lang, M.; Milster, T.D.; Chen, T.; Aspnes, E.; Bell, B. Fabrication and Testing of a GaP SIL with NA=2.64. In Society of Photo-Optical Instrumentation Engineers (SPIE) Conference; Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, Vol. 6620; SPIE Press: Bellingham, WA, 1995.
    • (1995) Society of Photo-Optical Instrumentation Engineers (SPIE) Conference , vol.6620
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.