Comparing the Fourier modal method with the C method: Analysis of conducting multilevel gratings in TM polarization

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 19, Issue 8, 2002, Pages 1555-1562

  Vallius, Tuomas ^a  

^a UNIVERSITY OF EASTERN FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; FOURIER TRANSFORMS; LIGHT POLARIZATION; REFRACTIVE INDEX;

MULTILEVEL GRATINGS;

DIFFRACTION GRATINGS;

EID: 0043156185     PISSN: 10847529     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAA.19.001555     Document Type: Article

References (24)

1. E. Popov, M. Nevière, B. Gralak, and G. Tayeb, "Staircase approximation validity for arbitrary-shaped gratings," J. Opt. Soc. Am. A 19, 33-42 (2002).
2. K. Knop, "Rigorous diffraction theory for transmission phase gratings with deep rectangular grooves," J. Opt. Soc. Am. 68, 1206-1210 (1978).
3. M. G. Moharam, "Diffraction analysis of dielectric surface-relief gratings," J. Opt. Soc. Am. 72, 1385-1392 (1982).
4. J. Chandezon, D. Maystre, and G. Raoult, "A new theoretical method for diffraction gratings and its numerical application," J. Opt. (Paris) 11, 235-241 (1980).
5. J. Chandezon, M. T. Dupuis, G. Cornet, and D. Maystre, "Multicoated gratings: a differential formalism applicable in the entire optical region," J. Opt. Soc. Am. 72, 839-846 (1982).
6. E. Popov and L. Mashev, "Convergence of Rayleigh-Fourier method and rigorous differential method for relief diffraction gratings," Opt. Acta 33, 593-605 (1986).
7. L. Li, "Multilayer coated gratings: differential method of Chandezon et al. revisited," J. Opt. Soc. Am. A 11, 2816-2828 (1994).
8. N. P. K. Cotter, T. W. Preist, and J. R. Sambles, "Scattering matrix approach to multilayer diffraction," J. Opt. Soc. Am. A 12, 1097-1103 (1995).
9. L. Li, "Formulation and comparison of two recursive matrix algorithms for modeling layered diffraction gratings," J. Opt. Soc. Am. A 13, 1024-1035 (1996).
10. L. Li and J. Chandezon, "Improvement of the coordinate transformation method for surface-relief gratings with sharp edges," J. Opt. Soc. Am. A 13, 2247-2255 (1996).
11. G. Granet, J. Chandezon, J. P. Plumey, and K. Raniriharinosy, "Reformulation of the coordinate transformation method through the concept of adaptive spatial resolution. Application to trapezoidal gratings," J. Opt. Soc. Am. A 18, 2102-2108 (2001).
12. L. Li, J. Chandezon, G. Granet, and J.-P. Plumey, "Rigorous and efficient grating-analysis method made easy for optical engineers," Appl. Opt. 38, 304-313 (1999).
13. J. P. Plumey and G. Granet, "Generalization of the coordinate transformation method with application to surface-relief gratings," J. Opt. Soc. Am. A 16, 508-516 (1999).
14. P. Lalanne and G. M. Morris, "Highly improved convergence of the coupled-wave method for TM polarization," J. Opt. Soc. Am. A 13, 779-784 (1996).
15. J. Turunen, "Form-birefringence limits of Fourier-expansion methods in grating theory," J. Opt. Soc. Am. A 13, 1013-1018 (1996).
16. G. Granet and B. Guizal, "Efficient implementation for the coupled-wave method for metallic lamellar gratings in TM polarization," J. Opt. Soc. Am. A 13, 1019-1023 (1996).
17. L. Li, "Use of Fourier series in the analysis of discontinuous periodic structures," J. Opt. Soc. Am. A 13, 1870-1876 (1996).
18. J. Turunen, "Diffraction theory of microrelief gratings," in Micro-Optics: Elements, Systems and Applications, H. P. Herzig, ed. (Taylor & Francis, Cornwall, UK, 1997), Chap. 2, pp. 31-52.
19. M. Born and E. Wolf, Principles of Optics (Cambridge U. Press, Cambridge, UK, 1999).
20. J. C. Maxwell, Electricity and Magnetism (Dover, New York, 1954), Vol. II.
21. R. Petit, "A tutorial introduction," in Electromagnetic Theory of Gratings, R. Petit, ed. (Springer-Verlag, Berlin, 1980), Chap. 1, pp. 1-40.
22. R. F. Harrington, Field Computation by Moment Methods (MacMillan, New York, 1968).
23. T. Vallius and M. Honkanen, "Reformulation of the Fourier modal method with adaptive spatial resolution: application to multilevel profiles," Opt. Express 10, 24-34 (2002), http://www.opticsexpress.org/abstract.cfm?UR I = OPEX-10-1-24.
24. M. G. Moharam, D. A. Pommet, E. B. Grann, and T. K. Gaylord, "Stable implementation of the rigorous coupled-wave analysis for surface relief gratings: enhanced transmittance matrix approach," J. Opt. Soc. Am. A 12, 1077-1086 (1995).