Sub-wavelength alignment mark signal analysis of advanced memory products

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3998, Issue , 2000, Pages 449-459

  Yin, Xiaoming ^a   Wong, Alfred ^a   Wheeler, Don ^a   Williams, Gary ^a   Lehner, Eric ^a   Zach, Franz ^a   Kim, Byeong ^a   Fukuzaki, Yuzo ^a   Lu, Z George ^a   Credendino, Santo ^a   Wiltshire, Tim ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED NETWORK ANALYSIS; COMPUTER SIMULATION; DYNAMIC RANDOM ACCESS STORAGE; ELECTRIC NETWORK SYNTHESIS; INTEGRATED CIRCUIT LAYOUT; SEMICONDUCTING SILICON;

DARK-FIELD ALIGNMENT SYSTEMS; SOFTWARE PACKAGE TEMPEST; STEPPER ALIGNMENT OPTICAL SYSTEMS;

PHOTOLITHOGRAPHY;

EID: 0033690048     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)