Extended Nijboer-Zernike (ENZ) based mask imaging: Efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6924, Issue , 2008, Pages

  Janssen, Olaf T A ^a   Van Haver, Sven ^a   Janssen, Augustus J E M ^b   Braat, Joseph J M ^a   Urbach, H Paul ^a   Pereira, Silvania F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Extended Nijboer Zernike theory; FDTD; Mask imaging; Pupil sampling; Stratton Chu

Indexed keywords

ALGORITHMS; BOOLEAN FUNCTIONS; COMPUTER NETWORKS; ELECTRIC FIELDS; ELECTROMAGNETIC FIELDS; ELECTROMAGNETISM; EVOLUTIONARY ALGORITHMS; FINITE DIFFERENCE METHOD; FINITE DIFFERENCE TIME DOMAIN METHOD; FOURIER TRANSFORMS; IMAGING SYSTEMS; IMAGING TECHNIQUES; LITHOGRAPHY; MAGNETIC FIELDS; MAGNETISM; MATHEMATICAL TRANSFORMATIONS; NUMERICAL ANALYSIS; OPTICS; OPTOELECTRONIC DEVICES; SCHEDULING ALGORITHMS; VEHICULAR TUNNELS;

(E ,2E) THEORY; COMPUTATIONAL EFFORTS; EFFICIENT COUPLING; ELECTROMAGNETIC FIELD SOLVERS; ENTRANCE PUPIL; FAR FIELDS; FINITE DIFFERENCE TIME DOMAIN (FDTD-3D); FOURIER; IMAGING ALGORITHMS; MASK STRUCTURES; NEAR FIELDS; OPTICAL MICRO LITHOGRAPHY; PERIODIC DOMAINS; RADIAL DIRECTIONS; ZERNIKE;

ELECTROMAGNETIC FIELD THEORY;

EID: 45449088329     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.772497     Document Type: Conference Paper

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