Methods for benchmarking photolithography simulators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5040 I, Issue , 2003, Pages 57-68

  Smith, Mark D ^a   Mack, Chris A ^a  

^a KLA Tencor Austin   (United States)

Author keywords

Lithography simulation; Numerical accuracy; PROLITH; SPLAT

Indexed keywords

ABERRATIONS; ALGORITHMS; BENCHMARKING; COMPUTER SIMULATION; COMPUTER SOFTWARE; OPTICAL INSTRUMENT LENSES; OPTIMIZATION;

BENCHMARKING PHOTOLITHOGRAPHY SIMULATORS; VECTOR IMAGING MODELS;

PHOTOLITHOGRAPHY;

EID: 0141499066     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.485537     Document Type: Conference Paper

References (13)

1. ITRS Roadmap, 2000 Update.
2. T. Brunner, "SEMATECH Report: Benchmark tests for image simulation programs used in optical lithography", SEMATECH (1994).
3. R.L. Gordon, "Exact Computation of 2D Aerial Imagry," Proc. SPIE, Vol. 4692 (2002) pp. 517-528.
4. C.A. Mack, Inside PROLITH: A Comprehensive Guide to Optical Lithography Simulation, FINLE Technologies (Austin, TX: 1997).
5. D.C. Cole, E. Barouch, U. Hollerbach, and S.A. Orzag, "Extending Scalar Aerial Image Calculations to Higher Numerical Apertures," Journal of Vacuum Science and Technology, Vol. B10, No. 6 (Nov/Dec, 1992) pp. 3037-3041.
6. M. Born and E. Wolf, Principles of Optics, 6th edition, Pergamon Press (Oxford, 1980) pp. 113-117.
7. M. Mansuripur, "Distribution of light at and near the focus of high-numerical-aperture objectives," Journal of the Optical Society of America Part A, Vol. 3 (1986) pp 2086-2093.
8. D.G. Flagello, T. Milster, A.E. Rosenbluth, "Theory of high-NA imaging in homogeneous thin films," Journal of the Optical Society of America Part A, Vol. 13 (1996) pp 53-64.
9. H.H. Hopkins, "On the diffraction theory of optical images," Proc. Royal Soc. A, Vol. 217 (1953) pp. 408-432
10. SPLAT was written by the D. Lee, D. Newmark, K. Toh, P. Flanner, and A.R. Neurether in the SAMPLE Group in the Electrical Engineering and Computer Science Department of the University of California, Berkeley.
11. E.C. Kintner, "Method for the calculation of partially coherent imagery," Applied Optics, Vol. 17 (Sept, 1978) pp. 2747-2753.
12. W.H. Steel, "Effects of Small Aberrations on the Images of Partially Coherent Objects," Journal of the Optical Society of America, Vol. 47 (1957) pp 405-413.
13. M. Abramowitz and I.A. Stegun, Handbook of Mathematical Functions, Dover (New York, NY: 1965)