Integral equation method with parametrization of grating profile theory and experiments

Journal of Modern Optics

Volumn 43, Issue 7, 1996, Pages 1323-1349

  Kleemann, Bernd H ^a   Mitreiter, Andreas ^a   Wyrowski, Frank ^a  

^a Berlin Institute of Optics (BIFO)   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; FOURIER OPTICS; INTEGRAL EQUATIONS; LIGHT MODULATION; MATHEMATICAL MODELS; MAXWELL EQUATIONS; PERMITTIVITY;

DIFFRACTIVE OPTICS; GRATING PROFILE PARAMETRIZATION;

DIFFRACTION GRATINGS;

EID: 0030189097     PISSN: 09500340     EISSN: 13623044     Source Type: Journal    
DOI: 10.1080/09500349608232807     Document Type: Article

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38. We would like to thank R. Bräuer of the University of Essen for providing us with the BKK results and J. Bischoff from the Technical University of Ilmenau for the RCWA results.