Theory of high-NA imaging in homogeneous thin films

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 13, Issue 1, 1996, Pages 53-64

  Flagello, Donis G ^a   Milster, Tom ^b   Rosenbluth, Alan E ^c  

^a ASML   (Netherlands)

^b UNIVERSITY OF ARIZONA   (United States)

^c IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001846054     PISSN: 10847529     EISSN: 15208532     Source Type: Journal    
DOI: 10.1364/JOSAA.13.000053     Document Type: Article

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