Three-dimensional nonplanar lithography simulation using a periodic fast multipole method

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3051, Issue , 1997, Pages 509-521

  Yeung, Michael S ^a   Barouch, Eytan ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY VALUE PROBLEMS; COMPUTER SIMULATION; ELECTROMAGNETIC WAVE SCATTERING; FAST FOURIER TRANSFORMS; MULTILAYERS;

FAST MULTIPOLE METHODS; OPTICAL MICROLITHOGRAPHY;

PHOTOLITHOGRAPHY;

EID: 0031378411     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.276030     Document Type: Conference Paper

References (7)