Improvements on the simulation of microscopic images for the defect detection of nanostructures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6922, Issue , 2008, Pages

  Rafler, Stephan ^a   Schuster, Thomas ^a   Frenner, Karsten ^a   Osten, Wolfgang ^a   Seifert, Uwe ^b  

^a UNIVERSITY OF STUTTGART   (Germany)

^b QIMONDA DRESDEN GMBH AND CO OHG   (Germany)

Author keywords

Defect detection; Illumination; Microscopy; Simulation

Indexed keywords

DEFECT DETECTION; LOSS OF ACCURACY; MICROSCOPIC IMAGE; ON-WAFER; OPTICAL DEFECTS; SIMULATION; STRUCTURE SIZES;

DEFECTS; UNITS OF MEASUREMENT;

PROCESS CONTROL;

EID: 79959331604     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.772498     Document Type: Conference Paper

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